INTEGRATED CIRCUIT PACKAGE METHOD
    2.
    发明申请
    INTEGRATED CIRCUIT PACKAGE METHOD 审中-公开
    集成电路封装方法

    公开(公告)号:US20160096727A1

    公开(公告)日:2016-04-07

    申请号:US14967515

    申请日:2015-12-14

    Abstract: A method of forming a packaged electronic device includes fabricating a MEMS structure, such as a BAW structure, on a first semiconductor wafer substrate; forming a cavity in a second semiconductor wafer substrate; and mounting the second substrate on the first substrate such that the MEMS structure is positioned inside the cavity in the second substrate using epoxy die attachment film. A wafer level assembly and an integrated circuit package are also described.

    Abstract translation: 形成封装的电子器件的方法包括在第一半导体晶片衬底上制造诸如BAW结构的MEMS结构; 在第二半导体晶片衬底中形成空腔; 以及将所述第二基板安装在所述第一基板上,使得所述MEMS结构使用环氧树脂模附着膜定位在所述第二基板的所述腔内。 还描述了晶片级组件和集成电路封装。

    Integrated circuit package and method
    8.
    发明授权
    Integrated circuit package and method 有权
    集成电路封装及方法

    公开(公告)号:US09527728B2

    公开(公告)日:2016-12-27

    申请号:US13947235

    申请日:2013-07-22

    Abstract: A method of forming a packaged electronic device includes fabricating a MEMS structure, such as a BAW structure, on a first semiconductor wafer substrate; forming a cavity in a second semiconductor wafer substrate; and mounting the second substrate on the first substrate such that the MEMS structure is positioned inside the cavity in the second substrate. A wafer level assembly and an integrated circuit package are also described.

    Abstract translation: 形成封装的电子器件的方法包括在第一半导体晶片衬底上制造诸如BAW结构的MEMS结构; 在第二半导体晶片衬底中形成空腔; 以及将所述第二基板安装在所述第一基板上,使得所述MEMS结构位于所述第二基板中的所述腔内。 还描述了晶片级组件和集成电路封装。

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