公开(公告)号：US20140299206A1

公开(公告)日：2014-10-09

申请号：US14343226

申请日：2012-07-17

申请人： Masaaki Nagase ,  Kaoru Hirata ,  Atushi Hidaka ,  Kouji Nishino ,  Nobukazu Ikeda ,  Takeshi Nakamura

发明人： Masaaki Nagase ,  Kaoru Hirata ,  Atushi Hidaka ,  Kouji Nishino ,  Nobukazu Ikeda ,  Takeshi Nakamura

IPC分类号： F17D3/00

CPC分类号： F17D3/00 ,  C23C16/4482 ,  C23C16/45561 ,  G05D11/135 ,  Y10T137/8158

摘要： An apparatus able to regulate a raw material concentration, in a mixed gas of carrier gas and raw material gas, accurately and stably to supply the mixed gas to a process chamber, with a flow rate controlled highly accurately, thereby detecting a vapor concentration of the raw material gas in the mixed gas easily and highly accurately and displaying the concentration in real time without using an expensive concentration meter, etc.

摘要翻译： 能够精确稳定地调节载气和原料气体的混合气体中的原料浓度的装置，以高精度地控制流量，将混合气体供给到处理室，从而检测蒸发浓度 混合气体中的原料气体容易且高精度地实时显示浓度，而不使用昂贵的浓度计等。

公开(公告)号：US06314992B1

公开(公告)日：2001-11-13

申请号：US09530022

申请日：2000-04-24

申请人： Tadahiro Ohmi ,  Satoshi Kagatsume ,  Jun Hirose ,  Kouji Nishino

发明人： Tadahiro Ohmi ,  Satoshi Kagatsume ,  Jun Hirose ,  Kouji Nishino

IPC分类号： G05D706

CPC分类号： G05D7/0658 ,  G05D7/0635 ,  Y10T137/7759 ,  Y10T137/7761

摘要： A fluid-switchable flow rate control system that permits free changing of the full scale flow rate and which can control a plurality of kinds of fluids with high precision. The fluid-switchable flow rate control system controls the flow rate of fluid with the pressure P1 on the upstream side of the orifice member held about twice or more higher than the downstream pressure P2, the fluid-switchable flow rate control system comprising an orifice member 8 replaceable with another to provide a suitable orifice diameter according to the kind of fluid and the flow rate range, a control valve 2 provided on the upstream side thereof, a pressure detector 6 provided between the control valve 2 and the orifice member 8, a flow rate calculation circuit 14 where from the pressure P1 detected by the pressure detector, the flow rate Qc is calculated with the equation Qc=KP1 (K=constant), a flow rate-setting circuit 16 for outputting flow rate setting signal Qe, a flow rate conversion circuit 18 for multiplying the calculated flow rate signal Qc by the flow rate conversion rate k into switch-over calculated flow rate signal Qf (Qf=kQc) to change the full scale flow rate, and a calculation control circuit 20 to output the difference between the switch-over calculation flow rate signal Qf and the flow rate setting signal Qe as control signal Qy to the drive 4 of the control valve 2, thereby opening or closing the control valve to bring the control signal Qy to zero, thus controlling the flow rate on the downstream side of the orifice member.

摘要翻译： 一种可流体切换的流量控制系统，其允许自由改变满量程流量并且可以高精度地控制多种流体。 可流体切换流量控制系统控制流体的流量，其中孔口部件的上游侧的压力P1保持在比下游压力P2大约两倍或更多的高度，流体可切换流量控制系统包括孔口部件 8可替换为另一个，以根据流体种类和流量范围提供合适的孔口直径，设置在其上游侧的控制阀2，设置在控制阀2和孔口构件8之间的压力检测器6， 流量计算电路14，从压力检测器检测出的压力P1，以流量Qc = KP1（K =常数）计算流量Qc，输出流量设定信号Qe的流量设定电路16 用于将计算出的流量信号Qc乘以流量转换率k的流量转换电路18转换为切换计算流量信号Qf（Qf = kQc）以改变满量程流量， 以及计算控制电路20，将切换计算流量信号Qf和作为控制信号Qy的流量设定信号Qe之间的差分输出到控制阀2的驱动器4，由此打开或关闭控制阀以带来 控制信号Qy为零，从而控制孔口部件的下游侧的流量。

公开(公告)号：US20100127196A1

公开(公告)日：2010-05-27

申请号：US12593580

申请日：2008-03-13

申请人： Yohei Sawada ,  Kaoru Hirata ,  Ryosuke Doho ,  Kouji Nishino ,  Nobukazu Ikeda

发明人： Yohei Sawada ,  Kaoru Hirata ,  Ryosuke Doho ,  Kouji Nishino ,  Nobukazu Ikeda

IPC分类号： F16K31/02

CPC分类号： F16K31/007 ,  F16K7/14

摘要： Stable flow control is made possible even under high-temperature environments by relieving tensional force applied to a piezoelectric element when a piezoelectric actuator is retracted. Thus, a piezoelectric driven control valve includes: a body having a valve seat; a metal diaphragm to contact with and separate from the valve seat; an actuator box supported ascendably and descendably on the body; a split base fixed to the body; a disc spring pressing and urging the actuator box downward to bring the metal diaphragm into contact with the valve seat; and a piezoelectric actuator housed inside the actuator box and that extends upward with application of voltage to press the actuator box upward against the elastic force of the disc spring, and a precompression mechanism, for applying a compression force constantly to piezoelectric elements in the piezoelectric actuator, provided between the split base and the piezoelectric actuator.

摘要翻译： 即使在高温环境下，当压电致动器缩回时，通过减轻施加到压电元件的张力来实现稳定的流量控制。 因此，压电驱动控制阀包括：具有阀座的主体; 金属隔膜与阀座接触并分离; 一个致动器箱，可以上下方式支撑在主体上; 固定在身体上的分裂基座; 盘簧弹簧向下推动执行器箱，使金属隔膜与阀座接触; 以及压电致动器，其容纳在致动器箱内部并且通过施加电压向上延伸以克服盘簧的弹性力向上推动致动器盒;以及预压机构，用于将压缩力恒定地施加到压电致动器中的压电元件 ，设置在分离基座和压电致动器之间。

公开(公告)号：US07059363B2

公开(公告)日：2006-06-13

申请号：US10495641

申请日：2003-01-20

申请人： Kazuhiko Sugiyama ,  Nobukazu Ikeda ,  Kouji Nishino ,  Ryosuke Dohi ,  Toyomi Uenoyama

发明人： Kazuhiko Sugiyama ,  Nobukazu Ikeda ,  Kouji Nishino ,  Ryosuke Dohi ,  Toyomi Uenoyama

IPC分类号： B65B1/04

CPC分类号： G05D7/0664 ,  Y10T137/7759 ,  Y10T137/7761

摘要： A method for supplying a specified quantity Q of processing gas while dividing at a desired flow rate ratio Q1/Q2 accurately and quickly from a gas supply facility equipped with a flow controller into a chamber. When a specified quantity Q of gas is supplied while being divided at a desired flow rate ratio Q1/Q2 from a gas supply facility equipped with a flow controller into a reduced pressure chamber C through a plurality of branch supply lines and shower plates fixed to the ends thereof, pressure type division quantity controllers FV1 and FV2 are provided in the plurality of branch supply lines GL1 and GL2. Opening control of both division quantity controllers FV1 and FV2 is started by an initial flow rate set signal from a division quantity control board FRC for fully opening the control valve CV of the pressure type division quantity controller having a higher flow rate and pressures P3′ and P3″ on the downstream side of the control valve CV are regulated thus supplying a total quantity Q=Q1+Q2 of gas while dividing into the chamber C through orifice holes (3a, 4a) made in shower plates (3, 4) at desired division quantities Q1 and Q2 represented by formulas Q1=C1P3′ and Q2=C2P3″ (where, C1 and C2 are constants dependent on the cross-sectional area of the orifice hole or the gas temperature on the upstream side thereof).

摘要翻译： 一种用于提供规定量的处理气体的方法，同时从装备有流量的气体供应设备精确而快速地分离所需流量比Q 1 / Q 2 2 控制器进入一个房间。 当从设置有流量控制器的气体供给设备以期望的流量比Q 1 / Q 2 2分配被指定量的气体供给时， 压力室C通过固定在其端部的多个分支供给管线和淋浴板，压力分离量控制器FV 1和FV 2 2设置在多个分支 供应线GL＆lt; 1＆gt;和GL＆gt; 2＆lt; 2＆gt ;. 通过来自分割量控制板FRC的初始流量设定信号开始两个分割量控制器FV 1和FV 2 2的打开控制，以完全打开控制阀CV 在控制阀CV的下游侧具有较高的流量和压力P 3 3和P 3 3“的压力型分配量控制器被调节，从而提供总计 数量Q = Q 1/2 + Q 2 2，同时通过在淋浴板（3,4）中制成的孔口（3a，4a）分成腔室C 由式Q 1表示的期望分割量Q 1和Q 2 2由下式表示：C 1＆lt; 1＆gt;＆lt; 3＆ /＆gt;和＆lt; 2＆gt; 2＆gt; 2＆lt; 3＆gt;＆lt; 3＆gt;（其中，C 1和C < SUB> 2 是取决于孔口的横截面积或其上游侧的气体温度的常数）。

公开(公告)号：US08162286B2

公开(公告)日：2012-04-24

申请号：US12593580

申请日：2008-03-13

申请人： Yohei Sawada ,  Kaoru Hirata ,  Ryosuke Dohi ,  Kouji Nishino ,  Nobukazu Ikeda

发明人： Yohei Sawada ,  Kaoru Hirata ,  Ryosuke Dohi ,  Kouji Nishino ,  Nobukazu Ikeda

IPC分类号： F16K31/02

CPC分类号： F16K31/007 ,  F16K7/14

摘要： Stable flow control is made possible even under high-temperature environments by relieving tensional force applied to a piezoelectric element when a piezoelectric actuator is retracted. Thus, a piezoelectric driven control valve includes: a body having a valve seat; a metal diaphragm to contact with and separate from the valve seat; an actuator box supported ascendably and descendably on the body; a split base fixed to the body; a disc spring pressing and urging the actuator box downward to bring the metal diaphragm into contact with the valve seat; and a piezoelectric actuator housed inside the actuator box and that extends upward with application of voltage to press the actuator box upward against the elastic force of the disc spring, and a precompression mechanism, for applying a compression force constantly to piezoelectric elements in the piezoelectric actuator, provided between the split base and the piezoelectric actuator.

摘要翻译： 即使在高温环境下，当压电致动器缩回时，通过减轻施加到压电元件的张力来实现稳定的流量控制。 因此，压电驱动控制阀包括：具有阀座的主体; 金属隔膜与阀座接触并分离; 一个致动器箱，可以上下方式支撑在主体上; 固定在身体上的分裂基座; 盘簧弹簧向下推动执行器箱，使金属隔膜与阀座接触; 以及压电致动器，其容纳在致动器箱内部并且通过施加电压向上延伸以克服盘簧的弹性力向上推动致动器盒;以及预压机构，用于将压缩力恒定地施加到压电致动器中的压电元件 ，设置在分离基座和压电致动器之间。

公开(公告)号：US20090009297A1

公开(公告)日：2009-01-08

申请号：US12154695

申请日：2008-05-27

申请人： Tsutomu Shinohara ,  Nobukazu Ikeda ,  Michio Yamaji ,  Toshio Doh ,  Kouji Nishino ,  Shinichi Ozaki ,  Toshihiro Matsumoto

发明人： Tsutomu Shinohara ,  Nobukazu Ikeda ,  Michio Yamaji ,  Toshio Doh ,  Kouji Nishino ,  Shinichi Ozaki ,  Toshihiro Matsumoto

IPC分类号： H04Q5/22

CPC分类号： H04Q9/00 ,  F16K37/0083 ,  H04Q2209/47

摘要： The present invention provides a system for recording valve actuation information that enables to figure out the actual operation condition of each individual valve without checking plural valves individually, and the valves do not have to be wired, and the structure of the system is simple.The present invention is a system for recording valve actuation information comprising a valve, detecting means for detecting actuation of said valve, a RFID tag affixed to said valve and recording the valve actuation information detected by said detecting means, and a terminal for reading out the valve actuation information detected by said detecting means, wherein said RFID tag searches said terminal by intermittently transmitting a radio wave, wherein said RFID tag transfers the valve actuation information recorded in said RFID tag to said terminal when said RFID tag detects said terminal.

摘要翻译： 本发明提供一种用于记录阀致动信息的系统，其能够在不单独检查多个阀的情况下确定每个单独阀的实际操作状态，并且阀不必被布线，并且系统的结构简单。 本发明是一种用于记录阀致动信息的系统，包括阀，用于检测所述阀的致动的检测装置，固定到所述阀上的RFID标签和记录由所述检测装置检测的阀致动信息，以及用于读出 由所述检测装置检测的阀致动信息，其中所述RFID标签通过间歇地发送无线电波来搜索所述终端，其中当所述RFID标签检测到所述终端时，所述RFID标签将记录在所述RFID标签中的阀致动信息传送到所述终端。