METHOD FOR MANUFACTURING OPTICAL FIBER PREFORM AND APPARATUS FOR MANUFACTURING OPTICAL FIBER PREFORM

    公开(公告)号:US20220306515A1

    公开(公告)日:2022-09-29

    申请号:US17697124

    申请日:2022-03-17

    Abstract: A method for manufacturing an optical fiber preform includes a deposition step and an introduction step. In the deposition step, glass fine particles are generated from a glass raw material gas in a flame obtained by burning a flammable gas supplied to a burner, and the glass fine particles are deposited to produce a hollow porous glass preform. In the introduction step, a first gas is introduced into an inside of a hollow of the porous glass preform, and a second gas is introduced to an outside of the porous glass preform. In the method, at least one of the first gas and the second gas is a gas containing halogen. In the gas introduction step, the gas containing halogen is introduced so that a first partial pressure of the first gas and a second partial pressure of the second gas are different from each other.

    METHOD FOR PRODUCING SILICON CARBIDE CRYSTAL
    2.
    发明申请
    METHOD FOR PRODUCING SILICON CARBIDE CRYSTAL 审中-公开
    生产碳化硅晶体的方法

    公开(公告)号:US20130327265A1

    公开(公告)日:2013-12-12

    申请号:US13862540

    申请日:2013-04-15

    CPC classification number: C30B23/02 C30B29/36

    Abstract: There is provided a method for producing a silicon carbide crystal, including the steps of: preparing a mixture by mixing silicon small pieces and carbon powders with each other; preparing a silicon carbide powder precursor by heating the mixture to not less than 2000° C. and not more than 2500° C.; preparing silicon carbide powders by pulverizing the silicon carbide powder precursor; and growing a silicon carbide crystal on a seed crystal using the silicon carbide powders in accordance with a sublimation-recrystallization method, 50% or more of the silicon carbide powders used in the step of growing the silicon carbide crystal having a polytype of 6H.

    Abstract translation: 提供了一种生产碳化硅晶体的方法,包括以下步骤:通过将硅小块和碳粉彼此混合来制备混合物; 通过将混合物加热至不低于2000℃且不超过2500℃来制备碳化硅粉末前体; 通过粉碎碳化硅粉末前体制备碳化硅粉末; 并使用根据升华重结晶法的碳化硅粉末在晶种上生长碳化硅晶体,在生长具有6H型聚合物的碳化硅晶体的步骤中使用的50%以上的碳化硅粉末。

    METHOD FOR MANUFACTURING OPTICAL FIBER PREFORM

    公开(公告)号:US20230286851A1

    公开(公告)日:2023-09-14

    申请号:US18117646

    申请日:2023-03-06

    CPC classification number: C03B37/01446 C03B37/01211

    Abstract: A method for manufacturing an optical fiber preform includes generating glass particles from a glass raw material gas in a flame obtained by combustion of a combustible gas supplied to a burner and depositing the glass particles on an outer circumference of a silica glass pipe to form a hollow porous glass preform, inserting a rod into the silica glass pipe, transparently vitrifying the porous glass preform by heating the porous glass preform after inserting the rod to obtain a transparent glass preform, drawing out the rod from the silica glass pipe after the porous glass preform is transparently vitrified, and removing the silica glass pipe from the transparent glass preform by etching after drawing out the rod.

    METHOD AND DEVICE FOR MANUFACTURING SILICON CARBIDE SINGLE-CRYSTAL
    4.
    发明申请
    METHOD AND DEVICE FOR MANUFACTURING SILICON CARBIDE SINGLE-CRYSTAL 审中-公开
    用于制造单晶碳化硅的方法和装置

    公开(公告)号:US20130239881A1

    公开(公告)日:2013-09-19

    申请号:US13753941

    申请日:2013-01-30

    CPC classification number: C30B23/025 C30B29/36

    Abstract: A method for manufacturing a silicon carbide single-crystal having a diameter of more than 100 mm and a maximum height of 20 mm or more using a sublimation method includes the following steps. That is, there are prepared a seed substrate made of silicon carbide and a silicon carbide source material. By sublimating the silicon carbide source material, the silicon carbide single-crystal is grown on a growth surface of the seed substrate. In the step of growing the silicon carbide single-crystal, a first carbon member provided at a position facing a side wall of the seed substrate is etched at a rate of 0.1 mm/hour or less. By suppressing a change in growth condition for the silicon carbide single-crystal in the crucible, there can be provided a method for manufacturing a silicon carbide single-crystal so as to stably grow the silicon carbide single-crystal.

    Abstract translation: 使用升华法制造直径大于100mm,最大高度为20mm以上的碳化硅单晶的方法包括以下步骤。 也就是说,准备了由碳化硅和碳化硅源材料制成的种子基底。 通过升华碳化硅源材料,碳化硅单晶生长在种子基底的生长表面上。 在生长碳化硅单晶的步骤中,以0.1mm /小时以下的速度蚀刻设置在面向种子基板的侧壁的位置的第一碳构件。 通过抑制坩埚中的碳化硅单晶的生长条件的变化,可以提供一种制造碳化硅单晶的方法,以便稳定地生长碳化硅单晶。

    METHOD FOR MANUFACTURING SILICON CARBIDE SINGLE CRYSTAL
    6.
    发明申请
    METHOD FOR MANUFACTURING SILICON CARBIDE SINGLE CRYSTAL 审中-公开
    制造单晶碳化硅的方法

    公开(公告)号:US20130255568A1

    公开(公告)日:2013-10-03

    申请号:US13780127

    申请日:2013-02-28

    CPC classification number: C30B23/066 C30B23/025 C30B29/36

    Abstract: A method for manufacturing silicon carbide single crystal having a diameter larger than 100 mm by sublimation includes the following steps. A seed substrate made of silicon carbide and silicon carbide raw material are prepared. Silicon carbide single crystal is grown on the growth face of the seed substrate by sublimating the silicon carbide raw material. In the step of growing silicon carbide single crystal, the maximum growing rate of the silicon carbide single crystal growing on the growth face of the seed substrate is greater than the maximum growing rate of the silicon carbide crystal growing on the surface of the silicon carbide raw material. Thus, there can be provided a method for manufacturing silicon carbide single crystal allowing a thick silicon carbide single crystal film to be obtained, when silicon carbide single crystal having a diameter larger than 100 mm is grown.

    Abstract translation: 通过升华制造直径大于100mm的碳化硅单晶的方法包括以下步骤。 制备由碳化硅和碳化硅原料制成的种籽基材。 碳化硅单晶通过使碳化硅原料升华而在种底基材的生长面上生长。 在生长碳化硅单晶的步骤中,生长在种子基底的生长面上的碳化硅单晶的最大生长速率大于在碳化硅原料的表面上生长的碳化硅晶体的最大生长速率 材料。 因此,当生产直径大于100mm的碳化硅单晶时,可以提供制造碳化硅单晶的方法,以获得厚的碳化硅单晶膜。

    METHOD AND FACILITY FOR PRODUCING OPTICAL FIBER BASE MATERIAL

    公开(公告)号:US20230331618A1

    公开(公告)日:2023-10-19

    申请号:US18028602

    申请日:2021-09-27

    CPC classification number: C03B37/01406 C03B2207/42 C03B2207/50

    Abstract: A method for manufacturing an optical fiber preform includes a core part deposition process and a clad part deposition process. The number of burners used in the core part deposition process is less than the number of burners used in the clad part deposition process. A distance between turning back points in a first reciprocating motion for the core deposition process is equal to or greater than a length of an effective portion of the optical fiber preform. At least three burners are used in the clad part deposition process. A distance between turning back points in a second reciprocating motion for the clad part deposition process is shorter than a distance between turning back points in the first reciprocating motion. The turning back points in the second reciprocating motion vary during the clad part deposition process.

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