公开(公告)号：US20240067480A1

公开(公告)日：2024-02-29

申请号：US18361293

申请日：2023-07-28

Applicant: ULVAC, INC.

Inventor： Yoshiaki FUKUDA ,  Shunsuke SASAKI ,  Takahito KIMOTO ,  Michinari SUGIMURA

IPC: B65H18/20 ,  B65H23/038

CPC classification number: B65H18/20 ,  B65H23/038 ,  B65H2404/1362 ,  B65H2553/27

Abstract: In a present vacuum treatment apparatus, a controller controls an auxiliary roller, a thermometer, a power source, and a temperature control mechanism, in which the controller detects a temperature of a base material wound and conveyed by a main roller, starts film deposition to form a film deposition material on the base material when the temperature of the base material is in a film deposition temperature range, adjusts, when the temperature of the base material is out of a threshold range after starting film deposition on the base material, the temperature of the main roller so that the temperature of the base material falls within the threshold range and adjusts an adhesion force between the main roller and the base material, and continues the film deposition of the film deposition material on the base material with the temperature of the base material in the film deposition temperature range.

公开(公告)号：US20240058839A1

公开(公告)日：2024-02-22

申请号：US18360950

申请日：2023-07-28

Applicant: ULVAC, INC.

Inventor： Shunsuke SASAKI ,  Takahito KIMOTO ,  Yoshiaki FUKUDA ,  Ken MAEHIRA

IPC: B05D1/28

CPC classification number: B05D1/28

Abstract: A vacuum treatment apparatus including: a first wind-off roller paying out a first base material; a first wind roller winding the first base material; a main roller having an outer circumferential surface in contact with a non-film deposition surface, and winding and conveying the first base material, at least a part of the outer circumferential surface, which is uncovered with the first base material, being coated with an insulating material; a deposition source facing the outer circumferential surface of the main roller; a second wind-off roller paying out a second base material that is wound and conveyed by the main roller and covers a part of a film deposition surface of the first base material on the outer circumferential surface of the main roller; a second wind roller winding the second base material; and a power source applying a bias potential to the main roller.

公开(公告)号：US20210222289A1

公开(公告)日：2021-07-22

申请号：US15734889

申请日：2019-07-04

Applicant: ULVAC, INC.

Inventor： Yutaka KOKAZE ,  Teruaki IIWAHASHI ,  Shunsuke SASAKI

IPC: C23C14/35 ,  C23C14/50 ,  C23C14/34 ,  H01J37/34

Abstract: A sputtering apparatus includes a plate-shaped regulator that is provided between a target and a substrate, has an opening corresponding to a magnetic circuit, and covers a portion not corresponding to the magnetic circuit. The regulator covers at least a surface area that is greater than or equal to a half of a surface area of the substrate. The opening has a substantially fan-shaped outline. The opening is arranged so as to substantially coincide with the magnetic circuit when viewed in a direction of a rotation axis line of the target, and the rotation axis line of the target and a rotation axis line of the substrate are arranged substantially parallel to each other.

公开(公告)号：US20170077493A1

公开(公告)日：2017-03-16

申请号：US15260216

申请日：2016-09-08

Applicant: ULVAC, INC.

Inventor： Shunsuke SASAKI ,  Akiyoshi SUZUKI ,  Takehito JINBO ,  Masaki TSUSHIMA ,  Kazutoshi TAKAHASHI

IPC: H01M4/131 ,  H01M4/04 ,  H01M4/36 ,  H01M4/525 ,  H01M4/66 ,  H01M10/0562 ,  H01M10/0585 ,  H01M4/134 ,  H01M4/38 ,  H01M4/1391 ,  H01M10/0525

CPC classification number: H01M4/131 ,  H01M4/0404 ,  H01M4/0426 ,  H01M4/0471 ,  H01M4/134 ,  H01M4/1391 ,  H01M4/366 ,  H01M4/382 ,  H01M4/525 ,  H01M4/661 ,  H01M10/0525 ,  H01M10/0562 ,  H01M10/0585 ,  H01M2004/021 ,  H01M2004/027 ,  H01M2004/028 ,  H01M2300/0068

Abstract: A method for forming a positive electrode for a thin film lithium-ion rechargeable battery includes forming a positive electrode power collection layer, forming a first positive electrode active material layer by covering the positive electrode power collection layer with a first positive electrode active material that contains lithium cobalt oxide, forming a second positive electrode active material layer that has a thickness of 20 nm or greater and 60 nm or less by covering the first positive electrode active material layer with a second positive electrode active material that contains aluminum and lithium cobalt oxide, and heating a lamination body that includes the positive electrode power collection layer, the first positive electrode active material layer, and the second positive electrode active material layer.

Abstract translation: 一种用于形成用于薄膜锂离子可再充电电池的正极的方法包括：形成正极集电层，通过用第一正极活性材料覆盖阳极电力收集层形成第一正电极活性材料层，所述第一正电极活性材料包含 通过用含有铝和钴酸锂的第二正极活性物质覆盖第一正极活性物质层，形成厚度为20nm以上且60nm以下的第二正极活性物质层， 并且对包括正极集电层，第一正极活性物质层和第二正极活性物质层的层叠体进行加热。