公开(公告)号：US07059363B2

公开(公告)日：2006-06-13

申请号：US10495641

申请日：2003-01-20

申请人： Kazuhiko Sugiyama ,  Nobukazu Ikeda ,  Kouji Nishino ,  Ryosuke Dohi ,  Toyomi Uenoyama

发明人： Kazuhiko Sugiyama ,  Nobukazu Ikeda ,  Kouji Nishino ,  Ryosuke Dohi ,  Toyomi Uenoyama

IPC分类号： B65B1/04

CPC分类号： G05D7/0664 ,  Y10T137/7759 ,  Y10T137/7761

摘要： A method for supplying a specified quantity Q of processing gas while dividing at a desired flow rate ratio Q1/Q2 accurately and quickly from a gas supply facility equipped with a flow controller into a chamber. When a specified quantity Q of gas is supplied while being divided at a desired flow rate ratio Q1/Q2 from a gas supply facility equipped with a flow controller into a reduced pressure chamber C through a plurality of branch supply lines and shower plates fixed to the ends thereof, pressure type division quantity controllers FV1 and FV2 are provided in the plurality of branch supply lines GL1 and GL2. Opening control of both division quantity controllers FV1 and FV2 is started by an initial flow rate set signal from a division quantity control board FRC for fully opening the control valve CV of the pressure type division quantity controller having a higher flow rate and pressures P3′ and P3″ on the downstream side of the control valve CV are regulated thus supplying a total quantity Q=Q1+Q2 of gas while dividing into the chamber C through orifice holes (3a, 4a) made in shower plates (3, 4) at desired division quantities Q1 and Q2 represented by formulas Q1=C1P3′ and Q2=C2P3″ (where, C1 and C2 are constants dependent on the cross-sectional area of the orifice hole or the gas temperature on the upstream side thereof).

摘要翻译： 一种用于提供规定量的处理气体的方法，同时从装备有流量的气体供应设备精确而快速地分离所需流量比Q 1 / Q 2 2 控制器进入一个房间。 当从设置有流量控制器的气体供给设备以期望的流量比Q 1 / Q 2 2分配被指定量的气体供给时， 压力室C通过固定在其端部的多个分支供给管线和淋浴板，压力分离量控制器FV 1和FV 2 2设置在多个分支 供应线GL＆lt; 1＆gt;和GL＆gt; 2＆lt; 2＆gt ;. 通过来自分割量控制板FRC的初始流量设定信号开始两个分割量控制器FV 1和FV 2 2的打开控制，以完全打开控制阀CV 在控制阀CV的下游侧具有较高的流量和压力P 3 3和P 3 3“的压力型分配量控制器被调节，从而提供总计 数量Q = Q 1/2 + Q 2 2，同时通过在淋浴板（3,4）中制成的孔口（3a，4a）分成腔室C 由式Q 1表示的期望分割量Q 1和Q 2 2由下式表示：C 1＆lt; 1＆gt;＆lt; 3＆ /＆gt;和＆lt; 2＆gt; 2＆gt; 2＆lt; 3＆gt;＆lt; 3＆gt;（其中，C 1和C < SUB> 2 是取决于孔口的横截面积或其上游侧的气体温度的常数）。

公开(公告)号：US20110094596A1

公开(公告)日：2011-04-28

申请号：US10561514

申请日：2004-06-10

申请人： Kazuhiko Sugiyama ,  Nobukazu Ikeda ,  Kouji Nishino ,  Ryousuke Dohi ,  Toyomi Uenoyama

发明人： Kazuhiko Sugiyama ,  Nobukazu Ikeda ,  Kouji Nishino ,  Ryousuke Dohi ,  Toyomi Uenoyama

IPC分类号： F15D1/00 ,  F16K31/02

CPC分类号： G05D7/00 ,  G05D7/0623 ,  G05D7/0652 ,  G05D7/0658 ,  G05D7/0664 ,  G05D11/132 ,  Y10T137/0379 ,  Y10T137/0396 ,  Y10T137/2521 ,  Y10T137/2529 ,  Y10T137/2562 ,  Y10T137/263 ,  Y10T137/2663 ,  Y10T137/7761 ,  Y10T137/8175

摘要： The present-invention supplies a quantity Q of gas while dividing at flow rate ratio Q1/Q2 from a gas supply facility equipped with a flow controller. A a total quantity Q=Q1+Q2 of gas is supplied into a chamber at flow rate Q1 and Q2 through shower plates fixed to ends of branch supply lines by providing open/close valves with a plurality of branch supply lines GL1 and GL2, respectively, to supply the specified quantity of gas from the gas supply facility, and by utilizing bypass line BL1 on the downstream side of the open/close valve OV1 and branched from GL1, bypass line BL2 on the downstream side of the open/close valve OV2 and branched from GL2, pressure type division quantity controller connected to the bypass line BL1 and the bypass line BL2, sensor measuring pressure inside branch supply line GL1, and another sensor measuring pressure inside branch supply line GL2.

摘要翻译： 本发明提供一种气体量Q，同时以具有流量控制器的气体供给设备的流量比Q1 / Q2分压。 通过分别提供多个分支供电线GL1和GL2的开/关阀，将总量Q = Q1 + Q2的气体以流量Q1和Q2供给到固定到分支供应管线端部的喷淋板 为了从气体供给装置供给规定量的气体，并且通过在开/关阀OV1的下游侧利用旁路管路BL1从GL1分支，在开/关阀OV2的下游侧的旁通管线BL2 从GL2分支，连接到旁路线BL1和旁路线BL2的压力分型量控制器，分支供给线GL1内的传感器测量压力，以及测量分支供给线GL2内的压力的另一传感器。

公开(公告)号：US06848470B2

公开(公告)日：2005-02-01

申请号：US10775104

申请日：2004-02-11

申请人： Tadahiro Ohmi ,  Satoshi Kagatsume ,  Kazuhiko Sugiyama ,  Yukio Minami ,  Kouji Nishino ,  Ryousuke Dohi ,  Katsunori Yonehana ,  Nobukazu Ikeda ,  Michio Yamaji ,  Jun Hirose ,  Kazuo Fukazawa ,  Hiroshi Koizumi ,  Hideki Nagaoka ,  Akihiro Morimoto ,  Tomio Uno ,  Eiji Ideta ,  Atsushi Matsumoto ,  Toyomi Uenoyama ,  Takashi Hirose

发明人： Tadahiro Ohmi ,  Satoshi Kagatsume ,  Kazuhiko Sugiyama ,  Yukio Minami ,  Kouji Nishino ,  Ryousuke Dohi ,  Katsunori Yonehana ,  Nobukazu Ikeda ,  Michio Yamaji ,  Jun Hirose ,  Kazuo Fukazawa ,  Hiroshi Koizumi ,  Hideki Nagaoka ,  Akihiro Morimoto ,  Tomio Uno ,  Eiji Ideta ,  Atsushi Matsumoto ,  Toyomi Uenoyama ,  Takashi Hirose

IPC分类号： G05D7/06

CPC分类号： G05D7/0658 ,  G05D7/0664 ,  Y10S438/935 ,  Y10T137/0396 ,  Y10T137/7759 ,  Y10T137/7761 ,  Y10T137/86389 ,  Y10T137/87877 ,  Y10T137/87917

摘要： A fluid supply apparatus with a plurality of flow lines branching out from one pressure regulator with the flow lines arranged in parallel and constructed so that opening or closing one flow passage will have no transient effect on the steady flow of the other flow passages. Each flow passage is provided with a time delay-type mass flow controller MFC so that when one closed fluid passage is opened, the mass flow controller on that flow passage reaches a set flow rate Qs in a specific delay time Δt from the starting point.The invention includes a method and an apparatus in which a plurality of gas types can be controlled in flow rate with high precision by one pressure-type flow control system.

摘要翻译： 一种流体供给装置，具有从一个压力调节器分支出的多个流动管线，流动线平行布置并构造成使得打开或关闭一个流动通道对其它流动通道的稳定流动将没有暂时的影响。 每个流路设置有时间延迟型质量流量控制器MFC，使得当一个封闭流体通道打开时，该流路上的质量流量控制器在起始点处以特定延迟时间Deltat达到设定流量Qs。 本发明包括通过一个压力式流量控制系统以高精度控制多种气体类型的方法和装置。

公开(公告)号：US20050005994A1

公开(公告)日：2005-01-13

申请号：US10495641

申请日：2003-01-20

申请人： Kazuhiko Sugiyama ,  Nobukazu Ikeda ,  Kouji Nishino ,  Ryousuke Dohi ,  Toyomi Uenoyama

发明人： Kazuhiko Sugiyama ,  Nobukazu Ikeda ,  Kouji Nishino ,  Ryousuke Dohi ,  Toyomi Uenoyama

IPC分类号： H01L21/205 ,  G05D7/06 ,  B67C3/00

CPC分类号： G05D7/0664 ,  Y10T137/7759 ,  Y10T137/7761

摘要： A method for supplying a specified quantity Q of processing gas while dividing at a desired flow rate ratio Q1/Q2 accurately and quickly from a gas supply facility equipped with a flow controller into a chamber. When a specified quantity Q of gas is supplied while being divided at a desired flow rate ratio Q1/Q2 from a gas supply facility equipped with a flow controller into a reduced pressure chamber C through a plurality of branch supply lines and shower plates fixed to the ends thereof, pressure type division quantity controllers FV1 and FV2 are provided in the plurality of branch supply lines GL1 and GL2. Opening control of both division quantity controllers FV1 and FV2 is started by an initial flow rate set signal from a division quantity control board FRC for fully opening the control valve CV of the pressure type division quantity controller having a higher flow rate and pressures P3′ and P3″ on the downstream side of the control valve CV are regulated thus supplying a total quantity Q=Q1+Q2 of gas while dividing into the chamber C through orifice holes (3a, 4a) made in shower plates (3, 4) at desired division quantities Q1 and Q2 represented by formulas Q1=C1P3′ and Q2=C2P3″ (where, C1 and C2 are constants dependent on the cross-sectional area of the orifice hole or the gas temperature on the upstream side thereof).

摘要翻译： 一种用于在从配备有流量控制器的气体供给设备进入腔室的情况下，以期望的流量比Q1 / Q2精确而快速地分配处理气体的规定量Q的方法。 当通过多个分支供应管线和固定到所述流体控制器的淋浴板以期望的流量比Q1 / Q2从装备有流量控制器的气体供应设备分配到减压室C中时，供应指定量的气体 在多个分支供给线GL1和GL2中设置有压力分离量控制器FV1和FV2。 通过来自分割量控制板FRC的初始流量设定信号来开始分控数量控制器FV1和FV2的打开控制，以完全打开具有较高流量和压力P3'的压力型分配量控制器的控制阀CV，并且 在控制阀CV的下游侧的P3“被调节，从而通过在淋浴板（3,4）上形成的喷孔（3a，4a）分隔成室C，从而提供气体的总量Q = Q1 + Q2， 由公式Q1 = C1P3'和Q2 = C2P3“表示的期望分割量Q1和Q2（其中C1和C2是取决于孔口的横截面面积或其上游侧的气体温度的常数）。

公开(公告)号：US06820632B2

公开(公告)日：2004-11-23

申请号：US10162552

申请日：2002-06-06

申请人： Tadahiro Ohmi ,  Satoshi Kagatsume ,  Kazuhiko Sugiyama ,  Yukio Minami ,  Kouji Nishino ,  Ryousuke Dohi ,  Katsunori Yonehana ,  Nobukazu Ikeda ,  Michio Yamaji ,  Jun Hirose ,  Kazuo Fukazawa ,  Hiroshi Koizumi ,  Hideki Nagaoka ,  Akihiro Morimoto ,  Tomio Uno ,  Eiji Ideta ,  Atsushi Matsumoto ,  Toyomi Uenoyama ,  Takashi Hirose

发明人： Tadahiro Ohmi ,  Satoshi Kagatsume ,  Kazuhiko Sugiyama ,  Yukio Minami ,  Kouji Nishino ,  Ryousuke Dohi ,  Katsunori Yonehana ,  Nobukazu Ikeda ,  Michio Yamaji ,  Jun Hirose ,  Kazuo Fukazawa ,  Hiroshi Koizumi ,  Hideki Nagaoka ,  Akihiro Morimoto ,  Tomio Uno ,  Eiji Ideta ,  Atsushi Matsumoto ,  Toyomi Uenoyama ,  Takashi Hirose

IPC分类号： G05D706

CPC分类号： G05D7/0658 ,  G05D7/0664 ,  Y10S438/935 ,  Y10T137/0396 ,  Y10T137/7759 ,  Y10T137/7761 ,  Y10T137/86389 ,  Y10T137/87877 ,  Y10T137/87917

摘要： A fluid supply apparatus with a plurality of flow lines branching out from one pressure regulator with the flow lines arranged in parallel and constructed so that opening or closing one flow passage will have no transient effect on the steady flow of the other flow passages. Each flow passage is provided with a time delay-type mass flow controller MFC so that when one closed fluid passage is opened, the mass flow controller on that flow passage reaches a set flow rate Qs in a specific delay time At from the starting point. The invention includes a method and an apparatus in which a plurality of gas types can be controlled in flow rate with high precision by one pressure-type flow control system.

摘要翻译： 一种流体供给装置，具有从一个压力调节器分支出的多个流动管线，流动线平行布置并构造成使得打开或关闭一个流动通道对其它流动通道的稳定流动将没有暂时的影响。 每个流路设置有时间延迟型质量流量控制器MFC，使得当一个封闭流体通道打开时，该流路上的质量流量控制器在起始点处达到特定延迟时间At的设定流量Qs。 本发明包括通过一个压力式流量控制系统以高精度控制多种气体类型的方法和装置。

公开(公告)号：US06422264B1

公开(公告)日：2002-07-23

申请号：US09734640

申请日：2000-12-13

申请人： Tadahiro Ohmi ,  Satoshi Kagatsume ,  Kazuhiko Sugiyama ,  Yukio Minami ,  Kouji Nishino ,  Ryousuke Dohi ,  Katsunori Yonehana ,  Nobukazu Ikeda ,  Michio Yamaji ,  Jun Hirose ,  Kazuo Fukazawa ,  Hiroshi Koizumi ,  Hideki Nagaoka ,  Akihiro Morimoto ,  Tomio Uno ,  Eiji Ideta ,  Atsushi Matsumoto ,  Toyomi Uenoyama ,  Takashi Hirose

发明人： Tadahiro Ohmi ,  Satoshi Kagatsume ,  Kazuhiko Sugiyama ,  Yukio Minami ,  Kouji Nishino ,  Ryousuke Dohi ,  Katsunori Yonehana ,  Nobukazu Ikeda ,  Michio Yamaji ,  Jun Hirose ,  Kazuo Fukazawa ,  Hiroshi Koizumi ,  Hideki Nagaoka ,  Akihiro Morimoto ,  Tomio Uno ,  Eiji Ideta ,  Atsushi Matsumoto ,  Toyomi Uenoyama ,  Takashi Hirose

IPC分类号： G05D706

摘要： A fluid supply apparatus with a plurality of flow lines branching out from one pressure regulator with the flow lines arranged in parallel and constructed so that opening or closing one flow passage will have no transient effect on the steady flow of the other flow passages. Each flow passage is provided with a time delay-type mass flow controller MFC so that when one closed fluid passage is opened, the mass flow controller on that flow passage reaches a set flow rate Qs in a specific delay time &Dgr;t from the starting point. The invention includes a method and an apparatus in which a plurality of gas types can be controlled in flow rate with high precision by one pressure-type flow control system.

公开(公告)号：US07669455B2

公开(公告)日：2010-03-02

申请号：US10561602

申请日：2004-06-10

申请人： Tadahiro Ohmi ,  Kazuhiko Sugiyama ,  Shoichi Hino ,  Eiji Takahashi ,  Makoto Saegusa ,  Nobukazu Ikeda ,  Kouji Nishino ,  Ryousuke Dohi ,  Toyomi Uenoyama ,  Katsuyuki Sugita

发明人： Tadahiro Ohmi ,  Kazuhiko Sugiyama ,  Shoichi Hino ,  Eiji Takahashi ,  Makoto Saegusa ,  Nobukazu Ikeda ,  Kouji Nishino ,  Ryousuke Dohi ,  Toyomi Uenoyama ,  Katsuyuki Sugita

IPC分类号： G01F19/00

CPC分类号： G01L19/02 ,  G01L9/065 ,  G01L19/0023 ,  G05D7/0635

摘要： The invention provides an automatic zero point correction device that includes a pressure sensor, wherein output from the sensor is outputted and the sensor output is inputted to a time-varying zero point drift correction means of the sensor; a sensor output judgement means of the time-varying zero point drift correction means, wherein the sensor output judgement means operates to make a judgement determining whether the sensor output is larger than a set value; and operating condition judgement means of the time-varying zero point drift correction means, wherein the operating condition judgement means judges operating conditions of the sensor, wherein the time-varying zero point drift correction means operates to cancel time-varying zero point drift of the sensor when the sensor output judgement means determines sensor output is larger than the set value and the operating condition judgement means determines operating conditions of the sensor are within previously set operating conditions.

摘要翻译： 本发明提供了一种自动零点校正装置，其包括压力传感器，其中输出来自传感器的输出，并且传感器输出被输入到传感器的时变零点漂移校正装置; 时变零点漂移校正装置的传感器输出判断装置，其中传感器输出判断装置进行判断，判断传感器输出是否大于设定值; 以及时变零点漂移校正装置的操作条件判断装置，其中操作条件判断装置判断传感器的操作条件，其中时变零点漂移校正装置操作以消除时变零点漂移校正装置的时变零点漂移 传感器输出判断装置确定传感器输出大于设定值，并且操作条件判断装置确定传感器的操作条件在预先设定的操作条件下。

公开(公告)号：US08496022B2

公开(公告)日：2013-07-30

申请号：US10561514

申请日：2004-06-10

申请人： Kazuhiko Sugiyama ,  Nobukazu Ikeda ,  Kouji Nishino ,  Ryousuke Dohi ,  Toyomi Uenoyama

发明人： Kazuhiko Sugiyama ,  Nobukazu Ikeda ,  Kouji Nishino ,  Ryousuke Dohi ,  Toyomi Uenoyama

IPC分类号： G05D11/13

CPC分类号： G05D7/00 ,  G05D7/0623 ,  G05D7/0652 ,  G05D7/0658 ,  G05D7/0664 ,  G05D11/132 ,  Y10T137/0379 ,  Y10T137/0396 ,  Y10T137/2521 ,  Y10T137/2529 ,  Y10T137/2562 ,  Y10T137/263 ,  Y10T137/2663 ,  Y10T137/7761 ,  Y10T137/8175

摘要： The invention supplies a quantity Q of gas while dividing at flow rate ratio Q1/Q2 from a gas supply facility equipped with a flow controller. A total quantity Q=Q1+Q2 of gas is supplied into a chamber at flow rate Q1 and Q2 through shower plates fixed to ends of branch supply lines by providing open/close valves with a plurality of branch supply lines GL1 and GL2, respectively, to supply the specified quantity of gas from the gas supply facility, and by utilizing bypass line BL1 on the downstream side of the open/close valve OV1 and branched from GL1 ,bypass line BL2 on the downstream side of the open/close valve OV2 and branched from GL2 ,pressure type division quantity controller connected to the bypass line BL1 and the bypass line BL2 ,a sensor measuring pressure inside branch supply line GL1 ,and another sensor measuring pressure inside branch supply line GL2.

摘要翻译： 本发明提供一种气体量Q，同时以具有流量控制器的气体供给设备的流量比Q1 / Q2分压。 通过分别提供具有多个分支供应线GL1和GL2的开闭阀将气体的总量Q = Q1 + Q2以流量Q1和Q2供给到固定到分支供应管线的端部的喷淋板， 从气体供给装置供给规定量的气体，通过在开/关阀OV1的下游侧利用旁路管线BL1，从开关阀OV2的下游侧的GL1分支的旁通管线BL2， 从GL2分支，连接到旁路线BL1和旁路线BL2的压力分型量控制器，测量分支供给线GL1内的压力的传感器和测量分支供给线GL2内的压力的另一传感器。

公开(公告)号：US20070151321A1

公开(公告)日：2007-07-05

申请号：US10561602

申请日：2004-06-10

申请人： Tadahiro Ohmi ,  Kazuhiko Sugiyama ,  Shoichi Hino ,  Eiji Takahashi ,  Makoto Saegusa ,  Nobukazu Ikeda ,  Kouji Nishino ,  Ryousuke Dohi ,  Toyomi Uenoyama ,  Katsuyuki Sugita

发明人： Tadahiro Ohmi ,  Kazuhiko Sugiyama ,  Shoichi Hino ,  Eiji Takahashi ,  Makoto Saegusa ,  Nobukazu Ikeda ,  Kouji Nishino ,  Ryousuke Dohi ,  Toyomi Uenoyama ,  Katsuyuki Sugita

IPC分类号： G01L27/00 ,  G01F25/00

CPC分类号： G01L19/02 ,  G01L9/065 ,  G01L19/0023 ,  G05D7/0635

摘要： The invention provides an automatic zero point correction device that includes a pressure sensor, wherein output from the sensor is outputted and the sensor output is inputted to a time-varying zero point drift correction means of the sensor; a sensor output judgement means of the time-varying zero point drift correction means, wherein the sensor output judgement means operates to make a judgement determining whether the sensor output is larger than a set value; and operating condition judgement means of the time-varying zero point drift correction means, wherein the operating condition judgement means judges operating conditions of the sensor, wherein the time-varying zero point drift correction means operates to cancel time-varying zero point drift of the sensor when the sensor output judgement means determines sensor output is larger than the set value and the operating condition judgement means determines operating conditions of the sensor are within previously set operating conditions.

摘要翻译： 本发明提供了一种自动零点校正装置，其包括压力传感器，其中输出来自传感器的输出，并且传感器输出被输入到传感器的时变零点漂移校正装置; 时变零点漂移校正装置的传感器输出判断装置，其中传感器输出判断装置进行判断，判断传感器输出是否大于设定值; 以及时变零点漂移校正装置的操作条件判断装置，其中操作条件判断装置判断传感器的操作条件，其中时变零点漂移校正装置操作以消除时变零点漂移校正装置的时变零点漂移 传感器输出判断装置确定传感器输出大于设定值，并且操作条件判断装置确定传感器的操作条件在预先设定的操作条件下。

公开(公告)号：US08162286B2

公开(公告)日：2012-04-24

申请号：US12593580

申请日：2008-03-13

申请人： Yohei Sawada ,  Kaoru Hirata ,  Ryosuke Dohi ,  Kouji Nishino ,  Nobukazu Ikeda

发明人： Yohei Sawada ,  Kaoru Hirata ,  Ryosuke Dohi ,  Kouji Nishino ,  Nobukazu Ikeda

IPC分类号： F16K31/02

CPC分类号： F16K31/007 ,  F16K7/14

摘要： Stable flow control is made possible even under high-temperature environments by relieving tensional force applied to a piezoelectric element when a piezoelectric actuator is retracted. Thus, a piezoelectric driven control valve includes: a body having a valve seat; a metal diaphragm to contact with and separate from the valve seat; an actuator box supported ascendably and descendably on the body; a split base fixed to the body; a disc spring pressing and urging the actuator box downward to bring the metal diaphragm into contact with the valve seat; and a piezoelectric actuator housed inside the actuator box and that extends upward with application of voltage to press the actuator box upward against the elastic force of the disc spring, and a precompression mechanism, for applying a compression force constantly to piezoelectric elements in the piezoelectric actuator, provided between the split base and the piezoelectric actuator.

摘要翻译： 即使在高温环境下，当压电致动器缩回时，通过减轻施加到压电元件的张力来实现稳定的流量控制。 因此，压电驱动控制阀包括：具有阀座的主体; 金属隔膜与阀座接触并分离; 一个致动器箱，可以上下方式支撑在主体上; 固定在身体上的分裂基座; 盘簧弹簧向下推动执行器箱，使金属隔膜与阀座接触; 以及压电致动器，其容纳在致动器箱内部并且通过施加电压向上延伸以克服盘簧的弹性力向上推动致动器盒;以及预压机构，用于将压缩力恒定地施加到压电致动器中的压电元件 ，设置在分离基座和压电致动器之间。