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公开(公告)号：US11335892B2
公开(公告)日：2022-05-17
申请号：US16713752
申请日：2019-12-13
Applicant: Samsung Display Co., Ltd.
Inventor： Su-Hwan Lee , Un-Cheol Sung , Mu-Hyun Kim , Dong-Kyu Lee
IPC: C23C14/04 , H01L51/56 , C23C14/56 , C23C14/24 , H01L21/677
Abstract: An organic layer deposition apparatus and a method of manufacturing an organic light-emitting display device by using the apparatus. In particular, an organic layer deposition apparatus that is more easily manufactured and is suitable for use in mass production of large substrates while performing high-definition patterning thereon, as well as a method of manufacturing an organic light-emitting display device by using such an apparatus.
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2.发明授权公开(公告)号：US09496524B2
公开(公告)日：2016-11-15
申请号：US13938173
申请日：2013-07-09
Applicant: SAMSUNG DISPLAY CO., LTD.
Inventor： Su-Hwan Lee , Un-Cheol Sung , Chae-Woong Kim , Young-Mook Choi
CPC classification number: H01L51/56 , B05D1/60 , C23C14/04 , C23C14/12 , C23C14/24 , C23C14/243 , C23C14/56 , H01L27/32 , H01L27/326 , H01L51/0008 , H01L2227/323
Abstract: An organic layer deposition apparatus, a method of manufacturing an organic light-emitting display apparatus by using the same, and an organic light-emitting display apparatus manufactured using the method. The organic layer deposition apparatus includes a conveyer unit including first and second conveyer units, loading and unloading units, and a deposition unit. A transfer unit moves between the first and second conveyer units, and the substrate attached to the transfer unit is spaced from a plurality of organic layer deposition assemblies of the deposition unit while being transferred by the first conveyer unit. The organic layer deposition assemblies include common layer deposition assemblies and pattern layer deposition assemblies.
Abstract translation: 有机层沉积装置，使用该有机发光显示装置的有机发光显示装置的制造方法以及使用该方法制造的有机发光显示装置。 有机层沉积装置包括具有第一和第二输送单元，装卸单元和沉积单元的输送单元。 转印单元在第一和第二输送单元之间移动，并且附着到转印单元的基板与沉积单元的多个有机层沉积组件间隔开，同时由第一输送单元转印。 有机层沉积组件包括公共层沉积组件和图案层沉积组件。
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公开(公告)号：US20160244872A1
公开(公告)日：2016-08-25
申请号：US15145689
申请日：2016-05-03
Applicant: SAMSUNG DISPLAY CO., LTD.
Inventor： Hyun-Sook Park , Chang-Mog Jo , Hee-Cheol Kang , Yun-Mi Lee , Un-Cheol Sung , Yong-Sup Choi , Jong-Heon Kim , Jae-Kwang Ryu
CPC classification number: C23C14/24 , C23C14/042 , H01L51/001
Abstract: A thin film deposition apparatus that can be simply applied to produce large-sized display devices on a mass scale and that improves manufacturing yield. The thin film deposition apparatus includes a deposition source that discharges a deposition material; a deposition source nozzle unit disposed at a side of the deposition source and including a plurality of deposition source nozzles arranged in a first direction; and a patterning slit sheet disposed opposite to the deposition source nozzle unit and including a plurality of patterning slits arranged in a second direction that is perpendicular to the first direction. A deposition is performed while the substrate or the thin film deposition apparatus moves relative to each other in the first direction, and the deposition source, the deposition source nozzle unit, and the patterning slit sheet are formed integrally with each other.
Abstract translation: 一种薄膜沉积装置，其可以简单地应用于大规模生产大尺寸显示装置并且提高制造产量。 薄膜沉积装置包括：放电沉积材料的沉积源; 沉积源喷嘴单元，设置在沉积源的一侧，并且包括沿第一方向布置的多个沉积源喷嘴; 以及与沉积源喷嘴单元相对设置并包括沿垂直于第一方向的第二方向布置的多个图案化狭缝的图案化缝隙片。 当基板或薄膜沉积装置在第一方向上相对移动时进行沉积，并且沉积源，沉积源喷嘴单元和图案化缝隙片彼此一体地形成。
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公开(公告)号：US11778890B2
公开(公告)日：2023-10-03
申请号：US17732900
申请日：2022-04-29
Applicant: Samsung Display Co., Ltd.
Inventor： Su-Hwan Lee , Un-Cheol Sung , Mu-Hyun Kim , Dong-Kyu Lee
IPC: C23C14/24 , H10K71/00 , C23C14/04 , C23C14/56 , H01L21/677
CPC classification number: H10K71/00 , C23C14/042 , C23C14/24 , C23C14/568 , H01L21/6776
Abstract: An organic layer deposition apparatus and a method of manufacturing an organic light-emitting display device by using the apparatus. In particular, an organic layer deposition apparatus that is more easily manufactured and is suitable for use in mass production of large substrates while performing high-definition patterning thereon, as well as a method of manufacturing an organic light-emitting display device by using such an apparatus.
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公开(公告)号：US20190226078A1
公开(公告)日：2019-07-25
申请号：US16368748
申请日：2019-03-28
Applicant: SAMSUNG DISPLAY CO., LTD.
Inventor： Hyun-Sook Park , Chang-Mog Jo , Hee-Cheol Kang , Yun-Mi Lee , Un-Cheol Sung , Yong-Sup Choi , Jong-Heon Kim , Jae-Kwang Ryu
Abstract: A thin film deposition apparatus that can be simply applied to produce large-sized display devices on a mass scale and that improves manufacturing yield. The thin film deposition apparatus includes a deposition source that discharges a deposition material; a deposition source nozzle unit disposed at a side of the deposition source and including a plurality of deposition source nozzles arranged in a first direction; and a patterning slit sheet disposed opposite to the deposition source nozzle unit and including a plurality of patterning slits arranged in a second direction that is perpendicular to the first direction. A deposition is performed while the substrate or the thin film deposition apparatus moves relative to each other in the first direction, and the deposition source, the deposition source nozzle unit, and the patterning slit sheet are formed integrally with each other.
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Patent Agency Ranking
6.发明授权公开(公告)号：US09246135B2
公开(公告)日：2016-01-26
申请号：US13787464
申请日：2013-03-06
Applicant: Samsung Display Co., Ltd.
Inventor： Su-Hwan Lee , Un-Cheol Sung
CPC classification number: H01L51/56 , C23C14/042 , C23C14/12 , C23C14/545 , H01L51/001 , H01L51/50
Abstract: An organic layer deposition apparatus, a method of manufacturing an organic light-emitting display device by using the same, and an organic light-emitting display device manufactured using the method, and in particular, an organic layer deposition apparatus that is suitable for use in the mass production of a large substrate and enables high-definition patterning, a method of manufacturing an organic light-emitting display device by using the same, and an organic light-emitting display device manufactured using the method.
Abstract translation: 有机层沉积装置，使用该有机发光显示装置的有机发光显示装置的制造方法以及使用该方法制造的有机发光显示装置，特别是适用于 大型基板的大量生产和高分辨率图案化，使用该方法制造有机发光显示装置的方法和使用该方法制造的有机发光显示装置。
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公开(公告)号：US10431779B2
公开(公告)日：2019-10-01
申请号：US15236218
申请日：2016-08-12
Applicant: Samsung Display Co., Ltd.
Inventor： Su-Hwan Lee , Un-Cheol Sung , Chae-Woong Kim , Young-Mook Choi
IPC: H01L51/52 , H01L51/56 , H01L27/32 , H01L51/00 , C23C14/04 , C23C14/12 , C23C14/24 , C23C14/56 , B05D1/00
Abstract: An organic layer deposition apparatus, a method of manufacturing an organic light-emitting display apparatus by using the same, and an organic light-emitting display apparatus manufactured using the method. The organic layer deposition apparatus includes a conveyer unit including first and second conveyer units, loading and unloading units, and a deposition unit. A transfer unit moves between the first and second conveyer units, and the substrate attached to the transfer unit is spaced from a plurality of organic layer deposition assemblies of the deposition unit while being transferred by the first conveyer unit. The organic layer deposition assemblies include common layer deposition assemblies and pattern layer deposition assemblies.
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公开(公告)号：US10287671B2
公开(公告)日：2019-05-14
申请号：US15145689
申请日：2016-05-03
Applicant: SAMSUNG DISPLAY CO., LTD.
Inventor： Hyun-Sook Park , Chang-Mog Jo , Hee-Cheol Kang , Yun-Mi Lee , Un-Cheol Sung , Yong-Sup Choi , Jong-Heon Kim , Jae-Kwang Ryu
Abstract: A thin film deposition apparatus that can be simply applied to produce large-sized display devices on a mass scale and that improves manufacturing yield. The thin film deposition apparatus includes a deposition source that discharges a deposition material; a deposition source nozzle unit disposed at a side of the deposition source and including a plurality of deposition source nozzles arranged in a first direction; and a patterning slit sheet disposed opposite to the deposition source nozzle unit and including a plurality of patterning slits arranged in a second direction that is perpendicular to the first direction. A deposition is performed while the substrate or the thin film deposition apparatus moves relative to each other in the first direction, and the deposition source, the deposition source nozzle unit, and the patterning slit sheet are formed integrally with each other.
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9.发明申请ORGANIC LAYER DEPOSITION APPARATUS, METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY APPARATUS USING THE SAME, AND ORGANIC LIGHT-EMITTING DISPLAY APPARATUS MANUFACTURED USING THE METHOD 审中-公开有机层沉积装置，使用其的有机发光显示装置的制造方法和使用该方法制造的有机发光显示装置公开(公告)号：US20160351860A1
公开(公告)日：2016-12-01
申请号：US15236218
申请日：2016-08-12
Applicant: Samsung Display Co., Ltd.
Inventor： Su-Hwan Lee , Un-Cheol Sung , Chae-Woong Kim , Young-Mook Choi
CPC classification number: H01L51/56 , B05D1/60 , C23C14/04 , C23C14/12 , C23C14/24 , C23C14/243 , C23C14/56 , H01L27/32 , H01L27/326 , H01L51/0008 , H01L2227/323
Abstract: An organic layer deposition apparatus, a method of manufacturing an organic light-emitting display apparatus by using the same, and an organic light-emitting display apparatus manufactured using the method. The organic layer deposition apparatus includes a conveyer unit including first and second conveyer units, loading and unloading units, and a deposition unit. A transfer unit moves between the first and second conveyer units, and the substrate attached to the transfer unit is spaced from a plurality of organic layer deposition assemblies of the deposition unit while being transferred by the first conveyer unit. The organic layer deposition assemblies include common layer deposition assemblies and pattern layer deposition assemblies.
Abstract translation: 有机层沉积装置，使用该有机发光显示装置的有机发光显示装置的制造方法以及使用该方法制造的有机发光显示装置。 有机层沉积装置包括具有第一和第二输送单元，装卸单元和沉积单元的输送单元。 转印单元在第一和第二输送单元之间移动，并且附着到转印单元的基板与沉积单元的多个有机层沉积组件间隔开，同时由第一输送单元转印。 有机层沉积组件包括公共层沉积组件和图案层沉积组件。
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10.发明申请公开(公告)号：US20140014929A1
公开(公告)日：2014-01-16
申请号：US13938173
申请日：2013-07-09
Applicant: SAMSUNG DISPLAY CO., LTD.
Inventor： Su-Hwan Lee , Un-Cheol Sung , Chae-Woong Kim , Young-Mook Choi
CPC classification number: H01L51/56 , B05D1/60 , C23C14/04 , C23C14/12 , C23C14/24 , C23C14/243 , C23C14/56 , H01L27/32 , H01L27/326 , H01L51/0008 , H01L2227/323
Abstract: An organic layer deposition apparatus, a method of manufacturing an organic light-emitting display apparatus by using the same, and an organic light-emitting display apparatus manufactured using the method. The organic layer deposition apparatus includes a conveyer unit including first and second conveyer units, loading and unloading units, and a deposition unit. A transfer unit moves between the first and second conveyer units, and the substrate attached to the transfer unit is spaced from a plurality of organic layer deposition assemblies of the deposition unit while being transferred by the first conveyer unit. The organic layer deposition assemblies include common layer deposition assemblies and pattern layer deposition assemblies.
Abstract translation: 有机层沉积装置，使用该有机发光显示装置的有机发光显示装置的制造方法以及使用该方法制造的有机发光显示装置。 有机层沉积装置包括具有第一和第二输送单元，装卸单元和沉积单元的输送单元。 转印单元在第一和第二输送单元之间移动，并且附着到转印单元的基板与沉积单元的多个有机层沉积组件间隔开，同时由第一输送单元转印。 有机层沉积组件包括公共层沉积组件和图案层沉积组件。
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