DIELECTRIC STRUCTURE AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME

    公开(公告)号:US20240274661A1

    公开(公告)日:2024-08-15

    申请号:US18507606

    申请日:2023-11-13

    CPC classification number: H01L29/0657 H01L29/0692

    Abstract: A dielectric structure may include: an insulating layer extending in a first direction; a plurality of conductor layers disposed on a first surface of the insulating layer and spaced apart from each other in the first direction; at least one semiconductor layer disposed on a second surface of the insulating layer, opposite to the first surface, and overlapping each of at least two conductor layers adjacent to each other among the plurality of conductor layers in a second direction intersecting the first direction; a first protective layer covering the plurality of conductor layers on the first surface of the insulating layer; and a second protective layer covering the at least one semiconductor layer on the second surface of the insulating layer.

    LIGHT ABSORPTION STRUCTURE AND LIGHT SENSING DEVICE HAVING THE SAME

    公开(公告)号:US20240258443A1

    公开(公告)日:2024-08-01

    申请号:US18630449

    申请日:2024-04-09

    CPC classification number: H01L31/02327 H01L31/102

    Abstract: A light sensing device includes a semiconductor layer including a distributed Bragg reflector including a first surface of the semiconductor layer, and a photoelectric conversion unit including a second surface of the semiconductor layer, and the distributed Bragg reflector has a plurality of holes each having, in a cross-sectional view, a width gradually changing from a first width to a second width according to a width change period; a first electrode in one region of the semiconductor layer; and a second electrode on the second surface of the semiconductor layer and having a reflective metal.

    LIGHT ABSORPTION STRUCTURE AND LIGHT SENSING DEVICE HAVING THE SAME

    公开(公告)号:US20220384666A1

    公开(公告)日:2022-12-01

    申请号:US17671697

    申请日:2022-02-15

    Abstract: A light sensing device includes a semiconductor layer including a distributed Bragg reflector including a first surface of the semiconductor layer, and a photoelectric conversion unit including a second surface of the semiconductor layer, and the distributed Bragg reflector has a plurality of holes each having, in a cross-sectional view, a width gradually changing from a first width to a second width according to a width change period; a first electrode in one region of the semiconductor layer; and a second electrode on the second surface of the semiconductor layer and having a reflective metal.

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