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    Prober and probe contact method
    1.
    发明授权
    Prober and probe contact method 有权
    探头和探针接触方式

    公开(公告)号：US07405584B2

    公开(公告)日：2008-07-29

    申请号：US11744192

    申请日：2007-05-03

    申请人： Taichi Fujita ,  Takahiro Hokida ,  Tetsuo Hata ,  Satoshi Moriyama ,  Yoshiyuki Yokoyama

    发明人： Taichi Fujita ,  Takahiro Hokida ,  Tetsuo Hata ,  Satoshi Moriyama ,  Yoshiyuki Yokoyama

    IPC分类号： G01R31/02

    CPC分类号： G01R31/2891 ,  G01R31/286

    摘要： A prober that has improved positional precision of probing without reducing throughput is disclosed. The prober comprises a probe card having a probe, a wafer stage, a stage temperature adjustment mechanism, a wafer stage movement mechanism, a movement control section, and an alignment mechanism that detects the relative position between an electrode and the probe, wherein the movement control section controls the movement mechanism so as to cause the electrode to come into contact with the probe based on the detected relative position, and the prober further comprises a plurality of temperature sensors that detect the temperatures of a plurality of portions of the prober including the wafer stage and a predicted change amount calculation section that calculates the amount of change in relative position between the electrode and the probe based on a prediction model that uses at least part of the temperatures of the plurality of portions and the temperature difference between the wafer stage and the other sections as a variable.

    摘要翻译： 公开了一种在不降低吞吐量的情况下提高探测位置精度的探测器。 探测器包括具有探针，晶片台，台温度调节机构，晶片台移动机构，移动控制部分和检测电极和探针之间的相对位置的对准机构的探针卡，其中移动 控制部分控制移动机构，以使得电极基于检测到的相对位置与探针接触，并且探测器还包括多个温度传感器，其检测探测器的多个部分的温度，包括 晶片台和预测变化量计算部，其基于使用多个部分的至少一部分温度的预测模型和晶片台之间的温度差来计算电极和探针之间的相对位置的变化量 其他部分作为变量。

    PROBER AND PROBE CONTACT METHOD
    2.
    发明申请
    PROBER AND PROBE CONTACT METHOD 有权
    探索与探索联系方式

    公开(公告)号：US20070268033A1

    公开(公告)日：2007-11-22

    申请号：US11744192

    申请日：2007-05-03

    申请人： Taichi Fujita ,  Takahiro Hokida ,  Tetsuo Hata ,  Satoshi Moriyama ,  Yoshiyuki Yokoyama

    发明人： Taichi Fujita ,  Takahiro Hokida ,  Tetsuo Hata ,  Satoshi Moriyama ,  Yoshiyuki Yokoyama

    IPC分类号： G01R31/02

    CPC分类号： G01R31/2891 ,  G01R31/286

    摘要： A prober that has improved positional precision of probing without reducing throughput is disclosed. The prober comprises a probe card having a probe, a wafer stage, a stage temperature adjustment mechanism, a wafer stage movement mechanism, a movement control section, and an alignment mechanism that detects the relative position between an electrode and the probe, wherein the movement control section controls the movement mechanism so as to cause the electrode to come into contact with the probe based on the detected relative position, and the prober further comprises a plurality of temperature sensors that detect the temperatures of a plurality of portions of the prober including the wafer stage and a predicted change amount calculation section that calculates the amount of change in relative position between the electrode and the probe based on a prediction model that uses at least part of the temperatures of the plurality of portions and the temperature difference between the wafer stage and the other sections as a variable.

    摘要翻译： 公开了一种在不降低吞吐量的情况下提高探测位置精度的探测器。 探测器包括具有探针，晶片台，台温度调节机构，晶片台移动机构，移动控制部分和检测电极和探针之间的相对位置的对准机构的探针卡，其中移动 控制部分控制移动机构，以使得电极基于检测到的相对位置与探针接触，并且探测器还包括多个温度传感器，其检测探测器的多个部分的温度，包括 晶片台和预测变化量计算部，其基于使用多个部分的至少一部分温度的预测模型和晶片台之间的温度差来计算电极和探针之间的相对位置的变化量 其他部分作为变量。

    Movement amount operation correction method for prober, movement amount operation correction processing program, and prober
    3.
    发明授权
    Movement amount operation correction method for prober, movement amount operation correction processing program, and prober 失效
    探测器运动量操作校正方法，移动量操作校正处理程序和探测器

    公开(公告)号：US07501843B2

    公开(公告)日：2009-03-10

    申请号：US11413368

    申请日：2006-04-27

    申请人： Masatomo Takahashi ,  Takahiro Hokida ,  Ken Kamikariya ,  Tetsuo Hata

    发明人： Masatomo Takahashi ,  Takahiro Hokida ,  Ken Kamikariya ,  Tetsuo Hata

    IPC分类号： G01R31/02

    CPC分类号： G01R31/2891

    摘要： A movement amount operation correction method of a prober capable of easily performing an error measurement for the movement distance. In the method, the position of a probe of a probe card is detected by a probe position detection means, the position of an electrode is detected by a wafer alignment means, the position of the probe trace is detected by bringing the electrode into contact with the probe and processing an image of a probe trace on the electrode touched by the wafer alignment means, the image of the probe trace and a probe trace mark indicating the detected position of the probe are displayed on a display device, and an operator confirms or corrects the position of the probe trace mark on the image, calculates a shift of the position of the probe trace mark from a predetermined position, and corrects a movement amount operation correction value based on the calculated shift.

    摘要翻译： 一种能够容易地进行移动距离的误差测量的探测器的移动量操作校正方法。 在该方法中，通过探针位置检测装置检测探针卡的探针的位置，通过晶片对准装置检测电极的位置，通过使电极与电极接触而检测探针迹线的位置 探针并处理由晶片对准装置触摸的电极上的探针迹线的图像，探针迹线的图像和指示探测器的检测位置的探针迹线标记显示在显示装置上，并且操作者确认或 校正图像上的探针迹线标记的位置，计算探测迹线标记从预定位置的位置的偏移，并且基于计算的移位来校正移动量操作校正值。

    Movement amount operation correction method for prober, movement amount operation correction processing program, and prober
    4.
    发明申请
    Movement amount operation correction method for prober, movement amount operation correction processing program, and prober 失效
    探测器运动量操作校正方法，移动量操作校正处理程序和探测器

    公开(公告)号：US20060267613A1

    公开(公告)日：2006-11-30

    申请号：US11413368

    申请日：2006-04-27

    申请人： Masatomo Takahashi ,  Takahiro Hokida ,  Ken Kamikariya ,  Tetsuo Hata

    发明人： Masatomo Takahashi ,  Takahiro Hokida ,  Ken Kamikariya ,  Tetsuo Hata

    IPC分类号： G01R31/02

    CPC分类号： G01R31/2891

    摘要： A movement amount operation correction method of a prober capable of easily performing an error measurement for the movement distance, as conventionally performed by a skilled specialist, has been disclosed. In the method, the position of a probe of a probe card is detected by a probe position detection means, the position of an electrode is detected by a wafer alignment means, the position of the probe trace is detected by bringing the electrode into contact with the probe and processing an image of a probe trace on the electrode touched by the wafer alignment means, the image of the probe trace and a probe trace mark indicating the detected position of the probe are displayed on a display device, and an operator confirms or corrects the position of the probe trace mark on the image, calculates a shift of the position of the probe trace mark from a predetermined position, and corrects a movement amount operation correction value based on the calculated shift.

    摘要翻译： 已经公开了如本领域技术人员常规执行的能够容易地执行移动距离的误差测量的探测器的移动量操作校正方法。 在该方法中，通过探针位置检测装置检测探针卡的探针的位置，通过晶片对准装置检测电极的位置，通过使电极与电极接触而检测探针迹线的位置 探针并处理由晶片对准装置触摸的电极上的探针迹线的图像，探针迹线的图像和指示探测器的检测位置的探针迹线标记显示在显示装置上，并且操作者确认或 校正图像上的探针迹线标记的位置，计算探测迹线标记从预定位置的位置的偏移，并且基于计算的移位来校正移动量操作校正值。