ALUMINUM OXYNITRIDE COATED ARTICLE AND METHOD OF MAKING THE SAME
    8.
    发明申请
    ALUMINUM OXYNITRIDE COATED ARTICLE AND METHOD OF MAKING THE SAME 有权
    氧化铝涂层制品及其制备方法

    公开(公告)号:US20120237794A1

    公开(公告)日:2012-09-20

    申请号:US13048301

    申请日:2011-03-15

    IPC分类号: B32B18/00 C04B35/10 C23C16/44

    摘要: A coated article such as a coated cutting tool or coated wear part, which includes a substrate and a coating scheme on the substrate. The coating scheme has a titanium-containing coating layer, and an aluminum oxynitride coating layer on the titanium-containing coating layer. The aluminum oxynitride includes a mixture of phases having a hexagonal aluminum nitride type structure (space group: P63mc), a cubic aluminum nitride type structure (space group: Fm-3m), and optionally amorphous structure. The aluminum oxynitride coating layer has a composition of aluminum in an amount between about 20 atomic percent and about 50 atomic percent, nitrogen in an amount between about 40 atomic percent and about 70 atomic percent, and oxygen in an amount between about 1 atomic percent and about 20 atomic percent. The method of making the coated article includes a step of providing a substrate and depositing an aluminum oxynitride coating layer from a gaseous mixture that includes nitrogen, aluminum tri-chloride, ammonia, carbon dioxide, hydrogen chloride, optionally carbon monoxide, optionally argon, and hydrogen.

    摘要翻译: 涂覆的制品,例如涂覆的切削工具或涂覆的磨损部件,其包括衬底和在衬底上的涂覆方案。 涂布方案在含钛涂层上具有含钛涂层和氮氧化铝涂层。 氮氧化铝包括具有六方氮化铝型结构(空间群:P63mc),立方氮化铝型结构(空间群:Fm-3m)和任选的非晶结构的相的混合物。 铝氮氧化物涂层的组成为约20原子%至约50原子%的量的铝,约40原子%至约70原子%之间的氮,约1原子%与约1原子%之间的量的氧, 约20原子%。 制备涂覆制品的方法包括提供基材和从包括氮,三氯化铝,氨,二氧化碳,氯化氢,任选的一氧化碳,任选的氩气的气体混合物沉积氧氮化铝涂层的步骤,以及 氢。

    Tool and method for the chemical vapor deposition of a two-phase layer on a substrate member
    9.
    发明授权
    Tool and method for the chemical vapor deposition of a two-phase layer on a substrate member 有权
    用于在衬底构件上的两相层的化学气相沉积的工具和方法

    公开(公告)号:US07431998B2

    公开(公告)日:2008-10-07

    申请号:US10554666

    申请日:2004-04-23

    IPC分类号: B32B9/00 C23C16/30

    CPC分类号: C23C30/005 C23C16/30

    摘要: The invention relates to a tool, especially a cutting tool, comprising a substrate member onto which at least one layer is deposited by means of CVD, and a method for the chemical vapor deposition of a two-phase layer on a sintered part. According to the invention, the single deposited layer or at least one of the layers is provided with a TiCN phase, TiOCN phase, TiOC phase, or TiC phase and an additional phase consisting of ZrO2 and/or HfO2. CH3CN, C5H5N, or C6H6 is used in the gas atmosphere for producing such a layer in addition to TiCl4, HfCl4, and/or ZrCl4 and CO2, the remainder being composed of H2 and/or Ar.

    摘要翻译: 本发明涉及一种工具,特别是一种切削工具,其包括通过CVD沉积至少一层的基板部件,以及用于在烧结部件上化学气相沉积两相层的方法。 根据本发明,单个沉积层或至少一个层具有TiCN相,TiOCN相,TiOC相或TiC相以及由ZrO 2和/或 HfO 2 2。 CH 3 CN,C 5 H 5 N或C 6 H 6, 除了TiCl 4,HfCl 4和/或ZrCl 4和CO之外,还用于生产这种层的气体气氛中 > 2 ,其余部分由H 2和/或Ar组成。