公开(公告)号：US09893656B2

公开(公告)日：2018-02-13

申请号：US14153325

申请日：2014-01-13

Applicant: YOKOGAWA ELECTRIC CORPORATION

Inventor： Takashi Yoshida ,  Shigeto Iwai ,  Yoshitaka Sasaki

IPC: H02N11/00 ,  H03H3/007 ,  H03H9/24

CPC classification number: H02N11/00 ,  H03H3/0072 ,  H03H9/2463 ,  Y10T29/49007

Abstract: A resonant transducer includes a resonator, a resonator electrodes connected to an end part of the resonator, at least one fixed electrode arranged in the vicinity of the resonator, and a buried part formed between the fixed electrode and the resonator electrode. The resonator, the resonator electrodes and the fixed electrode are formed by the same active layer on a substrate.