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公开(公告)号：US20050081628A1
公开(公告)日：2005-04-21
申请号：US10964869
申请日：2004-10-15
IPC分类号： G01C19/56 , G01C19/5614 , G01C19/5628 , H01L41/08 , H01L41/18 , G01P1/04
CPC分类号： G01C19/56
摘要： A rotational-rate sensor is provided which includes a detecting element, a circuit portion, an airtight container and an elastic body, in which: the synthetic resonance-frequency of a machine system of the rotational-rate sensor and the frequency of an applied rotational rate which corresponds to the difference between the resonance frequency in the direction where the detecting element is driven and the resonance frequency of the detecting element in the direction where the detecting element detects a rotational rate, are each lower than each of the resonance frequency in the direction where the detecting element is driven and the resonance frequency in the direction where the detecting element detects a rotational rate; and the cut-off frequency of the low-pass filter in the circuit portion is lower than each of the synthetic resonance-frequency and the frequency of the applied rotational rate.
摘要翻译： 提供一种旋转速率传感器，其包括检测元件，电路部分，气密容器和弹性体，其中：旋转速率传感器的机器系统的合成共振频率和施加旋转频率 对应于检测元件被驱动的方向上的谐振频率与检测元件在检测元件检测到旋转速度的方向上的谐振频率之间的差的速率分别低于 检测元件被驱动的方向和检测元件检测旋转速度的方向的共振频率; 并且电路部分中的低通滤波器的截止频率低于合成谐振频率和施加的转速的频率中的每一个。
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公开(公告)号：US06927568B2
公开(公告)日：2005-08-09
申请号：US10964869
申请日：2004-10-15
IPC分类号： G01C19/56 , G01C19/5614 , G01C19/5628 , H01L41/08 , H01L41/18 , G01B7/30
CPC分类号： G01C19/56
摘要： A rotational-rate sensor is provided which includes a detecting element, a circuit portion, an airtight container and an elastic body, in which: the synthetic resonance-frequency of a machine system of the rotational-rate sensor and the frequency of an applied rotational rate which corresponds to the difference between the resonance frequency in the direction where the detecting element is driven and the resonance frequency of the detecting element in the direction where the detecting element detects a rotational rate, are each lower than each of the resonance frequency in the direction where the detecting element is driven and the resonance frequency in the direction where the detecting element detects a rotational rate; and the cut-off frequency of the low-pass filter in the circuit portion is lower than each of the synthetic resonance-frequency and the frequency of the applied rotational rate.
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公开(公告)号：US06748807B2
公开(公告)日：2004-06-15
申请号：US10239727
申请日：2002-12-18
IPC分类号： G01P102
CPC分类号： G01P1/023
摘要： An inertia detecting transducer having a reliable detection element. The element is kept to be free from deposition of gas and organic substance generated from resin adhesive. A first case of the transducer has an opening and a circuit component mounted thereon, and is provided with an external electrode and a first connection electrode. A second case includes a detection element mounted inside thereof, and an opening of the case is sealed with a sealing plate. The second case is further provided with a second connection electrode. The second case is attached to the first case so that the former covers the opening of the latter. The second connection electrode and the first connection electrode are electrically coupled. In the above-described configuration of the present invention, if an inertia detecting transducer gets a partial damage, either one of the detection element and the circuit component remaining intact can be re-utilzed.
摘要翻译： 具有可靠检测元件的惯性检测传感器。 元素保持不会由树脂粘合剂产生的气体和有机物质沉积。 换能器的第一种情况具有安装在其上的开口和电路部件，并且设置有外部电极和第一连接电极。 第二种情况包括安装在其内部的检测元件，壳体的开口用密封板密封。 第二壳体还设置有第二连接电极。 第二种情况是附在第一种情况下，前者覆盖了后者的开口。 第二连接电极和第一连接电极电耦合。 在本发明的上述结构中，如果惯性检测传感器得到部分损伤，则可以重新利用检测元件和保持完整的电路部件中的任一个。
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公开(公告)号：US06666091B2
公开(公告)日：2003-12-23
申请号：US10111575
申请日：2002-08-23
IPC分类号： G01P904
CPC分类号： G01C19/5607
摘要： An angular velocity sensor with improved detection chacteristics using a tuning fork vibrator made of a single crystalline piezoelectric material such as quartz. The turning fork vibrator includes two vibrators bonded together to provide an integral structure so that the vibrators by their respective crystal axis directions generate a piezoelectric phenomena in inverse polarities in their width directions. The tuning fork vibrator has two tuning fork arms and a tuning fork base. Two detection electrodes are respectively disposed on outer faces of the two tuning fork arms. And two other detection electrodes are respectively disposed on inner faces of the two tuning fork arms. Two drive electrodes are respectively disposed on the two tunings fork arms. The two detection electrodes disposed on the outer faces of the two tuning fork arms are commonly connected, and the two detection electrodes disposed on the inner faces of the two tuning fork arms are commonly connected for canceling capacitive coupling from drive section to detecting section.
摘要翻译： 具有改进的检测特性的角速度传感器，使用由诸如石英的单晶压电材料制成的音叉振子。 转叉振动器包括两个结合在一起以提供整体结构的振动器，使得振动器通过其各自的晶轴方向在其宽度方向上产生相反极性的压电现象。 音叉振子具有两个音叉臂和音叉基座。 两个检测电极分别设置在两个音叉臂的外表面上。 另外两个检测电极分别设置在两个音叉臂的内表面上。 两个驱动电极分别设置在两个调音叉臂上。 设置在两个音叉臂的外表面上的两个检测电极共同连接，并且布置在两个音叉臂的内表面上的两个检测电极共同连接，用于消除从驱动部分到检测部分的电容耦合。
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公开(公告)号：US20060090565A1
公开(公告)日：2006-05-04
申请号：US11262769
申请日：2005-11-01
申请人： Satoshi Ohuchi , Toshiyuki Nozoe , Hiroyuki Aizawa
发明人： Satoshi Ohuchi , Toshiyuki Nozoe , Hiroyuki Aizawa
CPC分类号： G01C19/5607
摘要： An angular velocity sensor is provided with an oscillator including a pair of drive arms, a base portion coupled to one end of each drive arm, and a flexible arm extending from the base portion in a direction opposite from the drive arms. This angular velocity sensor is also provided with driving member which oscillates the pair of drive arms in approaching or separating direction, and distortion detecting member which detects a distortion of the flexible arm in the oscillating direction of the drive arms.
摘要翻译： 角速度传感器设置有振荡器，该振荡器包括一对驱动臂，耦合到每个驱动臂的一端的基部以及从驱动臂的相反方向从基部延伸的柔性臂。 该角速度传感器还设置有使一对驱动臂在接近或分离方向上摆动的驱动构件，以及检测柔性臂在驱动臂的摆动方向上的变形的失真检测构件。
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公开(公告)号：US08201449B2
公开(公告)日：2012-06-19
申请号：US12441451
申请日：2007-11-09
申请人： Satoshi Ohuchi , Toshiyuki Nozoe , Hiroyuki Aizawa
发明人： Satoshi Ohuchi , Toshiyuki Nozoe , Hiroyuki Aizawa
CPC分类号： G01P15/125 , G01C19/5719 , G01P1/023 , G01P5/14 , G01P15/18
摘要： A sensor includes detecting element (28) with an acceleration sensor, which is formed of weight (18) coupled to rigid section (14) via flexible section (16), substrate (10) confronting weight (18), and an electrode section including opposed electrodes (20, 22, 24, 26) placed on respective opposed faces of weight (18) and substrate (10). This structure prevents weight (18) from moving along Z-axis, so that a detection accuracy of acceleration occurring along X-axis or Y-axis can be improved.
摘要翻译： 传感器包括具有加速度传感器的检测元件（28），所述加速度传感器由通过柔性部分（16），与基座（10）相对的重量（18）耦合到刚性部分（14）的重物（18）和包括 相对的电极（20,22,24,26）放置在重物（18）和基底（10）的相对的相对面上。 这种结构可防止重量（18）沿Z轴移动，从而可以提高沿X轴或Y轴发生的加速度的检测精度。
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公开(公告)号：US20090266163A1
公开(公告)日：2009-10-29
申请号：US12441451
申请日：2007-11-09
申请人： Satoshi Ohuchi , Toshiyuki Nozoe , Hiroyuki Aizawa
发明人： Satoshi Ohuchi , Toshiyuki Nozoe , Hiroyuki Aizawa
IPC分类号： G01C19/56
CPC分类号： G01P15/125 , G01C19/5719 , G01P1/023 , G01P5/14 , G01P15/18
摘要： A sensor includes detecting element (28) with an acceleration sensor, which is formed of weight (18) coupled to rigid section (14) via flexible section (16), substrate (10) confronting weight (18), and an electrode section including opposed electrodes (20, 22, 24, 26) placed on respective opposed faces of weight (18) and substrate (10). This structure prevents weight (18) from moving along Z-axis, so that a detection accuracy of acceleration occurring along X-axis or Y-axis can be improved.
摘要翻译： 传感器包括具有加速度传感器的检测元件（28），所述加速度传感器由通过柔性部分（16），与基座（10）相对的重量（18）耦合到刚性部分（14）的重物（18）和包括 相对的电极（20,22,24,26）放置在重物（18）和基底（10）的相对的相对面上。 这种结构可防止重量（18）沿Z轴移动，从而可以提高沿X轴或Y轴发生的加速度的检测精度。
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公开(公告)号：US07363815B2
公开(公告)日：2008-04-29
申请号：US11262769
申请日：2005-11-01
申请人： Satoshi Ohuchi , Toshiyuki Nozoe , Hiroyuki Aizawa
发明人： Satoshi Ohuchi , Toshiyuki Nozoe , Hiroyuki Aizawa
CPC分类号： G01C19/5607
摘要： An angular velocity sensor is provided with an oscillator including a pair of drive arms, a base portion coupled to one end of each drive arm, and a flexible arm extending from the base portion in a direction opposite from the drive arms. This angular velocity sensor is also provided with a driving member which oscillates the pair of drive arms in an approaching or separating direction, and a distortion detecting member which detects a distortion of the flexible arm in the oscillating direction of the drive arms.
摘要翻译： 角速度传感器设置有振荡器，该振荡器包括一对驱动臂，耦合到每个驱动臂的一端的基部以及从驱动臂的相反方向从基部延伸的柔性臂。 该角速度传感器还设置有使接近或分离方向上的一对驱动臂振动的驱动部件和检测柔性臂在驱动臂的摆动方向上的变形的变形检测部件。
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公开(公告)号：US07260990B2
公开(公告)日：2007-08-28
申请号：US10565952
申请日：2005-06-23
申请人： Satoshi Ohuchi , Hiroyuki Aizawa , Toshiyuki Nozoe
发明人： Satoshi Ohuchi , Hiroyuki Aizawa , Toshiyuki Nozoe
CPC分类号： G01C19/5607 , Y10T29/42
摘要： Provided are an angular velocity sensor with improved reliability by preventing an electric short circuit resulting from etching debris left on the bottom electrode after the etching of the conductive layers, and a method for manufacturing the angular velocity sensor. The drive electrode unit, the monitor electrode unit and the sensing electrode unit are each provided with bottom electrode (29) formed on substrate (33) having the shape of a tuning fork, piezoelectric film (30) made of piezoelectric material and formed on bottom electrode (29), and top electrode (31) formed on piezoelectric film (30). Ends (31T) of top electrode (31) are located inside ends (30T) of piezoelectric film (30) so as to expose ends (30T) of piezoelectric film (30) beyond top electrode (31), thereby forming exposed parts (32). When exposed parts (32) have a thickness of “t”, piezoelectric film (30) is made to have an exposed width (L) of not less than 0.3 t.
摘要翻译： 提供了一种角速度传感器，其具有通过防止在蚀刻导电层之后在底部电极上残留的残留物导致的电短路而提高可靠性，以及角速度传感器的制造方法。 驱动电极单元，监视电极单元和感测电极单元各自设置有形成在具有音叉形状的基板（33）上的底部电极（29），压电材料制成的压电薄膜（30）形成在底部 电极（29）和形成在压电薄膜（30）上的顶部电极（31）。 顶部电极31的端部31T位于压电膜30的内侧端部30T中，以将压电膜30的端部30T暴露在顶部电极31之外， 零件（32）。 当暴露部分（32）具有厚度“t”时，使压电膜（30）的暴露宽度（L）不小于0.3t。
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公开(公告)号：US20060272412A1
公开(公告)日：2006-12-07
申请号：US10565952
申请日：2005-06-23
申请人： Satoshi Ohuchi , Hiroyuki Aizawa , Toshiyuki Nozoe
发明人： Satoshi Ohuchi , Hiroyuki Aizawa , Toshiyuki Nozoe
IPC分类号： G01P9/04
CPC分类号： G01C19/5607 , Y10T29/42
摘要： Provided are an angular velocity sensor with improved reliability by preventing an electric short circuit resulting from etching debris left on the bottom electrode after the etching of the conductive layers, and a method for manufacturing the angular velocity sensor. The drive electrode unit, the monitor electrode unit and the sensing electrode unit are each provided with bottom electrode (29) formed on substrate (33) having the shape of a tuning fork, piezoelectric film (30) made of piezoelectric material and formed on bottom electrode (29), and top electrode (31) formed on piezoelectric film (30). Ends (31T) of top electrode (31) are located inside ends (30T) of piezoelectric film (30) so as to expose ends (30T) of piezoelectric film (30) beyond top electrode (31), thereby forming exposed parts (32). When exposed parts (32) have a thickness of “t”, piezoelectric film (30) is made to have an exposed width (L) of not less than 0.3 t.
摘要翻译： 提供了一种角速度传感器，其具有通过防止在蚀刻导电层之后在底部电极上残留的残留物导致的电短路而提高可靠性，以及角速度传感器的制造方法。 驱动电极单元，监视电极单元和感测电极单元各自设置有形成在具有音叉形状的基板（33）上的底部电极（29），压电材料制成的压电薄膜（30）形成在底部 电极（29）和形成在压电膜（30）上的顶部电极（31）。 顶部电极31的端部31T位于压电膜30的内侧端部30T中，以将压电膜30的端部30T暴露在顶部电极31之外， 零件（32）。 当暴露部分（32）具有厚度“t”时，使压电膜（30）的暴露宽度（L）不小于0.3t。
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