公开(公告)号：US20040226369A1

公开(公告)日：2004-11-18

申请号：US10744099

申请日：2003-12-24

Applicant: Samsung Electronics Co., Ltd.

Inventor： Seok-jin Kang ,  Seok-whan Chung ,  Moon-chul Lee ,  Kyu-dong Jung ,  Seog-soo Hong

IPC: G01P015/14

CPC classification number: G01C19/5762 ,  B81B3/0059 ,  B81B2201/0242 ,  B81B2203/051 ,  B81B2203/053

Abstract: A vertical MEMS gyroscope by horizontal driving includes a substrate, a support layer fixed on an upper surface of an area of the substrate, a driving structure floating above the substrate and having a portion fixed to the upper surface of the support layer and another portion in parallel with the fixed portion, the driving structure having a predetermined area capable of vibrating in a predetermined direction parallel to the substrate, a detection structure fixed to the driving structure on a same plane as the driving structure, and having a predetermined area capable of vibrating in a vertical direction with respect to the substrate, a cap wafer bonded with the substrate positioned above the driving structure and the detection structure, and a fixed vertical displacement detection electrode formed at a predetermined location of an underside of the cap wafer, for detecting displacement of the detection structure in the vertical direction.

Abstract translation: 通过水平驱动的垂直MEMS陀螺仪包括基板，固定在基板区域的上表面上的支撑层，浮动在基板上方的驱动结构，并且具有固定到支撑层的上表面的部分和 平行于固定部分，驱动结构具有能够在与基板平行的预定方向上振动的预定区域，与驱动结构固定在与驱动结构相同的平面上的检测结构，并且具有能够振动的预定区域 在相对于基板的垂直方向上，与位于驱动结构和检测结构上方的基板接合的盖晶片和形成在盖晶片的下侧的预定位置处的固定垂直位移检测电极，用于检测位移 的检测结构在垂直方向。