公开(公告)号：US11673799B2

公开(公告)日：2023-06-13

申请号：US17155429

申请日：2021-01-22

Applicant: STMicroelectronics S.r.l.

Inventor： Enri Duqi ,  Nicolo′ Boni ,  Lorenzo Baldo ,  Massimiliano Merli ,  Roberto Carminati

IPC: B81C1/00 ,  H01L41/35

CPC classification number: B81C1/00158 ,  H01L41/35 ,  B81C2201/013

Abstract: To manufacture an oscillating structure, a wafer is processed by: forming torsional elastic elements; forming a mobile element connected to the torsional elastic elements; processing the first side of the wafer to form a mechanical reinforcement structure; and processing the second side of said wafer by steps of chemical etching, deposition of metal material, and/or deposition of piezoelectric material. Processing of the first side of the wafer is carried out prior to processing of the second side of the wafer so as not to damage possible sensitive structures formed on the first side of the wafer.

公开(公告)号：US11086122B2

公开(公告)日：2021-08-10

申请号：US16222027

申请日：2018-12-17

Applicant: STMicroelectronics S.r.l.

Inventor： Roberto Carminati ,  Massimiliano Merli ,  Nicolo′ Boni

IPC: G02B26/08 ,  G02B26/10 ,  B81B3/00 ,  H04N1/029 ,  H04N9/31

Abstract: A microelectromechanical device includes a body of semiconductor material, which forms a cavity, a mobile structure, and an actuation structure. The actuation structure includes at least one first deformable element which faces the cavity and is mechanically coupled to the body and to the mobile structure, and a piezoelectric-actuation system which can be controlled so as to deform the first deformable element and cause a consequent rotation of the mobile structure. The mobile structure includes a supporting region and at least one first pillar region, the first pillar region being mechanically coupled to the first deformable element, the supporting region being set on the first pillar region and overlying at least part of the first deformable element.

公开(公告)号：US10175474B2

公开(公告)日：2019-01-08

申请号：US15165547

申请日：2016-05-26

Applicant: STMicroelectronics S.r.l.

Inventor： Domenico Giusti ,  Roberto Carminati ,  Massimiliano Merli

IPC: G02B26/08 ,  G02B26/10 ,  B81B3/00 ,  H04N9/31

Abstract: A micromechanical device includes a tiltable structure that is rotatable about a first rotation axis. The tiltable structure is coupled to a fixed structure through an actuation structure of a piezoelectric type. The actuation structure is formed by spring elements having a spiral shape. The spring elements each include actuation arms extending transversely to the first rotation axis. Each actuation arm carries a respective piezoelectric band of piezoelectric material. The actuation arms are divided into two sets with the piezoelectric bands thereof biased in phase opposition to obtain rotation in opposite directions of the tiltable structure about the first rotation axis.

公开(公告)号：US11933968B2

公开(公告)日：2024-03-19

申请号：US17964672

申请日：2022-10-12

Applicant: STMicroelectronics S.r.l.

Inventor： Nicolo' Boni ,  Roberto Carminati ,  Massimiliano Merli

IPC: G02B26/08 ,  G02B26/10 ,  G03B21/00 ,  H02N2/02

CPC classification number: G02B26/0858 ,  G02B26/101 ,  G03B21/008 ,  H02N2/028

Abstract: A microelectromechanical (MEMS) structure includes a fixed frame internally defining a cavity, and a mobile mass suspended in the cavity and movable with a first resonant rotational mode about a first rotation axis and with a second resonant rotational mode about a second rotation axis orthogonal to the first. A pair of supporting elements extends in the cavity, is rigidly coupled to the fixed frame, and is elastically deformable to cause rotation of the mobile mass about the first rotation axis. A pair of elastic-coupling elements is elastically coupled between the mobile mass and the first pair of supporting elements. Each of the elastic-coupling elements includes a first and second elastic portions, the first elastic portion being compliant to torsion about the second rotation axis. The second elastic portion is compliant to bending outside of a horizontal plane of main extension of the MEMS structure.

公开(公告)号：US11655140B2

公开(公告)日：2023-05-23

申请号：US17126929

申请日：2020-12-18

Applicant: STMicroelectronics S.r.l.

Inventor： Nicolo' Boni ,  Roberto Carminati ,  Massimiliano Merli

IPC: G03B21/00 ,  B81B3/00 ,  G02B26/08 ,  H01L41/09 ,  H04N9/31

CPC classification number: B81B3/0072 ,  B81B3/0021 ,  G02B26/0858 ,  G03B21/008 ,  H01L41/09 ,  H04N9/3152 ,  B81B2201/042

Abstract: A micro-electro-mechanical device is formed by a fixed structure having a cavity. A tiltable structure is elastically suspended over the cavity and has a main extension in a tiltable plane and is rotatable about a rotation axis parallel to the tiltable plane. A piezoelectric actuation structure includes first and second driving arms carrying respective piezoelectric material regions and extending on opposite sides of the rotation axis. The first and the second driving arms are rigidly coupled to the fixed structure and are elastically coupled to the tiltable structure. During operation, a stop structure limits movements of the tiltable structure with respect to the actuation structure along a planar direction perpendicular to the rotation axis. The stop structure has a first planar stop element formed between the first driving arm and the tiltable structure and a second planar stop element formed between the second driving arm and the tiltable structure.

公开(公告)号：US20180031823A1

公开(公告)日：2018-02-01

申请号：US15465742

申请日：2017-03-22

Applicant: STMicroelectronics S.r.l.

Inventor： Roberto Carminati ,  Massimiliano Merli ,  Sebastiano Conti

IPC: G02B26/08 ,  H01L41/332 ,  G03B21/00 ,  H01L41/053

CPC classification number: G02B26/0858 ,  G03B21/008 ,  H01L41/053 ,  H01L41/332

Abstract: An oscillating structure with piezoelectric actuation includes first and second torsional elastic elements constrained to respective portions of a fixed supporting body and defining an axis of rotation. A mobile element is positioned between, and connected to, the first and second torsional elastic elements by first and second rigid regions. A first control region is coupled to the first rigid region and includes a first piezoelectric actuator. A second control region is coupled to the second rigid region and includes a second piezoelectric actuator. The first and second piezoelectric actuators are configured to cause local deformation of the first and second control regions to induce a torsion of the first and second torsional elastic elements.

公开(公告)号：US12242051B2

公开(公告)日：2025-03-04

申请号：US17745186

申请日：2022-05-16

Applicant: STMicroelectronics S.r.l.

Inventor： Nicolo′ Boni ,  Gianluca Mendicino ,  Enri Duqi ,  Roberto Carminati ,  Massimiliano Merli

IPC: G02B26/08 ,  G01L1/18 ,  H02K11/21

Abstract: A microelectromechanical mirror device has, in a die of semiconductor material: a fixed structure defining a cavity; a tiltable structure carrying a reflecting region elastically suspended above the cavity; at least a first pair of driving arms coupled to the tiltable structure and carrying respective piezoelectric material regions which may be biased to cause a rotation thereof around at least one rotation axis; elastic suspension elements coupling the tiltable structure elastically to the fixed structure and which are stiff with respect to movements out of the horizontal plane and yielding with respect to torsion; and a piezoresistive sensor configured to provide a detection signal indicative of the rotation of the tiltable structure. At least one test structure is integrated in the die to provide a calibration signal indicative of a sensitivity variation of the piezoresistive sensor in order to calibrate the detection signal.

公开(公告)号：US12117608B2

公开(公告)日：2024-10-15

申请号：US17369145

申请日：2021-07-07

Applicant: STMicroelectronics S.r.l.

Inventor： Roberto Carminati ,  Nicolo' Boni ,  Massimiliano Merli ,  Enri Duqi

IPC: G02B26/08 ,  G02B1/00 ,  G02B26/10 ,  G02B27/42

CPC classification number: G02B26/101 ,  G02B1/002 ,  G02B26/0833 ,  G02B27/4233

Abstract: A MEMS micromirror device is formed in a package including a containment body and a lid transparent to a light radiation. The package forms a cavity housing a tiltable platform having a reflecting surface. A metastructure is formed on the lid and/or on the reflecting surface and includes a plurality of diffractive optical elements.

公开(公告)号：US11520138B2

公开(公告)日：2022-12-06

申请号：US16827282

申请日：2020-03-23

Applicant: STMicroelectronics S.r.l.

Inventor： Nicolo' Boni ,  Roberto Carminati ,  Massimiliano Merli

IPC: H02N2/02 ,  G02B26/08 ,  G02B26/10 ,  G03B21/00

Abstract: A microelectromechanical structure includes a body of semiconductor material having a fixed frame internally defining a cavity, a mobile mass elastically suspended in the cavity and movable with a first resonant movement about a first rotation axis and with a second resonant movement about a second rotation axis, orthogonal to the first axis. First and second pairs of supporting elements, extending in cantilever fashion in the cavity, are rigidly coupled to the frame, and are piezoelectrically deformable to cause rotation of the mobile mass about the first and second rotation axes. First and second pairs of elastic-coupling elements are elastically coupled between the mobile mass and the first and the second pairs of supporting elements. The first and second movements of rotation of the mobile mass are decoupled from one another and do not interfere with one another due to the elastic-coupling elements of the first and second pairs.

公开(公告)号：US20220099960A1

公开(公告)日：2022-03-31

申请号：US17487166

申请日：2021-09-28

Applicant: STMicroelectronics S.r.l.

Inventor： Nicolo' Boni ,  Roberto Carminati ,  Massimiliano Merli

IPC: G02B26/08 ,  B81B3/00

Abstract: A microelectromechanical device includes a fixed structure having a frame defining a cavity, a tiltable structure elastically suspended above the cavity with main extension in a horizontal plane, a piezoelectrically driven actuation structure which can be biased to cause a desired rotation of the tiltable structure about a first and second rotation axes, and a supporting structure integral with the fixed structure and extending in the cavity starting from the frame. Lever elements are elastically coupled to the tiltable structure at a first end by elastic suspension elements and to the supporting structure at a second end by elastic connecting elements which define a lever rotation axis. The lever elements are elastically coupled to the actuation structure so that their biasing causes the desired rotation of the tiltable structure about the first and second rotation axes.