公开(公告)号：US5465002A

公开(公告)日：1995-11-07

申请号：US052896

申请日：1993-04-26

申请人： Walter Snoeys ,  Sherwood I. Parker

发明人： Walter Snoeys ,  Sherwood I. Parker

IPC分类号： G01T1/24 ,  H01L27/146 ,  H01L31/115 ,  H01L31/117

CPC分类号： H01L27/14676 ,  G01T1/241 ,  H01L27/146

摘要： A structure for a detector with a high spatial resolution is characterized not only as integrating on the same chip both PIN diodes and readout circuitry for detecting the charge collected through the individual diodes, but places the junction and collection electrode on opposite ends of the PIN diode. This reduces the fields at the collection electrode, and allows the wells containing the readout circuitry, which should be located as close to the collection electrode as possible to minimize collection electrode capacitance, to be placed in a low field region. The bias voltage required on the wells can then be reduced, and the electrodes for collecting the generated charge can be made smaller.

摘要翻译： 具有高空间分辨率的检测器的结构不仅在同一芯片上集成了PIN二极管和用于检测通过各个二极管收集的电荷的读出电路，而且将结和收集电极放置在PIN二极管的相对端 。 这减少了收集电极处的场，并且允许包含读取电路的阱，其应该被定位成尽可能靠近采集电极以最小化收集电极电容，以放置在低场区域中。 然后可以减少孔上所需的偏置电压，并且可以使用于收集所产生的电荷的电极更小。

公开(公告)号：US5644086A

公开(公告)日：1997-07-01

申请号：US727135

申请日：1996-10-08

申请人： Sean Samuel Cahill ,  Walter Snoeys ,  Kenichi Nakamura

发明人： Sean Samuel Cahill ,  Walter Snoeys ,  Kenichi Nakamura

IPC分类号： G01P15/08 ,  G01P15/125 ,  G01V1/18 ,  G01H11/06

CPC分类号： G01V1/181 ,  G01P15/0891 ,  G01P15/125 ,  G01P2015/0831

摘要： An miniaturized accelerometer having a narrow bandwidth and behaving as a switch sensitive only to low frequencies such as contained in earthquakes includes: a unbalanced see-saw beam assembly composed of beams 2 and masses 3 at opposite ends of the beams 2. The beams 2 have their suspension at a location with slightly different distances from the masses 3 along a line parallel to and vertically offset from the line connecting centers of gravity of the masses 3.

摘要翻译： 小型化的加速度计具有窄带宽，并且作为仅对诸如包含在地震中的低频敏感的开关包括：由波束2和波束2的相对端处的质量块3组成的不平衡锯齿组件。梁2具有 它们的悬挂位置与沿着与连接质心3的重心的线平行并垂直偏离的线与质量3的距离略微不同的距离。

公开(公告)号：US5237197A

公开(公告)日：1993-08-17

申请号：US763817

申请日：1991-09-23

申请人： Walter Snoeys ,  Sherwood I. Parker

发明人： Walter Snoeys ,  Sherwood I. Parker

IPC分类号： G01T1/24 ,  H01L27/146

CPC分类号： H01L27/14676 ,  G01T1/241 ,  H01L27/146

摘要： A VLSI radiation/particle detector includes detecting elements based on one or more PIN diodes which are biased for collecting the charge generated by incident radiation or ionizing particles, and readout circuitry integrated on the same chip for detecting the collected charge. The junction of the PIN diode and the well containing the readout circuitry are separated far from each other such that the bias voltage required on the well to direct most generated charge to the collection electrodes can be reduced, and these can be made smaller to improve the detector's spatial resolution.

摘要翻译： VLSI辐射/粒子检测器包括基于一个或多个PIN二极管的检测元件，其被偏置用于收集由入射辐射或电离粒子产生的电荷，以及集成在同一芯片上的读出电路，用于检测所收集的电荷。 PIN二极管和包含读出电路的阱的连接点彼此远离，从而可以减少将阱中产生的大部分产生的电荷引导到集电电极所需的偏置电压，并且可以使它们更小以改善 探测器的空间分辨率。