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公开(公告)号：US20240125697A1
公开(公告)日：2024-04-18
申请号：US18535134
申请日：2023-12-11
Applicant: Tokyo Electron Limited
Inventor： Koudai Higashi , Masato Hayashi , Kohei Noguchi
CPC classification number: G01N21/39 , G01N21/85 , G01N2021/392
Abstract: A substrate processing apparatus includes a supply channel through which a liquid to be supplied to a substrate flows; and a foreign substance detecting unit configured to detect a foreign substance in the liquid based on a signal obtained when light, which is near-infrared light, is radiated toward a flow path forming unit constituting a part of the supply channel by a light projector so that light is emitted from the flow path forming unit and a light receiver receives the light emitted from the flow path forming unit.
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公开(公告)号：US20220319886A1
公开(公告)日：2022-10-06
申请号：US17657178
申请日：2022-03-30
Applicant: Tokyo Electron Limited
Inventor： Junnosuke Maki , Koudai Higashi , Ryo Konishi
IPC: H01L21/67 , H01L21/687
Abstract: An information acquisition system configured to acquire information upon a substrate processing apparatus configured to process a substrate held by a substrate holder includes a base body, instead of the substrate, held by the substrate holder; and multiple position sensors provided at the base body such that detection directions thereof are different from each other, and each configured to detect a position of a common detection target object located outside the base body.
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3.发明授权公开(公告)号：US11340152B2
公开(公告)日：2022-05-24
申请号：US17245220
申请日：2021-04-30
Applicant: TOKYO ELECTRON LIMITED
Inventor： Masato Hayashi , Kohei Noguchi , Koudai Higashi , Makoto Ogata
Abstract: According to one embodiment of the present disclosure, there is provided a substrate processing apparatus comprising: a supply passage through which fluid supplied to a substrate flows; and a foreign substance detector including a channel forming part forming a portion of the supply passage, a light projector irradiating light to the channel forming part, and a light receiver receiving light emitted from the channel forming part as a result of irradiating light to the channel forming part by the light projector, the foreign substance detector being configured to detect a foreign substance in the fluid based on a signal obtained by the light that the light receiver receives, wherein the light projector and the light receiver in the foreign substance detector are disposed in areas that are not opposite to each other in areas in upper, lower, left, right, front and rear directions of the channel forming part.
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公开(公告)号：US11906414B2
公开(公告)日：2024-02-20
申请号：US17809365
申请日：2022-06-28
Applicant: Tokyo Electron Limited
Inventor： Masato Hayashi , Kohei Noguchi , Daisuke Kajiwara , Koudai Higashi
CPC classification number: G01N15/06 , G01N21/51 , G01N21/53 , G01N2015/0687 , G01N2015/0693
Abstract: A foreign substance detection device includes a flow path unit through which a fluid is flown; an optical system configured to flatten a laser light from a laser source to be lengthened in a direction intersecting with a flow direction of the fluid; a laser light irradiation unit provided such that an optical path intersects with the flow direction and configured to irradiate the laser light into the flow path unit; a light detection unit which is provided on the optical path having passed through the flow path unit and includes light receiving elements arranged in a lengthwise direction of a transversal cross section of the optical path; a foreign substance detection unit configured to compare a signal level corresponding to intensity of light received by each light receiving element with a threshold value and configured to detect the foreign substances based on a comparison result.
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公开(公告)号：US11879839B2
公开(公告)日：2024-01-23
申请号：US17386850
申请日：2021-07-28
Applicant: Tokyo Electron Limited
Inventor： Koudai Higashi , Masato Hayashi , Kohei Noguchi
CPC classification number: G01N21/39 , G01N21/85 , G01N2021/392
Abstract: A substrate processing apparatus includes a supply channel through which a liquid to be supplied to a substrate flows; and a foreign substance detecting unit configured to detect a foreign substance in the liquid based on a signal obtained when light, which is near-infrared light, is radiated toward a flow path forming unit constituting a part of the supply channel by a light projector so that light is emitted from the flow path forming unit and a light receiver receives the light emitted from the flow path forming unit.
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Patent Agency Ranking
公开(公告)号：US20210190661A1
公开(公告)日：2021-06-24
申请号：US16071122
申请日：2017-01-10
Applicant: Tokyo Electron Limited
Inventor： Masato Hayashi , Kohei Noguchi , Daisuke Kajiwara , Koudai Higashi
Abstract: A foreign substance detection device includes a flow path unit through which a fluid is flown; an optical system configured to flatten a laser light from a laser source to be lengthened in a direction intersecting with a flow direction of the fluid; a laser light irradiation unit provided such that an optical path intersects with the flow direction and configured to irradiate the laser light into the flow path unit; a light detection unit which is provided on the optical path having passed through the flow path unit and includes light receiving elements arranged in a lengthwise direction of a transversal cross section of the optical path; a foreign substance detection unit configured to compare a signal level corresponding to intensity of light received by each light receiving element with a threshold value and configured to detect the foreign substance based on a comparison result.
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公开(公告)号：US20220326133A1
公开(公告)日：2022-10-13
申请号：US17809365
申请日：2022-06-28
Applicant: Tokyo Electron Limited
Inventor： Masato Hayashi , Kohei Noguchi , Daisuke Kajiwara , Koudai Higashi
Abstract: A foreign substance detection device includes a flow path unit through which a fluid is flown; an optical system configured to flatten a laser light from a laser source to be lengthened in a direction intersecting with a flow direction of the fluid; a laser light irradiation unit provided such that an optical path intersects with the flow direction and configured to irradiate the laser light into the flow path unit; a light detection unit which is provided on the optical path having passed through the flow path unit and includes light receiving elements arranged in a lengthwise direction of a transversal cross section of the optical path; a foreign substance detection unit configured to compare a signal level corresponding to intensity of light received by each light receiving element with a threshold value and configured to detect the foreign substances based on a comparison result.
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8.发明授权公开(公告)号：US11002656B2
公开(公告)日：2021-05-11
申请号：US16746118
申请日：2020-01-17
Applicant: TOKYO ELECTRON LIMITED
Inventor： Masato Hayashi , Kohei Noguchi , Koudai Higashi , Makoto Ogata
Abstract: According to one embodiment of the present disclosure, there is provided a substrate processing apparatus comprising: a supply passage through which fluid supplied to a substrate flows; and a foreign substance detector including a channel forming part forming a portion of the supply passage, a light projector irradiating light to the channel forming part, and a light receiver receiving light emitted from the channel forming part as a result of irradiating light to the channel forming part by the light projector, the foreign substance detector being configured to detect a foreign substance in the fluid based on a signal obtained by the light that the light receiver receives, wherein the light projector and the light receiver in the foreign substance detector are disposed in areas that are not opposite to each other in areas in upper, lower, left, right, front and rear directions of the channel forming part.
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公开(公告)号：US10049905B2
公开(公告)日：2018-08-14
申请号：US14861135
申请日：2015-09-22
Applicant: TOKYO ELECTRON LIMITED
Inventor： Koudai Higashi , Shinichiro Misaka
Abstract: A substrate heat treatment apparatus includes: a placement unit on which a substrate is placed; a heat treatment unit for heating or cooling the substrate on the placement unit; a plurality of temperature sensors positioned correspondingly to a plurality of locations of the substrate on the placement unit; and a control unit. The control unit is configured to control the heat treatment unit based on temperatures detected by the temperature sensors, to calculate a position of a thermal center of gravity of the substrate based on the temperatures detected by the temperature sensors, and to detect heat treatment condition of the substrate based on the position of the thermal center of gravity.
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公开(公告)号：US09953853B2
公开(公告)日：2018-04-24
申请号：US14759824
申请日：2014-01-31
Applicant: TOKYO ELECTRON LIMITED
Inventor： Masato Hayashi , Koudai Higashi
IPC: H01L21/677 , H01L21/67 , H01L21/687
CPC classification number: H01L21/67265 , H01L21/67288 , H01L21/67712 , H01L21/67724 , H01L21/67772 , H01L21/67775 , H01L21/67778 , H01L21/68707
Abstract: A substrate transport apparatus for detecting with high accuracy rubbing between a substrate held in a substrate holding tool, and a support which transports a substrate. The substrate transport apparatus includes: a stage for placing thereon the substrate holding tool; a substrate transport mechanism including the support for the substrate, and a back-and-forth movement mechanism for moving the support, the mechanism configured to transfer a substrate to/from the substrate holding tool; a lifting mechanism for moving the support up and down with respect to the substrate holding tool; a sound amplifying section for amplifying a contact sound generated by contact between a substrate held in the substrate holding tool and the support; and a detection section for detecting rubbing between a substrate and the support based on a detection signal from a vibration sensor which detects a solid-borne sound, propagating through the substrate holding tool, and outputs the detection signal.
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