公开(公告)号：US20160214367A1

公开(公告)日：2016-07-28

申请号：US14848780

申请日：2015-09-09

Applicant: Samsung Display Co., Ltd.

Inventor： Hyunhwan CHOI ,  Myunghwan PARK ,  Seung-Jin BAEK ,  ManHong NA ,  Kunhee JO

IPC: B32B43/00 ,  G02F1/13

CPC classification number: B32B43/006 ,  B32B38/10 ,  B32B38/1858 ,  B32B2457/202 ,  G02F1/1303 ,  Y10T156/1132 ,  Y10T156/1168 ,  Y10T156/1179 ,  Y10T156/1944 ,  Y10T156/1978 ,  Y10T156/1983

Abstract: Provided is a substrate detachment apparatus including a plurality of stepped substrates having a stair shape, each of which includes at least one or more stepped layers, the plurality of stepped substrates partially overlapping each other, a plurality of vacuum generating members coupled to holes formed in each of the stepped substrates, and a plurality of vacuum adsorption pads connected to the vacuum generating members, the plurality of vacuum adsorption pads being adsorbed to a substrate, wherein the stepped substrates vertically ascends in sequence inward from a stepped substrate connected to a plurality of vacuum adsorption pads, which are adsorbed to a outermost side of the substrate, of the vacuum adsorption pads.

Abstract translation: 本发明提供一种基板拆卸装置，其具有台阶形状的多个阶梯状基板，每一个台阶形状包括至少一个或多个阶梯层，多个台阶基板彼此部分重叠，多个真空发生元件， 每个阶梯式衬底和连接到真空产生构件的多个真空吸附垫，多个真空吸附垫被吸附到衬底上，其中阶梯衬底从连接到多个衬底的阶梯衬底依次向内垂直地上升 真空吸附垫吸附在真空吸附垫的最外侧。