公开(公告)号：US6061074A

公开(公告)日：2000-05-09

申请号：US778982

申请日：1997-01-06

Applicant: Johann Bartha ,  Frank Druschke ,  Gerhard Elsner ,  Johann Greschner

Inventor： Johann Bartha ,  Frank Druschke ,  Gerhard Elsner ,  Johann Greschner

IPC: B41J2/415 ,  H01J3/04 ,  H01J27/26

CPC classification number: B41J2/415 ,  H01J27/26 ,  H01J3/04

Abstract: An ion generator for the generation of a plasma is assembled from module subassemblies. The first subassembly includes a dielectric plate 1, on the first surface 1a of which are located a large number of first electrodes 3, and the second surface 1b of which is coated with a structured conductive layer 2. The second subassembly includes an aperatured spacer plate with a large number of dielectric spacers with a second electrode 5 on the side facing away from the dielectric plate 1. In joining the subassemblies together, the aperatured spacer plate is connected to the dielectric plate 1 at its first surface 1a in such a way that cavities 6 for accommodating plasma are formed by the first electrodes 3, parts of the first surface 1a of the dielectric plate 1 and the spacers 4 with the second electrodes 5. The first set of electrodes 3 shield the points where the subassemblies are bonded together from plasma in the cavities.

Abstract translation: 用于产生等离子体的离子发生器由模块子组件组装。 第一子组件包括电介质板1，其第一表面1a位于大量的第一电极3上，其第二表面1b涂覆有结构化导电层2.第二子组件包括温度分隔板 具有大量的电介质隔离物，其在背离电介质板1的一侧具有第二电极5.在将子组件接合在一起时，高温隔离板在其第一表面1a处以电连接板1连接到电介质板1， 用于容纳等离子体的空腔6由电介质板1的第一表面1a的一部分和具有第二电极5的间隔物4的第一电极3形成。第一组电极3将组件结合在一起的点 空腔中的等离子体。

公开(公告)号：US5939829A

公开(公告)日：1999-08-17

申请号：US901195

申请日：1997-07-28

Applicant: Karl H. Schoenbach ,  Wojciech W. Byszewski ,  Frank E. Peterkin ,  Amin N. Dharamsi

Inventor： Karl H. Schoenbach ,  Wojciech W. Byszewski ,  Frank E. Peterkin ,  Amin N. Dharamsi

IPC: H01J1/02 ,  H01J1/62 ,  H01J27/26 ,  H01J61/06 ,  H01J61/067 ,  H01J61/09 ,  H01J61/12 ,  H01J61/20 ,  H01J61/66 ,  H01J61/72 ,  H01S3/038

CPC classification number: H01J3/025 ,  H01J1/025 ,  H01J17/04 ,  H01J17/06 ,  H01J27/08 ,  H01J3/04 ,  H01J61/067 ,  H01J61/09 ,  H01J61/12 ,  H01J61/305 ,  H01J61/66 ,  H01J61/72 ,  H01S3/0385 ,  H01J61/78 ,  H01S3/03 ,  H01S3/0382 ,  H01S3/2383

Abstract: A discharge device for operation in a gas at a prescribed pressure includes a cathode having a plurality of micro hollows therein, and an anode spaced from the cathode. Each of the micro hollows has dimensions selected to produce a micro hollow discharge at the prescribed pressure. Preferably, each of the micro hollows has a cross-sectional dimension that is on the order of the mean free path of electrons in the gas. Electrical energy is coupled to the cathode and the anode at a voltage and current for producing micro hollow discharges in each of the micro hollows in the cathode. The discharge device may include a discharge chamber for maintaining the prescribed pressure. A dielectric layer may be disposed on the cathode when the spacing between the cathode and the anode is greater than about the mean free path of electrons in the gas. Applications of the discharge device include fluorescent lamps, excimer lamps, flat fluorescent light sources, miniature gas lasers, electron sources and ion sources.

公开(公告)号：US4143299A

公开(公告)日：1979-03-06

申请号：US881463

申请日：1978-02-22

Applicant: Phillip A. Sprangle ,  Adam T. Drobot ,  Wallace M. Manheimer

Inventor： Phillip A. Sprangle ,  Adam T. Drobot ,  Wallace M. Manheimer

IPC: H01J3/04 ,  H01J25/10

CPC classification number: H01J3/04

Abstract: An electron beam and collective ion-electron beam accelerating apparatus inhich a relativistic electron beam and ions moving with it are accelerated in speed by passing them through a converging waveguide (i.e., a drift tube) of gradually decreasing diameter. The ions are separated from the electrons upon leaving the waveguide.