公开(公告)号：US11911811B2

公开(公告)日：2024-02-27

申请号：US17839766

申请日：2022-06-14

Applicant: Samsung Display Co., Ltd.

Inventor： Myungkyu Kim

IPC: B08B7/00 ,  C23C14/04

CPC classification number: B08B7/0042 ,  B08B7/0035 ,  C23C14/042

Abstract: An apparatus for cleaning a mask includes a chamber in which material deposition is performable on a substrate using the mask, the chamber including a transmission window through which light used in cleaning the mask within the chamber is irradiated into the chamber from outside thereof; within the chamber: a stage on which the substrate is disposed, the stage disposed in a plane defined by first and second directions crossing each other; and a material deposition unit from which a deposition material is provided to the substrate; and a light irradiation unit from which is provided the light used in cleaning the mask within the chamber. The light irradiation unit is disposed outside the chamber and irradiates the light into the chamber through the transmission window. The material deposition unit disposed within the chamber and the light irradiation unit disposed outside the chamber are reciprocally movable in the first direction.

公开(公告)号：US10792709B2

公开(公告)日：2020-10-06

申请号：US15828202

申请日：2017-11-30

Applicant: Samsung Display Co., Ltd.

Inventor： Jinseok Son ,  Myungkyu Kim ,  Kyunghoon Chung

IPC: B08B3/02 ,  B08B7/00 ,  B08B7/04 ,  B08B3/08 ,  C23C14/04 ,  H05B33/10 ,  H01L51/52 ,  H01L51/56 ,  H01L51/00

Abstract: A mask cleaning apparatus and method of using the same includes a preheating zone preheating a mask, a first ultraviolet cleaning zone irradiating the mask with a first ultraviolet laser beam at a first irradiation angle, a first cooling zone cooling the mask irradiated with the first ultraviolet laser beam, a second ultraviolet cleaning zone irradiating the mask with a second ultraviolet laser beam at a second irradiation angle, a second cooling zone cooling the mask irradiated with the second ultraviolet laser beam, an infrared cleaning zone irradiating the mask with an infrared laser beam at a third irradiation angle, and a peeling zone spraying air onto the mask irradiated with the infrared laser beam.

公开(公告)号：US20230363245A1

公开(公告)日：2023-11-09

申请号：US18142479

申请日：2023-05-02

Applicant: Samsung Display Co., Ltd.

Inventor： Youngsun Cho ,  Jaemin Hong ,  Myungkyu Kim ,  Jangwoo Kim ,  Jongsung Park ,  Sangshin Lee ,  Jungseob Lee ,  Kyunghoon Chung ,  Eunjoung Jung ,  Kyongho Hong

IPC: H10K71/16 ,  H10K59/12 ,  C23C14/04 ,  C23C14/24

CPC classification number: H10K71/166 ,  H10K59/1201 ,  C23C14/042 ,  C23C14/24

Abstract: An apparatus for manufacturing a display device includes: a mask assembly tilted with respect to a plane parallel to the ground; a deposition source facing the mask assembly; and a carrier facing the mask assembly and configured to support a display substrate. The mask assembly includes: a mask frame having a flat surface; and a mask sheet having an end on the flat surface of the mask frame and coupled to the mask frame.

公开(公告)号：US10286416B2

公开(公告)日：2019-05-14

申请号：US14994941

申请日：2016-01-13

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Jeongwon Han ,  Myungkyu Kim

IPC: B23K26/21 ,  B05B12/20 ,  B23K26/146 ,  B23K37/04 ,  B23K26/12 ,  B23K26/14 ,  B23K26/035 ,  B23K26/244 ,  H01L51/00 ,  H01L27/12 ,  B23K103/04 ,  B23K103/18

Abstract: A mask tension welding device for welding a mask for thin film deposition on a mask frame, the mask tension welding device including a tension unit to pull the mask in one direction; a pressurizing unit to press the mask to the mask frame, the pressuring unit including an upper housing, a lower housing coupled to the upper housing, a window between the upper housing and the lower housing, a space in the lower housing into which a fluid is injectable, and an inlet and an outlet to provide a passage through which the fluid is injected and discharged; and a laser welding unit to weld the mask and the mask frame to each other.

公开(公告)号：US20250008831A1

公开(公告)日：2025-01-02

申请号：US18620063

申请日：2024-03-28

Applicant: Samsung Display Co., Ltd.

Inventor： Kyongho Hong ,  Myungkyu Kim ,  Sungho Park ,  Changkon Park ,  Sukbeom You

IPC: H10K71/16 ,  H01L21/027 ,  H10K59/35

Abstract: An apparatus for manufacturing a mask is provided. The apparatus includes: a stage body portion tilted with respect to a gravitational direction and configured to receive a mask frame having opening sits thereon; a contact portion protruding from one surface of the stage body portion toward the mask frame; and a moving portion configured to move the contact portion.

公开(公告)号：US09802276B2

公开(公告)日：2017-10-31

申请号：US15043866

申请日：2016-02-15

Applicant: Samsung Display Co., Ltd.

Inventor： Myungkyu Kim ,  Jeongwon Han

IPC: B23K31/02 ,  B23K37/04 ,  H01L51/00

CPC classification number: B23K37/0435 ,  B23K31/02 ,  B23K37/0408 ,  H01L51/0011

Abstract: Exemplary embodiments provide an apparatus to manufacture a mask frame assembly, including: extending unit configured to extend both ends of a mask in a first direction and arrange the mask on a frame, the mask including a deposition pattern and the frame including an opening; a pressurizing unit including a plurality of pressing portions the plurality of pressing portions configured to independently press the mask toward the frame; and a welding unit configured to weld the mask to affix the mask onto the frame.