公开(公告)号：US20240047253A1

公开(公告)日：2024-02-08

申请号：US18177300

申请日：2023-03-02

Applicant: Samsung Electronics Co., Ltd.

Inventor： Sangho JANG ,  Dongsoo LEE ,  Kibeom KIL ,  Yeongseok KIM ,  Wooram OH ,  Youngshin CHOI

IPC: H01L21/677 ,  B65G47/90 ,  H01L21/67 ,  H05K13/00

CPC classification number: H01L21/6773 ,  H01L21/67736 ,  H01L21/67742 ,  B65G47/901 ,  H01L21/67757 ,  H01L21/67144 ,  H05K13/0061

Abstract: A substrate loading apparatus includes a pickup apparatus configured to move a magazine in a first direction, a second direction and a third direction, an elevator defining a plurality of waiting spaces, a stage configured to support the magazine, and an insert apparatus configured to transfer substrates in the magazine. At least one of the plurality of waiting spaces of the elevator is configured to selectively receive the magazine, and the pickup apparatus is spaced apart from the elevator and the stage in the third direction.

公开(公告)号：US20220396380A1

公开(公告)日：2022-12-15

申请号：US17583653

申请日：2022-01-25

Applicant: Samsung Electronics Co., Ltd.

Inventor： Kibeom KIL ,  Dongsoo LEE ,  Wooram OH ,  Sangho JANG

IPC: B65B3/14 ,  B65B3/18 ,  B65B7/28

Abstract: A fluid supply apparatus includes a container supply holder configured to supply a container to a cap separator using a loading box, the container including a detachable nozzle cap, and configured to store a process fluid, a cap separator configured to receive the container from the loading box and separate the nozzle cap from a container body of the container using a cap clamper and a rotation actuator, the cap clamper configured to clamp and hold the nozzle cap, and the rotation actuator configured to rotate the container body, a fluid supplier configured to supply the process fluid contained in the container body through a fluid supply line, and a controller configured to control the container supply holder, the cap separator, and the fluid supplier.