公开(公告)号：US5465002A

公开(公告)日：1995-11-07

申请号：US052896

申请日：1993-04-26

申请人： Walter Snoeys ,  Sherwood I. Parker

发明人： Walter Snoeys ,  Sherwood I. Parker

IPC分类号： G01T1/24 ,  H01L27/146 ,  H01L31/115 ,  H01L31/117

CPC分类号： H01L27/14676 ,  G01T1/241 ,  H01L27/146

摘要： A structure for a detector with a high spatial resolution is characterized not only as integrating on the same chip both PIN diodes and readout circuitry for detecting the charge collected through the individual diodes, but places the junction and collection electrode on opposite ends of the PIN diode. This reduces the fields at the collection electrode, and allows the wells containing the readout circuitry, which should be located as close to the collection electrode as possible to minimize collection electrode capacitance, to be placed in a low field region. The bias voltage required on the wells can then be reduced, and the electrodes for collecting the generated charge can be made smaller.

摘要翻译： 具有高空间分辨率的检测器的结构不仅在同一芯片上集成了PIN二极管和用于检测通过各个二极管收集的电荷的读出电路，而且将结和收集电极放置在PIN二极管的相对端 。 这减少了收集电极处的场，并且允许包含读取电路的阱，其应该被定位成尽可能靠近采集电极以最小化收集电极电容，以放置在低场区域中。 然后可以减少孔上所需的偏置电压，并且可以使用于收集所产生的电荷的电极更小。

公开(公告)号：US5237197A

公开(公告)日：1993-08-17

申请号：US763817

申请日：1991-09-23

申请人： Walter Snoeys ,  Sherwood I. Parker

发明人： Walter Snoeys ,  Sherwood I. Parker

IPC分类号： G01T1/24 ,  H01L27/146

CPC分类号： H01L27/14676 ,  G01T1/241 ,  H01L27/146

摘要： A VLSI radiation/particle detector includes detecting elements based on one or more PIN diodes which are biased for collecting the charge generated by incident radiation or ionizing particles, and readout circuitry integrated on the same chip for detecting the collected charge. The junction of the PIN diode and the well containing the readout circuitry are separated far from each other such that the bias voltage required on the well to direct most generated charge to the collection electrodes can be reduced, and these can be made smaller to improve the detector's spatial resolution.

摘要翻译： VLSI辐射/粒子检测器包括基于一个或多个PIN二极管的检测元件，其被偏置用于收集由入射辐射或电离粒子产生的电荷，以及集成在同一芯片上的读出电路，用于检测所收集的电荷。 PIN二极管和包含读出电路的阱的连接点彼此远离，从而可以减少将阱中产生的大部分产生的电荷引导到集电电极所需的偏置电压，并且可以使它们更小以改善 探测器的空间分辨率。

公开(公告)号：US5355013A

公开(公告)日：1994-10-11

申请号：US831131

申请日：1992-02-04

申请人： Sherwood I. Parker

发明人： Sherwood I. Parker

IPC分类号： H01L27/146 ,  H01L31/115 ,  H04N3/15 ,  H01L29/78 ,  H01L31/06

CPC分类号： H04N3/155 ,  H01L27/14643 ,  H01L31/115

摘要： A particle detector has pixels arranged in rows and columns in a array-like formation and readout circuits for determining which of these pixels were hit by an ionizing particle. The pixels each including a PIN diode and charge transferring circuitry are integrated on a common silicon substrate with the readout circuits. Column buses and row buses are provided, associated with the pixels on the same column or row. A priority encoder gives the address of the highest numbered input that is asserted. Electric charge collected by a hit pixel is stored momentarily on a collection electrode and affects the current flow from the column bus to the row bus associated with the pixel. The column buses are sequentially activated and variations in the row currents are examined in parallel. To efficiently and accurately collect charge from the substrate, wells are used to which also contain the transferring circuitry and readout circuits. The wells also provide electrostatic shielding and prevent drain to source transistor punchthrough. The PIN-diodes and the collection electrodes are arranged close to but not connected to the well.

摘要翻译： 粒子检测器具有排列成阵列状结构中的行和列的像素和用于确定这些像素中的哪一个被电离粒子击中的读出电路。 每个包括PIN二极管和电荷转移电路的像素与读出电路集成在公共硅衬底上。 提供列总线和行总线，与同一列或行上的像素相关联。 优先编码器给出了被确认的最高编号输入的地址。 由命中像素收集的电荷被暂时存储在收集电极上并且影响从列总线到与像素相关联的行总线的电流。 列总线被依次激活，行电流的变化被并行检查。 为了从衬底高效且准确地收集电荷，使用还包含转移电路和读出电路的阱。 该井还提供静电屏蔽，并防止漏极到源极晶体管穿透。 PIN二极管和收集电极布置成靠近但不连接到阱。