公开(公告)号：US20060090565A1

公开(公告)日：2006-05-04

申请号：US11262769

申请日：2005-11-01

申请人： Satoshi Ohuchi ,  Toshiyuki Nozoe ,  Hiroyuki Aizawa

发明人： Satoshi Ohuchi ,  Toshiyuki Nozoe ,  Hiroyuki Aizawa

IPC分类号： G01P9/04 ,  G01P1/04

CPC分类号： G01C19/5607

摘要： An angular velocity sensor is provided with an oscillator including a pair of drive arms, a base portion coupled to one end of each drive arm, and a flexible arm extending from the base portion in a direction opposite from the drive arms. This angular velocity sensor is also provided with driving member which oscillates the pair of drive arms in approaching or separating direction, and distortion detecting member which detects a distortion of the flexible arm in the oscillating direction of the drive arms.

摘要翻译： 角速度传感器设置有振荡器，该振荡器包括一对驱动臂，耦合到每个驱动臂的一端的基部以及从驱动臂的相反方向从基部延伸的柔性臂。 该角速度传感器还设置有使一对驱动臂在接近或分离方向上摆动的驱动构件，以及检测柔性臂在驱动臂的摆动方向上的变形的失真检测构件。

公开(公告)号：US08201449B2

公开(公告)日：2012-06-19

申请号：US12441451

申请日：2007-11-09

申请人： Satoshi Ohuchi ,  Toshiyuki Nozoe ,  Hiroyuki Aizawa

发明人： Satoshi Ohuchi ,  Toshiyuki Nozoe ,  Hiroyuki Aizawa

IPC分类号： G01C19/00 ,  G01P3/44 ,  G01P9/00 ,  G01P15/08

CPC分类号： G01P15/125 ,  G01C19/5719 ,  G01P1/023 ,  G01P5/14 ,  G01P15/18

摘要： A sensor includes detecting element (28) with an acceleration sensor, which is formed of weight (18) coupled to rigid section (14) via flexible section (16), substrate (10) confronting weight (18), and an electrode section including opposed electrodes (20, 22, 24, 26) placed on respective opposed faces of weight (18) and substrate (10). This structure prevents weight (18) from moving along Z-axis, so that a detection accuracy of acceleration occurring along X-axis or Y-axis can be improved.

摘要翻译： 传感器包括具有加速度传感器的检测元件（28），所述加速度传感器由通过柔性部分（16），与基座（10）相对的重量（18）耦合到刚性部分（14）的重物（18）和包括 相对的电极（20,22,24,26）放置在重物（18）和基底（10）的相对的相对面上。 这种结构可防止重量（18）沿Z轴移动，从而可以提高沿X轴或Y轴发生的加速度的检测精度。

公开(公告)号：US20090266163A1

公开(公告)日：2009-10-29

申请号：US12441451

申请日：2007-11-09

申请人： Satoshi Ohuchi ,  Toshiyuki Nozoe ,  Hiroyuki Aizawa

发明人： Satoshi Ohuchi ,  Toshiyuki Nozoe ,  Hiroyuki Aizawa

IPC分类号： G01C19/56

CPC分类号： G01P15/125 ,  G01C19/5719 ,  G01P1/023 ,  G01P5/14 ,  G01P15/18

摘要： A sensor includes detecting element (28) with an acceleration sensor, which is formed of weight (18) coupled to rigid section (14) via flexible section (16), substrate (10) confronting weight (18), and an electrode section including opposed electrodes (20, 22, 24, 26) placed on respective opposed faces of weight (18) and substrate (10). This structure prevents weight (18) from moving along Z-axis, so that a detection accuracy of acceleration occurring along X-axis or Y-axis can be improved.

摘要翻译： 传感器包括具有加速度传感器的检测元件（28），所述加速度传感器由通过柔性部分（16），与基座（10）相对的重量（18）耦合到刚性部分（14）的重物（18）和包括 相对的电极（20,22,24,26）放置在重物（18）和基底（10）的相对的相对面上。 这种结构可防止重量（18）沿Z轴移动，从而可以提高沿X轴或Y轴发生的加速度的检测精度。

公开(公告)号：US07363815B2

公开(公告)日：2008-04-29

申请号：US11262769

申请日：2005-11-01

申请人： Satoshi Ohuchi ,  Toshiyuki Nozoe ,  Hiroyuki Aizawa

发明人： Satoshi Ohuchi ,  Toshiyuki Nozoe ,  Hiroyuki Aizawa

IPC分类号： G01C19/56 ,  G01P9/04

CPC分类号： G01C19/5607

摘要： An angular velocity sensor is provided with an oscillator including a pair of drive arms, a base portion coupled to one end of each drive arm, and a flexible arm extending from the base portion in a direction opposite from the drive arms. This angular velocity sensor is also provided with a driving member which oscillates the pair of drive arms in an approaching or separating direction, and a distortion detecting member which detects a distortion of the flexible arm in the oscillating direction of the drive arms.

摘要翻译： 角速度传感器设置有振荡器，该振荡器包括一对驱动臂，耦合到每个驱动臂的一端的基部以及从驱动臂的相反方向从基部延伸的柔性臂。 该角速度传感器还设置有使接近或分离方向上的一对驱动臂振动的驱动部件和检测柔性臂在驱动臂的摆动方向上的变形的变形检测部件。

公开(公告)号：US07260990B2

公开(公告)日：2007-08-28

申请号：US10565952

申请日：2005-06-23

申请人： Satoshi Ohuchi ,  Hiroyuki Aizawa ,  Toshiyuki Nozoe

发明人： Satoshi Ohuchi ,  Hiroyuki Aizawa ,  Toshiyuki Nozoe

IPC分类号： G01P9/04 ,  G01P19/56

CPC分类号： G01C19/5607 ,  Y10T29/42

摘要： Provided are an angular velocity sensor with improved reliability by preventing an electric short circuit resulting from etching debris left on the bottom electrode after the etching of the conductive layers, and a method for manufacturing the angular velocity sensor. The drive electrode unit, the monitor electrode unit and the sensing electrode unit are each provided with bottom electrode (29) formed on substrate (33) having the shape of a tuning fork, piezoelectric film (30) made of piezoelectric material and formed on bottom electrode (29), and top electrode (31) formed on piezoelectric film (30). Ends (31T) of top electrode (31) are located inside ends (30T) of piezoelectric film (30) so as to expose ends (30T) of piezoelectric film (30) beyond top electrode (31), thereby forming exposed parts (32). When exposed parts (32) have a thickness of “t”, piezoelectric film (30) is made to have an exposed width (L) of not less than 0.3 t.

摘要翻译： 提供了一种角速度传感器，其具有通过防止在蚀刻导电层之后在底部电极上残留的残留物导致的电短路而提高可靠性，以及角速度传感器的制造方法。 驱动电极单元，监视电极单元和感测电极单元各自设置有形成在具有音叉形状的基板（33）上的底部电极（29），压电材料制成的压电薄膜（30）形成在底部 电极（29）和形成在压电薄膜（30）上的顶部电极（31）。 顶部电极31的端部31T位于压电膜30的内侧端部30T中，以将压电膜30的端部30T暴露在顶部电极31之外， 零件（32）。 当暴露部分（32）具有厚度“t”时，使压电膜（30）的暴露宽度（L）不小于0.3t。

公开(公告)号：US20060272412A1

公开(公告)日：2006-12-07

申请号：US10565952

申请日：2005-06-23

申请人： Satoshi Ohuchi ,  Hiroyuki Aizawa ,  Toshiyuki Nozoe

发明人： Satoshi Ohuchi ,  Hiroyuki Aizawa ,  Toshiyuki Nozoe

IPC分类号： G01P9/04

CPC分类号： G01C19/5607 ,  Y10T29/42

摘要： Provided are an angular velocity sensor with improved reliability by preventing an electric short circuit resulting from etching debris left on the bottom electrode after the etching of the conductive layers, and a method for manufacturing the angular velocity sensor. The drive electrode unit, the monitor electrode unit and the sensing electrode unit are each provided with bottom electrode (29) formed on substrate (33) having the shape of a tuning fork, piezoelectric film (30) made of piezoelectric material and formed on bottom electrode (29), and top electrode (31) formed on piezoelectric film (30). Ends (31T) of top electrode (31) are located inside ends (30T) of piezoelectric film (30) so as to expose ends (30T) of piezoelectric film (30) beyond top electrode (31), thereby forming exposed parts (32). When exposed parts (32) have a thickness of “t”, piezoelectric film (30) is made to have an exposed width (L) of not less than 0.3 t.

摘要翻译： 提供了一种角速度传感器，其具有通过防止在蚀刻导电层之后在底部电极上残留的残留物导致的电短路而提高可靠性，以及角速度传感器的制造方法。 驱动电极单元，监视电极单元和感测电极单元各自设置有形成在具有音叉形状的基板（33）上的底部电极（29），压电材料制成的压电薄膜（30）形成在底部 电极（29）和形成在压电膜（30）上的顶部电极（31）。 顶部电极31的端部31T位于压电膜30的内侧端部30T中，以将压电膜30的端部30T暴露在顶部电极31之外， 零件（32）。 当暴露部分（32）具有厚度“t”时，使压电膜（30）的暴露宽度（L）不小于0.3t。

公开(公告)号：US20050081628A1

公开(公告)日：2005-04-21

申请号：US10964869

申请日：2004-10-15

申请人： Toshiyuki Nozoe ,  Sigehiro Yosiuti ,  Shusaku Kawasaki ,  Noriyuki Jitousho ,  Satoshi Ohuchi

发明人： Toshiyuki Nozoe ,  Sigehiro Yosiuti ,  Shusaku Kawasaki ,  Noriyuki Jitousho ,  Satoshi Ohuchi

IPC分类号： G01C19/56 ,  G01C19/5614 ,  G01C19/5628 ,  H01L41/08 ,  H01L41/18 ,  G01P1/04

CPC分类号： G01C19/56

摘要： A rotational-rate sensor is provided which includes a detecting element, a circuit portion, an airtight container and an elastic body, in which: the synthetic resonance-frequency of a machine system of the rotational-rate sensor and the frequency of an applied rotational rate which corresponds to the difference between the resonance frequency in the direction where the detecting element is driven and the resonance frequency of the detecting element in the direction where the detecting element detects a rotational rate, are each lower than each of the resonance frequency in the direction where the detecting element is driven and the resonance frequency in the direction where the detecting element detects a rotational rate; and the cut-off frequency of the low-pass filter in the circuit portion is lower than each of the synthetic resonance-frequency and the frequency of the applied rotational rate.

摘要翻译： 提供一种旋转速率传感器，其包括检测元件，电路部分，气密容器和弹性体，其中：旋转速率传感器的机器系统的合成共振频率和施加旋转频率 对应于检测元件被驱动的方向上的谐振频率与检测元件在检测元件检测到旋转速度的方向上的谐振频率之间的差的速率分别低于 检测元件被驱动的方向和检测元件检测旋转速度的方向的共振频率; 并且电路部分中的低通滤波器的截止频率低于合成谐振频率和施加的转速的频率中的每一个。

公开(公告)号：US06927568B2

公开(公告)日：2005-08-09

申请号：US10964869

申请日：2004-10-15

申请人： Toshiyuki Nozoe ,  Sigehiro Yosiuti ,  Shusaku Kawasaki ,  Noriyuki Jitousho ,  Satoshi Ohuchi

发明人： Toshiyuki Nozoe ,  Sigehiro Yosiuti ,  Shusaku Kawasaki ,  Noriyuki Jitousho ,  Satoshi Ohuchi

IPC分类号： G01C19/56 ,  G01C19/5614 ,  G01C19/5628 ,  H01L41/08 ,  H01L41/18 ,  G01B7/30

CPC分类号： G01C19/56

摘要： A rotational-rate sensor is provided which includes a detecting element, a circuit portion, an airtight container and an elastic body, in which: the synthetic resonance-frequency of a machine system of the rotational-rate sensor and the frequency of an applied rotational rate which corresponds to the difference between the resonance frequency in the direction where the detecting element is driven and the resonance frequency of the detecting element in the direction where the detecting element detects a rotational rate, are each lower than each of the resonance frequency in the direction where the detecting element is driven and the resonance frequency in the direction where the detecting element detects a rotational rate; and the cut-off frequency of the low-pass filter in the circuit portion is lower than each of the synthetic resonance-frequency and the frequency of the applied rotational rate.

公开(公告)号：US08013500B2

公开(公告)日：2011-09-06

申请号：US12680641

申请日：2008-11-05

申请人： Toshiyuki Nozoe ,  Hideo Ohkoshi

发明人： Toshiyuki Nozoe ,  Hideo Ohkoshi

IPC分类号： H01L41/08

CPC分类号： H03H9/0547 ,  G01P15/097 ,  H03H9/0519

摘要： A piezoelectric device according to the present invention includes lead wires (12) each having one end electrically connected to a circuit pattern, and a piezoelectric oscillator (13) made of quartz and having terminals (13a) electrically connected to the other ends of the lead wires (12), wherein the terminals (13a) of the piezoelectric oscillator (13) and the lead wires (12) are respectively capacitively coupled with each other via an insulation layer (14). According to the structure, the piezoelectric device can reduce its vertical height.

摘要翻译： 根据本发明的压电装置包括：一端电连接到电路图形的引线（12）和由石英制成的具有与引线的另一端电连接的端子（13a）的压电振荡器（13） 电线（12），其中压电振子（13）的端子（13a）和引线（12）分别经由绝缘层（14）电容耦合。 根据该结构，压电装置可以降低其垂直高度。

公开(公告)号：US20100219723A1

公开(公告)日：2010-09-02

申请号：US12680801

申请日：2008-11-07

申请人： Toshiyuki Nozoe ,  Hideo Ohkoshi

发明人： Toshiyuki Nozoe ,  Hideo Ohkoshi

IPC分类号： H01L41/053

CPC分类号： H03H9/0519 ,  H03H9/02133 ,  H03H9/09

摘要： A piezoelectric device according to the present invention includes lead wires (12) each having one end electrically connected to a circuit pattern, and a piezoelectric oscillator (13) having terminals (13a) electrically connected to the other ends of the lead wires (12), wherein the piezoelectric oscillator (13) is retained in suspension by the other ends of the lead wires (12), and a support member (14) is provided on surfaces (12b) opposite to connecting surfaces (12a) of the lead wires (12) connected to the piezoelectric oscillator (13) at the other ends thereof.

摘要翻译： 根据本发明的压电装置包括：一端电连接到电路图形的引线（12）和具有与导线（12）的另一端电连接的端子（13a）的压电振荡器（13） ，其中所述压电振荡器（13）由所述引线（12）的另一端保持悬挂，并且在与所述引线（12）的连接表面（12a）相对的表面（12b）上设置有支撑构件（14） 12）在其另一端连接到压电振荡器（13）。