公开(公告)号：US20240401720A1

公开(公告)日：2024-12-05

申请号：US18658493

申请日：2024-05-08

Applicant: Samsung Electronics Co., Ltd.

Inventor： Hyunwoong CHOI ,  Hyunyoung LEE ,  Donghyun KIM ,  Pyungkang KIM ,  Beomsoo HWANG

IPC: F16L3/015

Abstract: An apparatus for folding a tube includes a fixed mount fixedly installed in a facility, a first connection member installed on the fixed mount, a folding unit connected to the first connection member and expanding or compressing a tube folded and spirally wound, a second connection member disposed on a side opposite to a portion to which the first connection member is connected, and connected to the folding unit, and a chemical liquid container to which the second connection member is connected. The folding unit includes a plurality of link members for connection rotatably installed on the first connection member and the second connection member and a plurality of foldable link members sequentially connected and folded from the plurality of link members for connection.

公开(公告)号：US20230332747A1

公开(公告)日：2023-10-19

申请号：US17721881

申请日：2022-04-15

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Beomsoo HWANG ,  Jongkyu KIM ,  Hyunsik KIM ,  Kyeongsup BYEON ,  Byungjun AN ,  Byeongchan JEONG ,  Kimoon LEE ,  Hyungho CHOI

IPC: F17C13/04 ,  F17C13/02

CPC classification number: F17C13/04 ,  F17C13/02 ,  F17C2205/0382 ,  F17C2205/037 ,  F17C2205/0329 ,  F17C2250/0478 ,  F17C2260/036

Abstract: A gas supply apparatus includes: a mounting portion installed on a cabinet; a gas supply portion installed on the mounting portion so as to be raisable and lowerable; and a gas container fixing portion fixing a gas container to the gas supply portion, wherein the gas supply portion includes a compressed gas association (CGA) fastening module that is installed on the mounting portion and is detachable from the gas container, and the CGA fastening module includes: a case; an end cap housing rotatably installed on the case; a CGA connector housing installed on the case so as to be disposed adjacent to the end cap housing; a gasket detection sensor installed on a sensor installation mount of the case and disposed under the CGA connector housing; and a power transmission portion spaced apart from the end cap housing and connected to the end cap housing and the CGA connector housing.

公开(公告)号：US20230097418A1

公开(公告)日：2023-03-30

申请号：US17724214

申请日：2022-04-19

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Jinhyuk CHOI ,  Kongwoo LEE ,  Beomsoo HWANG

IPC: F16K27/00 ,  F16K51/02 ,  F16K3/02

Abstract: A loadlock apparatus includes a loadlock chamber including a first opening and a second opening separated in a vertical direction; a first slit valve including a first valve plate configured to move between a first open position where the first opening is open and a first closed position where the first opening is closed, the first open position being a position moved downward from the first closed position; and a second slit valve including a second valve plate configured to move between a second open position where the second opening is open and a second closed position where the second opening is closed, the second open position being a position moved upward from the second closed position.

公开(公告)号：US20230220924A1

公开(公告)日：2023-07-13

申请号：US17572816

申请日：2022-01-11

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Jongkyu KIM ,  Kwangjun KIM ,  Beomsoo HWANG

IPC: F16K27/02 ,  F16K31/44

CPC classification number: F16K27/02 ,  F16K31/44

Abstract: A loose type pneumatic valve and a loose type pneumatic valve module, the loose type pneumatic valve including a valve body including a pneumatic passage therein; a valve head on the valve body, the valve head being coupleable with an actuator; a stem on the valve head, the stem being configured to open and close the pneumatic passage; and at least one alignment socket on the valve head, the at least one alignment socket being configured to align the valve head with the actuator.

公开(公告)号：US20220274780A1

公开(公告)日：2022-09-01

申请号：US17672081

申请日：2022-02-15

Applicant: Samsung Electronics Co., Ltd.

Inventor： Kyeongsup BYEON ,  Inwook KOO ,  Dongwon KIM ,  Minyoung KIM ,  Yi JIN ,  Jongkyu KIM ,  Jinho SO ,  Byungjun AN ,  Yinghu XU ,  Beomsoo HWANG

IPC: B65G1/137 ,  B25J15/00 ,  B25J19/02 ,  B25J11/00 ,  G06K7/14

Abstract: A gas supply system includes a loading/unloading stage including a cradle loader where a cradle loaded with a gas container is loaded, a test buffer chamber is configured to test the gas container, and a loading/unloading robot configured to transfer the gas container between the cradle and the test buffer chamber. A gas supply stage includes a storage queue configured to temporarily store the gas container, a gas supply cabinet where the gas container is mounted, and a transfer robot configured to transfer the gas container between the test buffer chamber and the storage queue and between the storage queue and the gas supply cabinet.