Input/output valve switching apparatus of semiconductor manufacturing system
    93.
    发明申请
    Input/output valve switching apparatus of semiconductor manufacturing system 失效
    半导体制造系统的输入/输出阀开关装置

    公开(公告)号:US20030010450A1

    公开(公告)日:2003-01-16

    申请号:US10131239

    申请日:2002-04-25

    IPC分类号: C23F001/00 C23C016/00

    摘要: An input/output valve switching apparatus of a semiconductor manufacturing system minimizes a vibration set up while operating an input/output valve for opening and closing a wafer-transfer passage that connects chambers of the system. The switching apparatus includes a valve actuator having a close port and an open port, a first fluid line connected to the close port, a second fluid line connected to the open port, first flow regulators installed in the first and second fluid lines, respectively, to regulate the flow rate of fluid, and second fluid flow regulators installed in the first and second fluid lines to regulate the flow rate of the fluid that has passed. The second fluid flow regulators can prevent a rapid introduction of the fluid into the actuator. SEC.928

    摘要翻译: 半导体制造系统的输入/输出阀开关装置在操作用于打开和关闭连接系统的腔室的晶片传送通道的输入/输出阀时最小化振动。 开关装置包括具有关闭端口和开放端口的阀致动器,连接到关闭端口的第一流体管线,连接到开放端口的第二流体管线,分别安装在第一和第二流体管线中的第一流量调节器, 以调节流体的流量,以及第二流体流量调节器,其安装在第一和第二流体管线中,以调节流过的流体的流量。 第二流体流量调节器可以防止流体快速引入致动器。 SEC.928

    Hydraulic system for a work machine
    94.
    发明授权
    Hydraulic system for a work machine 失效
    工作机液压系统

    公开(公告)号:US06502500B2

    公开(公告)日:2003-01-07

    申请号:US09845704

    申请日:2001-04-30

    申请人: Kazunori Yoshino

    发明人: Kazunori Yoshino

    IPC分类号: F45B1108

    摘要: In one aspect of the invention, the hydraulic system provided with the hydraulic pressure source and at least one meter-in spool valve. Each Spool valve has an inlet and an outlet. A hydraulic actuator is fluidly coupled with the spool valve outlet. A load hold check valve fluidly interconnects the pressure source with at least one spool valve inlet. The load hold check valve has a pressure control chamber. A three way valve has a first port in fluid communication with the pressure control chamber, a second port in fluid communication with at least one spool valve inlet, and a third port in fluid communication with the pressure source. Proved pressure and flow control to an actuator are provided, and make-up and line relief are provided without the use of an additional spool valve.

    摘要翻译: 在本发明的一个方面,液压系统设置有液压源和至少一个计量式滑阀。 每个阀芯阀都有一个入口和出口。 液压致动器与滑阀出口流体连接。 负载保持止回阀将压力源与至少一个滑阀入口流体地互连。 负载保持止回阀具有压力控制室。 三通阀具有与压力控制室流体连通的第一端口,与至少一个滑阀入口流体连通的第二端口和与压力源流体连通的第三端口。 提供了对执行器的压力和流量控制,并且在不使用额外的滑阀的情况下提供了化妆和排液。

    Hydraulic control apparatus for a hospital bed
    98.
    发明申请
    Hydraulic control apparatus for a hospital bed 审中-公开
    医院床用液压控制装置

    公开(公告)号:US20020130286A1

    公开(公告)日:2002-09-19

    申请号:US10085966

    申请日:2002-02-28

    申请人: Hill-Rom, Inc.

    IPC分类号: A47B007/02 F16K031/11

    摘要: A hydraulic control apparatus for a hospital bed includes a manifold having a manifold block with an inlet, an outlet, and a conduit in fluid communication with the inlet and the outlet, and a valve assembly having a valve with a portion moveable within the conduit between a first position blocking fluid communication between the inlet and the outlet and a second position in which the inlet is in fluid communication with the outlet. The control apparatus further includes a solenoid operable to move the valve from the first position to the second position in response to an electrical input applied to the solenoid, and a lever operable to move the valve from the first position to the second position in response to a manual input applied to the lever.

    摘要翻译: 用于医院病床的液压控制装置包括具有歧管块的歧管,歧管块具有入口,出口和与入口和出口流体连通的导管,以及阀组件,具有阀,该阀具有可在管道内移动的部分, 阻止入口和出口之间的流体连通的第一位置和其中入口与出口流体连通的第二位置。 控制装置还包括一个电磁阀,可操作以响应于施加到螺线管的电输入而将阀从第一位置移动到第二位置;以及杠杆,其可操作以响应于第一位置将阀从第一位置移动到第二位置 手动输入应用于杠杆。

    Method for controlling the motion velocity of a hydraulically driven machine, a drive system for a hydraulically driven machine
    100.
    发明授权
    Method for controlling the motion velocity of a hydraulically driven machine, a drive system for a hydraulically driven machine 失效
    用于控制液压驱动机器的运动速度的方法,用于液压驱动机器的驱动系统

    公开(公告)号:US06415703B1

    公开(公告)日:2002-07-09

    申请号:US09600599

    申请日:2000-09-06

    申请人: Reijo Raisio

    发明人: Reijo Raisio

    IPC分类号: F15B1304

    摘要: The present invention concerns a method for controlling the speed of motion of a hydraulically operated machine, an operating system and a control device of the machine. The flow line (3) of the medium from the pump (2) to the machine (1) is divided into two branches (10, 11). By means of a valve (8), the second branch (11) can be set to feed medium either to the machine (1) or to return the medium to the tank (4) of the pump. Such a flow is led to the second valve (8), that at a speed of rotation of the pump lower than the highest speed of rotation, the difference between the flow supplied by the pump and the flow through the second branch produces the desired slowest speed on motion of the device. When the valve (8) is set to return the medium to the tank (4) of the pump, the flow from the pump (2) is adjusted by changing the speed of rotation of the pump.

    摘要翻译: 本发明涉及一种用于控制机器的液压操作机器,操作系统和控制装置的运动速度的方法。 从泵(2)到机器(1)的介质的流动线(3)被分成两个分支(10,11)。 通过阀(8),第二分支(11)可被设定为将介质输送到机器(1)或将介质返回到泵的罐(4)。 这样的流动被引导到第二阀(8),在泵的旋转速度低于最高旋转速度的情况下,泵提供的流量与通过第二分支的流量之间的差产生期望的最慢 设备运动速度。 当阀(8)被设置为将介质返回到泵的罐(4)时,通过改变泵的旋转速度来调节来自泵(2)的流量。