LASER IRRADIATION DEVICE
    1.
    发明申请

    公开(公告)号:US20220373788A1

    公开(公告)日:2022-11-24

    申请号:US17763808

    申请日:2020-08-31

    Inventor: Daisuke MORI

    Abstract: To provide a laser irradiation apparatus which suppresses adhesion of foreign matters to an optical element, a laser irradiation device includes: emission optical systems, which form a beam in which laser light generated by a laser oscillator converges on a predetermined beam spot, and continuously change an irradiation direction or the like of the beam; and a protective member which is arranged between the emission optical system and the beam spot, and protects the emission optical system from foreign matters scattered from an irradiation object side, and the protective member has an aperture through which the beam passes and moves in connection with a change of the irradiation direction or the like of the beam so that the aperture is positioned on a path of the beam.

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