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公开(公告)号:US20220373788A1
公开(公告)日:2022-11-24
申请号:US17763808
申请日:2020-08-31
Applicant: TOYOKOH CO., LTD.
Inventor: Daisuke MORI
Abstract: To provide a laser irradiation apparatus which suppresses adhesion of foreign matters to an optical element, a laser irradiation device includes: emission optical systems, which form a beam in which laser light generated by a laser oscillator converges on a predetermined beam spot, and continuously change an irradiation direction or the like of the beam; and a protective member which is arranged between the emission optical system and the beam spot, and protects the emission optical system from foreign matters scattered from an irradiation object side, and the protective member has an aperture through which the beam passes and moves in connection with a change of the irradiation direction or the like of the beam so that the aperture is positioned on a path of the beam.
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公开(公告)号:US20230019043A1
公开(公告)日:2023-01-19
申请号:US17780278
申请日:2020-11-26
Applicant: TOYOKOH CO.,LTD.
Inventor: Kenjiro MOMI , Kazuhisa FUJITA , Manabu HARAGUCHI , Daisuke MORI , Momo TOSUE
Abstract: Disclosed is a laser irradiation state diagnosing method which allows accurately diagnosing a laser irradiation state. When irradiating a laser beam so that an irradiation spot scans the surface of the irradiation object, acoustic information in vicinity of the irradiation spot is acquired. And based on characteristics of the acoustic information, such as an intensity of a component of a specific frequency band or a frequency band distribution, a state of peeling of the adhered substances existing on the surface of the irradiation object is determined.
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