Gathering and sampling device and inspection apparatus

    公开(公告)号:US10782211B2

    公开(公告)日:2020-09-22

    申请号:US15858829

    申请日:2017-12-29

    摘要: A sampling device and an inspection apparatus are disclosed. In one aspect, an example gathering and sampling device includes a cylindrical outer housing and an inner housing disposed within the cylindrical outer housing, a cyclone chamber is formed between the cylindrical outer housing and the inner housing to generate a cyclone by injecting a gas flow into the cyclone chamber. The gathering and sampling device further includes an outer chamber body, and a plurality of gas injection orifices formed in the first inner housing end opening of the inner housing and configured to inject a gas towards a substantial center of a circular region defined by an end face of the first outer housing end opening of the cylindrical outer housing.

    ION MIGRATION TUBE AND METHOD OF OPERATING THE SAME

    公开(公告)号:US20180190482A1

    公开(公告)日:2018-07-05

    申请号:US15858255

    申请日:2017-12-29

    IPC分类号: H01J49/06 H01J49/42 G01N27/62

    摘要: The present disclosure provides an ion migration tube and a method of operation the same. The ion migration tube includes an interior space and an ion gate disposed within the interior space, the interior space includes an ionization region having an absolute value of potential V1 and a migration region. An ion gate is disposed between the ionization region and the migration region and includes a first ion gate grid having an absolute value of potential V2 and a second ion gate grid having an absolute value of potential V3, the migration region comprises at least a first migration region electrode having an absolute value of potential V4 and a second migration region electrode having an absolute value of potential V5. When the ion gate is opened, a potential well is formed for ionized ions between the first ion gate grid and the first migration region electrode so as to compress an ion group entering the migration region.