公开(公告)号：US20190195964A1

公开(公告)日：2019-06-27

申请号：US16290778

申请日：2019-03-01

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Giacomo LAGHI ,  Giacomo LANGFELDER ,  Gabriele GATTERE ,  Alessandro TOCCHIO ,  Dario PACI

IPC: G01R33/02 ,  G01R33/00 ,  G01R33/028 ,  G01R33/038

Abstract: A MEMS triaxial magnetic sensor device includes a sensing structure having: a substrate; an outer frame, which internally defines a window and is elastically coupled to first anchorages fixed with respect to the substrate by first elastic elements; a mobile structure arranged in the window, suspended above the substrate, which is elastically coupled to the outer frame by second elastic elements and carries a conductive path for flow of an electric current; and an elastic arrangement operatively coupled to the mobile structure. The mobile structure performs, due to the first and second elastic elements and the arrangement of elastic elements, first, second, and third sensing movements in response to Lorentz forces from first, second, and third magnetic-field components, respectively. The first, second, and third sensing movements are distinct and decoupled from one another.

公开(公告)号：US20240049604A1

公开(公告)日：2024-02-08

申请号：US18222180

申请日：2023-07-14

Applicant: STMicroelectronics S.r.l. ,  Politecnico Di Milano

Inventor： Marco ZAMPROGNO ,  Raffaele Enrico FURCERI ,  Matteo GIANOLLO ,  Giacomo LANGFELDER

IPC: H10N30/80 ,  H02M3/158 ,  H02J7/00 ,  H02N2/06

CPC classification number: H10N30/802 ,  H02M3/158 ,  H02J7/0068 ,  H02N2/06

Abstract: A differential piezoelectric actuator-system includes an inductor and driver-circuit having switches for transferring energy between first and second actuators and the inductor, and between a voltage-supply node and the inductor. Control circuitry determines whether a next phase in which to operate the driver-circuit is a first charging-phase or a first recovery-phase. The first charging-phase includes operating the switches in: a first sub-phase to transfer energy from the first actuator to the inductor; a second sub-phase to transfer energy from the voltage supply node to the inductor; and a third sub-phase to transfer energy from the inductor to the second actuator. The first recovery-phase includes operating the switches in: a first sub-phase to transfer energy from the first actuator to the inductor; a second sub-phase to transfer energy from the inductor to the voltage supply node; and a third sub-phase to transfer energy from the inductor to the second actuator.

公开(公告)号：US20190064205A1

公开(公告)日：2019-02-28

申请号：US16116467

申请日：2018-08-29

Applicant: STMicroelectronics S.r.l.

Inventor： Alessandro TOCCHIO ,  Francesco RIZZINI ,  Carlo VALZASINA ,  Giacomo LANGFELDER ,  Cristiano Rocco MARRA

IPC: G01P15/125 ,  G01C19/5719 ,  G01P15/08

Abstract: An inertial sensor for sensing an external acceleration includes: a first and a second proof mass; a first and a second capacitor formed between first and second fixed electrodes and the first proof mass; a third and a fourth capacitor formed between third and fourth fixed electrodes and the second proof mass; a driving assembly configured to cause an antiphase oscillation of the first and second proof masses; a biasing circuit configured to bias the first and third capacitors, thus generating first variation of the oscillation frequency in a first time interval, and to bias the second and fourth capacitors, thus generating first variation of the oscillation frequency in a second time interval; a sensing assembly, configured to generate an differential output signal which is a function of a difference between a value of the oscillating frequency during the first time interval and a value of the oscillating frequency during the second time interval. Such differential output signal can be correlated to the value and direction of the external acceleration.

公开(公告)号：US20240093995A1

公开(公告)日：2024-03-21

申请号：US17933743

申请日：2022-09-20

Applicant: STMICROELECTRONICS S.r.l. ,  POLITECNICO DI MILANO

Inventor： Carlo VALZASINA ,  Giacomo LANGFELDER ,  Marco BESTETTI ,  Andrea Giovanni BONFANTI

IPC: G01C19/5712 ,  H03F3/45

CPC classification number: G01C19/5712 ,  H03F3/45475

Abstract: The present disclosure is directed to a dual-mode control circuit for a microelectromechanical system (MEMS) gyroscope. A control circuit is coupled to a Lissajous frequency modulated (LFM) gyroscope to control amplitude of oscillation of a mass along two directions. The amplitude of oscillation is controlled by an automatic gain control (AGC) loop which allows the same amplitude of oscillation in both directions. An AGC is implemented with a combination of proportional control (P-type) and integral control (I-type) paths that maintain the correct Lissajous pattern of the oscillation of the mass. The AGC may include a dual-mode stage which is able to switch between a P-type control path and an I-type control path based on the operation of the LFM gyroscope. A fast start-up phase may be controlled by the P-type control path while the I-type path is pre-charged to be ready to use in a steady state condition.

公开(公告)号：US20240049603A1

公开(公告)日：2024-02-08

申请号：US17879066

申请日：2022-08-02

Applicant: STMicroelectronics S.r.l. ,  Politecnico Di Milano

Inventor： Marco ZAMPROGNO ,  Raffaele Enrico FURCERI ,  Matteo GIANOLLO ,  Giacomo LANGFELDER

IPC: H01L41/04 ,  H02N2/06 ,  H02M3/158

CPC classification number: H01L41/042 ,  H02N2/06 ,  H02M3/158

Abstract: A differential piezoelectric actuator-system includes an inductor and driver-circuit having switches for transferring energy between first and second actuators and the inductor, and between a voltage-supply node and the inductor. Control circuitry determines whether a next phase in which to operate the driver-circuit is a first charging-phase or a first recovery-phase. The first charging-phase includes operating the switches in: a first sub-phase to transfer energy from the first actuator to the inductor; a second sub-phase to transfer energy from the voltage supply node to the inductor; and a third sub-phase to transfer energy from the inductor to the second actuator. The first recovery-phase includes operating the switches in: a first sub-phase to transfer energy from the first actuator to the inductor; a second sub-phase to transfer energy from the inductor to the second actuator; and a third sub-phase to transfer energy from the inductor to the voltage supply node.

公开(公告)号：US20220171180A1

公开(公告)日：2022-06-02

申请号：US17109929

申请日：2020-12-02

Applicant: Politecnico Di Milano ,  STMicroelectronics S.r.l.

Inventor： Paolo FRIGERIO ,  Giacomo LANGFELDER ,  Luca MOLINARI ,  Giuseppe MAIOCCHI ,  Andrea BARBIERI

IPC: G02B26/08 ,  B06B1/02

Abstract: Disclosed herein is a control system for a projection system, including a first subtractor receiving an input drive signal and a feedback signal and generating a first difference signal therefrom, the feedback signal being indicative of position of a quasi static micromirror of the projection system. A type-2 compensator receives the first difference signal and generates therefrom a first output signal. A derivative based controller receives the feedback signal and generates therefrom a second output signal. A second subtractor receives the first and second output signals and generates a second difference signal therefrom. The second difference signal serves to control a mirror driver of the projection system. A higher order resonance equalization circuit receives a pre-output signal from an analog front end of the projection system that is indicative of position of the quasi static micromirror, and generates the feedback signal therefrom.