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91.发明授权公开(公告)号：US07572528B2
公开(公告)日：2009-08-11
申请号：US11135258
申请日：2005-05-24
CPC分类号： B82Y10/00 , G11B5/012 , G11B5/72 , G11B5/743 , G11B5/82 , G11B5/855 , G11B2005/0029 , Y10T428/1164
摘要： A magnetic recording medium is obtained by easily patterning a magnetic recording layer without deteriorating its electromagnetic conversion characteristics, by forming a silicon-based protective film between the magnetic recording layer and a photoresist, and performing dry etching and oxygen plasma processing.
摘要翻译： 通过在磁记录层和光致抗蚀剂之间形成硅基保护膜，进行干法蚀刻和氧等离子体处理，可以通过在不损害其电磁转换特性的情况下容易地构图磁记录层而获得磁记录介质。
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92.发明申请公开(公告)号：US20070211592A1
公开(公告)日：2007-09-13
申请号：US11691774
申请日：2007-03-27
CPC分类号： G11B5/82 , B82Y10/00 , G11B5/743 , G11B5/746 , G11B5/865 , G11B2005/0002 , Y10S977/887 , Y10T29/49069
摘要： An imprint stamper for manufacturing a recording medium includes a first transfer region which corresponds to a servo region of a recording medium using a sector servo system and has a pattern with a plurality of quadrilateral recess or protrusion portions formed in a surface thereof, and a second transfer region which corresponds to a data region of the recording medium and has a pattern with a plurality of dots of recess or protrusion portions arrayed in a form of a hexagonal lattice in a surface thereof.
摘要翻译： 用于制造记录介质的压印模具包括对应于使用扇区伺服系统的记录介质的伺服区域的第一传送区域，并且具有形成在其表面中的多个四边形凹部或突出部分的图案，第二传送区域 转印区域对应于记录介质的数据区域，并且具有在其表面上排列成六角形格子形状的多个凹点或突起部分的图案。
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公开(公告)号：US20060280861A1
公开(公告)日：2006-12-14
申请号：US11406502
申请日：2006-04-19
CPC分类号： G11B5/855
摘要： A method for producing a magnetic recording medium, includes: forming an SOG film on a surface of a magnetic layer; forming a concavo-convex structure in the SOG film comprising one selected from a group consisting of silica glass, alkylsiloxane polymer, methyl silsesquioxane polymer, hydrogen silsesquioxane polymer and hydro alkylsiloxane polymer; etching the SOG film to expose the surface of the magnetic layer; etching the exposed surface of the magnetic layer by ion milling; and forming a filling layer on the surface of the magnetic layer while leaving a portion of the magnetic layer having been subjected to the ion milling.
摘要翻译： 一种制造磁记录介质的方法，包括：在磁性层的表面上形成SOG膜; 在SOG膜中形成凹凸结构，其包含选自二氧化硅玻璃，烷基硅氧烷聚合物，甲基倍半硅氧烷聚合物，氢倍半硅氧烷聚合物和氢烷基硅氧烷聚合物的一种; 蚀刻SOG膜以暴露磁性层的表面; 通过离子研磨蚀刻磁性层的暴露表面; 并且在磁性层的表面上形成填充层，同时留下已经进行离子铣削的磁性层的一部分。
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94.发明授权Method for manufacturing magnetic recording medium and magnetic recording medium 失效磁记录介质和磁记录介质的制造方法公开(公告)号：US08475949B2
公开(公告)日：2013-07-02
申请号：US13236726
申请日：2011-09-20
IPC分类号： G11B5/66
摘要： A magnetic recording medium is presented that includes protruded magnetic patterns formed on a substrate, and a nonmagnetic material filled in recesses between the magnetic patterns in which an oxygen concentration thereof is higher at a surface side than at a substrate side. The nonmagnetic material is at least one selected from the group consisting of Si, SiC, SiC—C, SiOC, SiON, Si3N4, Al, AlxOy, Ti and TiOx.
摘要翻译： 提出了一种磁记录介质，其包括形成在基板上的突出的磁图案，以及填充在表面侧的氧浓度高于基板侧的磁性图案之间的凹部中的非磁性材料。 非磁性材料是选自Si，SiC，SiC-C，SiOC，SiON，Si 3 N 4，Al，Al x O y，Ti和TiO x中的至少一种。
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公开(公告)号：US20120028076A1
公开(公告)日：2012-02-02
申请号：US13175485
申请日：2011-07-01
CPC分类号： G11B5/8404 , G11B5/746 , G11B5/82 , G11B5/855 , Y10T428/11
摘要： According to one embodiment, a magnetic recording medium includes a substrate, a soft magnetic layer, an underlayer, a magnetic recording layer, and a protective layer, wherein the magnetic recording layer is provided with a pattern including recording portions and non-recording portions, the non-recording portions have a composition that is equal to a composition obtained by demagnetizing the recording portions, the non-recording portions contain at least one metal element selected from the group consisting of vanadium and zirconium and at least one element selected from the group consisting of nitrogen, carbon, boron and oxygen, and the at least one element selected from the group consisting of nitrogen, carbon, boron and oxygen is contained in the non-recording portions at a higher content than the content of the at least one element selected from the group consisting of nitrogen, carbon, boron and oxygen in the recording portions.
摘要翻译： 根据一个实施例，磁记录介质包括衬底，软磁层，底层，磁记录层和保护层，其中磁记录层设置有包括记录部分和非记录部分的图案， 非记录部分的组成等于通过使记录部分退磁获得的组合物，非记录部分含有至少一种选自钒和锆的金属元素和至少一种选自组中的元素 由氮，碳，硼和氧组成，并且所述至少一种选自氮，碳，硼和氧的元素以比所述至少一种元素的含量更高的含量包含在非记录部分中 在记录部分中选自氮，碳，硼和氧。
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公开(公告)号：US08012361B2
公开(公告)日：2011-09-06
申请号：US12705421
申请日：2010-02-12
IPC分类号： B44C1/22
摘要： According to one embodiment, a method of manufacturing a magnetic recording medium includes forming a first hard mask, a second hard mask and a resist on a magnetic recording layer, imprinting a stamper to the resist to transfer patterns of protrusions and recesses to the resist, removing residues remaining in the recesses of the patterned resist, etching the second hard mask by using the patterned resist as a mask to transfer the patterns of protrusions and recesses to the second hard mask, etching the first hard mask by using the second hard mask as a mask to transfer the patterns of protrusions and recesses to the first hard mask, removing the second hard mask remaining on the protrusions of the first hard mask, and deactivating the magnetic recording layer exposed in the recesses by means of ion beam irradiation.
摘要翻译： 根据一个实施例，一种制造磁记录介质的方法包括在磁记录层上形成第一硬掩模，第二硬掩模和抗蚀剂，将压模压印到抗蚀剂上，以将凹凸图案转印到抗蚀剂上， 去除残留在图案化抗蚀剂的凹部中的残留物，通过使用图案化抗蚀剂作为掩模蚀刻第二硬掩模以将突起和凹陷的图案转移到第二硬掩模，通过使用第二硬掩模蚀刻第一硬掩模 用于将突起和凹陷的图案转移到第一硬掩模的掩模，去除残留在第一硬掩模的突起上的第二硬掩模，以及通过离子束照射去除在凹部中暴露的磁记录层。
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公开(公告)号：US08002997B2
公开(公告)日：2011-08-23
申请号：US12544606
申请日：2009-08-20
IPC分类号： B44C1/22
摘要： According to one embodiment, a method of manufacturing a magnetic recording medium includes forming a resist on a magnetic recording layer, imprinting a stamper to the resist to transfer patterns of protrusions and recesses, and partially etching the magnetic recording layer in areas not covered with patterns of the resist used as masks by ion beam etching using a mixed gas of He and N2 as well as modifying a remainder of the magnetic recording layer to leave behind a nonmagnetic layer having a reduced thickness.
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98.发明申请Patterned media and method of manufacturing the same, and magnetic recording apparatus 有权图案化介质及其制造方法，以及磁记录装置公开(公告)号：US20100302679A1
公开(公告)日：2010-12-02
申请号：US12805471
申请日：2010-08-02
CPC分类号： G11B5/82 , B82Y10/00 , G11B5/59655 , G11B5/743 , G11B5/855
摘要： A patterned media has a substrate, and a magnetic recording layer on the substrate including protruded magnetic patterns and a nonmagnetic material filled in between the protruded magnetic patterns. In the patterned media, a depth Db and a depth Da, which are defined that Db is a depth from a surface of the magnetic patterns to a surface of the nonmagnetic material filled in a first central part between the magnetic patterns adjacent to each other in a cross-track direction or a down-track direction, and Da is a depth from a surface of the magnetic patterns to a surface of the nonmagnetic material filled in a second central part in a portion surrounded by the magnetic patterns, have a relationship that the depth Da is greater than the depth Db.
摘要翻译： 图案化介质具有基板，并且在基板上的磁记录层包括突出的磁图案和填充在突出磁图案之间的非磁性材料。 在图案化介质中，深度Db和深度Da被定义为Db是从磁图案的表面到填充在彼此相邻的磁图案之间的第一中心部分的非磁性材料的表面的深度 交叉轨道方向或向下轨道方向，并且Da是从磁图案的表面到填充在由磁图案包围的部分中的第二中心部分中的非磁性材料的表面的深度，具有如下关系： 深度Da大于深度Db。
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公开(公告)号：US20100214695A1
公开(公告)日：2010-08-26
申请号：US12705490
申请日：2010-02-12
摘要： According to one embodiment, a method of manufacturing a magnetic recording medium includes forming a first hard mask, a second hard mask and a resist on a magnetic recording layer, imprinting a stamper to the resist to transfer patterns of protrusions and recesses to the resist, removing residues remaining in the recesses of the patterned resist by means of a first etching gas, etching the second hard mask by means of the first etching gas using the patterned resist as a mask to transfer the patterns to the second hard mask, etching the first hard mask by means of a second etching gas different from the first etching gas using the second hard mask as a mask to transfer the patterns to the first hard mask, and performing ion beam etching in order to deactivate the magnetic recording layer exposed in the recesses and to remove the second hard mask.
摘要翻译： 根据一个实施例，一种制造磁记录介质的方法包括在磁记录层上形成第一硬掩模，第二硬掩模和抗蚀剂，将压模压印到抗蚀剂上，以将凹凸图案转印到抗蚀剂上， 通过第一蚀刻气体去除残留在图案化抗蚀剂的凹部中的残留物，利用第一蚀刻气体，使用图案化抗蚀剂作为掩模蚀刻第二硬掩模，以将图案转移到第二硬掩模，蚀刻第一 通过不同于使用第二硬掩模的第一蚀刻气体作为掩模的第二蚀刻气体将硬掩模转印到第一硬掩模，并且执行离子束蚀刻以使暴露在凹部中的磁记录层失活 并移除第二个硬掩模。
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公开(公告)号：US07662264B2
公开(公告)日：2010-02-16
申请号：US11406502
申请日：2006-04-19
IPC分类号： C23C14/34
CPC分类号： G11B5/855
摘要： A method for producing a magnetic recording medium, includes: forming an SOG film on a surface of a magnetic layer; forming a concavo-convex structure in the SOG film comprising one selected from a group consisting of silica glass, alkylsiloxane polymer, methyl silsesquioxane polymer, hydrogen silsesquioxane polymer and hydro alkylsiloxane polymer; etching the SOG film to expose the surface of the magnetic layer; etching the exposed surface of the magnetic layer by ion milling; and forming a filling layer on the surface of the magnetic layer while leaving a portion of the magnetic layer having been subjected to the ion milling.
摘要翻译： 一种制造磁记录介质的方法，包括：在磁性层的表面上形成SOG膜; 在SOG膜中形成凹凸结构，其包含选自二氧化硅玻璃，烷基硅氧烷聚合物，甲基倍半硅氧烷聚合物，氢倍半硅氧烷聚合物和氢烷基硅氧烷聚合物的一种; 蚀刻SOG膜以暴露磁性层的表面; 通过离子研磨蚀刻磁性层的暴露表面; 并且在磁性层的表面上形成填充层，同时留下已经进行离子铣削的磁性层的一部分。
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