公开(公告)号：US20140185044A1

公开(公告)日：2014-07-03

申请号：US14142093

申请日：2013-12-27

Applicant: Samsung Electronics Co., Ltd.

Inventor： Akio Ishikawa ,  Mitsuhiro Togashi ,  Mitsunori Numata

IPC: G01N21/88

CPC classification number: G01N21/8806 ,  G01N21/21 ,  G01N21/956 ,  G01N21/95607 ,  G01N21/95623 ,  G01N2021/8825 ,  G01N2021/8848

Abstract: An apparatus for detecting a defect of an object may include a light emitter configured to emit straight polarized lights having different polarized directions, a spatial filter having openings through which the straight polarized lights selectively pass, an optical member configured to condense the straight polarized lights, which pass through the openings, on the object, and a light detector configured to detect lights reflected from the object. Thus, the defect may be accurately detected in a short time.

Abstract translation: 用于检测物体的缺陷的装置可以包括配置为发射具有不同偏振方向的直线偏振光的光发射器，具有直线偏振光选择性地通过的开口的空间滤光器，被配置为冷凝直线偏振光的光学构件， 其穿过物体上的开口，以及被配置为检测从物体反射的光的光检测器。 因此，可以在短时间内精确地检测缺陷。

公开(公告)号：US10429315B2

公开(公告)日：2019-10-01

申请号：US16037088

申请日：2018-07-17

Applicant: Samsung Electronics Co., Ltd.

Inventor： Akio Ishikawa ,  Ken Ozawa ,  Kwang-Soo Kim ,  Sean Park ,  Mitsunori Numata

IPC: G01N21/00 ,  G01N21/88 ,  G02B27/42 ,  G06T7/00 ,  G01N21/956

Abstract: An imaging apparatus includes an illumination light source to output an illumination light, an illumination optical system to transmit the illumination light toward a sample, an imaging optical system to transmit light reflected from the sample, a stage to move the sample in a predetermined transfer direction, and a photographing unit to receive the reflected light. The imaging apparatus may include one or more diffraction grids located at conjugate focal planes of the sample. The operation of the photographing unit may be synchronized with a movement of the sample by the stage to obtain an image in accordance with a time delay integration method.

公开(公告)号：US09453800B2

公开(公告)日：2016-09-27

申请号：US14142093

申请日：2013-12-27

Applicant: Samsung Electronics Co., Ltd.

Inventor： Akio Ishikawa ,  Mitsuhiro Togashi ,  Mitsunori Numata

IPC: G01N21/21 ,  G01N21/95 ,  G01N21/88 ,  G01N21/956

CPC classification number: G01N21/8806 ,  G01N21/21 ,  G01N21/956 ,  G01N21/95607 ,  G01N21/95623 ,  G01N2021/8825 ,  G01N2021/8848

Abstract: An apparatus for detecting a defect of an object may include a light emitter configured to emit straight polarized lights having different polarized directions, a spatial filter having openings through which the straight polarized lights selectively pass, an optical member configured to condense the straight polarized lights, which pass through the openings, on the object, and a light detector configured to detect lights reflected from the object. Thus, the defect may be accurately detected in a short time.

Abstract translation: 用于检测物体的缺陷的装置可以包括配置为发射具有不同偏振方向的直线偏振光的光发射器，具有直线偏振光选择性地通过的开口的空间滤光器，被配置为冷凝直线偏振光的光学构件， 其穿过物体上的开口，以及被配置为检测从物体反射的光的光检测器。 因此，可以在短时间内精确地检测缺陷。