公开(公告)号：US20220149043A1

公开(公告)日：2022-05-12

申请号：US17582357

申请日：2022-01-24

Applicant: Samsung Electronics Co., Ltd.

Inventor： Heonjong SHIN ,  Sunghun JUNG ,  Minchan GWAK ,  Yongsik JEONG ,  Sangwon JEE ,  Sora YOU ,  Doohyun LEE

IPC: H01L27/092 ,  H01L29/78 ,  H01L29/66 ,  H01L21/8238 ,  H01L23/522 ,  H01L29/417

Abstract: A semiconductor device may include a substrate including an active pattern extending in a first direction, a gate electrode running across the active pattern and extending in a second direction intersecting the first direction, a source/drain pattern on the active pattern and adjacent to a side of the gate electrode, an active contact in a contact hole exposing the source/drain pattern, an insulating pattern filling a remaining space of the contact hole in which the active contact is provided, a first via on the active contact, and a second via on the gate electrode. The active contact may include a first segment that fills a lower portion of the contact hole and a second segment that vertically protrudes from the first segment. The first via is connected to the second segment. The insulating pattern is adjacent in the first direction to the second via.

公开(公告)号：US20200075595A1

公开(公告)日：2020-03-05

申请号：US16391757

申请日：2019-04-23

Applicant: Samsung Electronics Co., Ltd.

Inventor： Heonjong SHIN ,  Sunghun JUNG ,  Minchan GWAK ,  Yongsik JEONG ,  Sangwon JEE ,  Sora YOU ,  Doohyun LEE

IPC: H01L27/092 ,  H01L29/78 ,  H01L29/66 ,  H01L21/8238 ,  H01L23/522 ,  H01L29/417

Abstract: A semiconductor device may include a substrate including an active pattern extending in a first direction, a gate electrode running across the active pattern and extending in a second direction intersecting the first direction, a source/drain pattern on the active pattern and adjacent to a side of the gate electrode, an active contact in a contact hole exposing the source/drain pattern, an insulating pattern filling a remaining space of the contact hole in which the active contact is provided, a first via on the active contact, and a second via on the gate electrode. The active contact may include a first segment that fills a lower portion of the contact hole and a second segment that vertically protrudes from the first segment. The first via is connected to the second segment. The insulating pattern is adjacent in the first direction to the second via.

公开(公告)号：US20240030326A1

公开(公告)日：2024-01-25

申请号：US18159200

申请日：2023-01-25

Applicant: Samsung Electronics Co., Ltd.

Inventor： Sora YOU ,  Kyoungwoo Lee ,  Sungmoon Lee ,  Seungmin Cha ,  Hagju Cho

IPC: H01L29/775 ,  H01L27/088 ,  H01L29/423 ,  H01L29/06

CPC classification number: H01L29/775 ,  H01L27/088 ,  H01L29/42392 ,  H01L29/0673

Abstract: A semiconductor device includes parallel active regions on a substrate and extending in a first horizontal direction; gate structures intersecting the active regions, extending in a second horizontal direction, and including first and second gate structures opposing each other in the second horizontal direction; source/drain regions including first and second source/drain regions, on at least one side of the gate structures and on the active regions; a gate separation pattern between the first and second gate structures; a vertical conductive structure in the gate separation pattern; contact plugs including a first contact plug electrically connected to the first source/drain region and the vertical conductive structure, and a second contact plug electrically connected to the second source/drain region and spaced apart from the vertical conductive structure; and a contact separation pattern separating the first and second contact plugs, having a portion contacting an upper surface of the vertical conductive structure.

公开(公告)号：US20210013206A1

公开(公告)日：2021-01-14

申请号：US17038435

申请日：2020-09-30

Applicant: Samsung Electronics Co., Ltd.

Inventor： HeonJong SHIN ,  Sunghun JUNG ,  Minchan GWAK ,  Yongsik JEONG ,  Sangwon JEE ,  Sora YOU ,  Doohyun LEE

IPC: H01L27/092 ,  H01L29/78 ,  H01L29/66 ,  H01L21/8238 ,  H01L23/522 ,  H01L29/417

Abstract: A semiconductor device may include a substrate including an active pattern extending in a first direction, a gate electrode running across the active pattern and extending in a second direction intersecting the first direction, a source/drain pattern on the active pattern and adjacent to a side of the gate electrode, an active contact in a contact hole exposing the source/drain pattern, an insulating pattern filling a remaining space of the contact hole in which the active contact is provided, a first via on the active contact, and a second via on the gate electrode. The active contact may include a first segment that fills a lower portion of the contact hole and a second segment that vertically protrudes from the first segment. The first via is connected to the second segment. The insulating pattern is adjacent in the first direction to the second via.