公开(公告)号：US5329110A

公开(公告)日：1994-07-12

申请号：US156192

申请日：1993-11-22

Applicant: Randy L. Shimabukuro ,  Stephen D. Russell

Inventor： Randy L. Shimabukuro ,  Stephen D. Russell

IPC: H01J43/04 ,  H01J39/06

CPC classification number: H01J43/04

Abstract: A microelectronic photomultiplier device is fabricated by discrete proceds to provide a photocathode-anode and dynode chain arrangement which is analogous in operation to conventional photomultiplier tubes. This microelectronic photomultiplier device provides for low level photon detection and realizes the advantages of high reliability, small size and fast response, plus lower cost, weight and power consumption compared to conventional photomultiplier tubes. In addition, the fabrication on an SOI substrate permits integration of logic and control circuitry with detectors. The insulating substrate also permits the integration of an on-chip high voltage supply and may easily be extended to a plurality of detectors offering improved performance and design flexibility.

Abstract translation: 通过离散程序制造微电子光电倍增器器件，以提供与常规光电倍增管操作类似的光电阴极阳极和倍增极链布置。 该微电子光电倍增器器件与传统的光电倍增管相比，提供低等级光子检测，实现了高可靠性，小尺寸和快速响应的优点，加上成本更低，重量更轻和功耗更少。 此外，在SOI衬底上的制造允许逻辑和控制电路与检测器的集成。 绝缘基板还允许集成片上高压电源，并且可以容易地扩展到提供改进的性能和设计灵活性的多个检测器。

公开(公告)号：US5306904A

公开(公告)日：1994-04-26

申请号：US019414

申请日：1993-02-16

Applicant: Randy L. Shimabukuro ,  Stephen D. Russell

Inventor： Randy L. Shimabukuro ,  Stephen D. Russell

IPC: H01J43/04 ,  H01J39/06

CPC classification number: H01J43/04

Abstract: A muitilayer microelectronic photomultiplier device is fabricated by disce procedures to provide a photocathodeanode and dynode chain arrangement which is analogous in operation to conventional photomultiplier tubes. This multilayer microelectronic photomultiplier device provides for low level photon detection and realizes the advantages of high reliability, small size and fast response, plus lower cost, weight and power consumption compared to conventional photomultiplier tubes. In addition, the fabrication on an SOI substrate permits integration of logic and control circuitry with detectors. The insulating substrate also permits the integration of an on-chip high voltage supply and may easily be extended to a plurality of detectors with high packing densities due to the inherently stacked geometry offering improved performance and design flexibility.

Abstract translation: 通过离散程序制造三层微电子光电倍增器装置，以提供与常规光电倍增管操作类似的光电阴极管和倍增极链布置。 该多层微电子光电倍增器装置提供低等级的光子检测，与传统的光电倍增管相比，实现了高可靠性，小尺寸和快速响应以及更低成本，重量和功耗的优点。 此外，在SOI衬底上的制造允许逻辑和控制电路与检测器的集成。 绝缘衬底还允许集成片上高压电源，并且由于本来层叠的几何形状提供了改进的性能和设计灵活性，因此可容易地扩展到具有高封装密度的多个检测器。

公开(公告)号：US5264693A

公开(公告)日：1993-11-23

申请号：US908692

申请日：1992-07-01

Applicant: Randy L. Shimabukuro ,  Stephen D. Russell

Inventor： Randy L. Shimabukuro ,  Stephen D. Russell

IPC: H01J43/04 ,  H01J39/06

CPC classification number: H01J43/04

Abstract: A microelectronic photomultiplier device is fabricated by discrete proceds to provide a photocathode-anode and dynode chain arrangement which is analogous in operation to conventional photomultiplier tubes. This microelectronic photomultiplier device provides for low level photon detection and realizes the advantages of high reliability, small size and fast response, plus lower cost, weight and power consumption compared to conventional photomultiplier tubes. In addition, the fabrication on an SOI substrate permits integration of logic and control circuitry with detectors. The insulating substrate also permits the integration of an on-chip high voltage supply and may easily be extended to a plurality of detectors offering improved performance and design flexibility.

Abstract translation: 通过离散程序制造微电子光电倍增器器件，以提供与常规光电倍增管操作类似的光电阴极阳极和倍增极链布置。 该微电子光电倍增器器件与传统的光电倍增管相比，提供低等级光子检测，实现了高可靠性，小尺寸和快速响应的优点，加上成本更低，重量更轻和功耗更少。 此外，在SOI衬底上的制造允许逻辑和控制电路与检测器的集成。 绝缘基板还允许集成片上高压电源，并且可以容易地扩展到提供改进的性能和设计灵活性的多个检测器。

公开(公告)号：US5260029A

公开(公告)日：1993-11-09

申请号：US917384

申请日：1992-07-23

Applicant: Shigeru Hosoi ,  Tsuyoshi Hayakawa

Inventor： Shigeru Hosoi ,  Tsuyoshi Hayakawa

IPC: C12Q1/68 ,  G01J1/02 ,  G01N15/14 ,  G01N21/64 ,  G01N33/50 ,  H01J43/04

CPC classification number: G01N21/6486 ,  G01N15/1459 ,  H01J43/04

Abstract: To assure detection of fluorescence produced from continuously supplied fine particles such as DNA bases with accuracy and excellent efficiency, fine particles supplied from a flow cell are introduced into a through-hole of a hollow photomultiplier. An optical fiber is disposed in axial alignment with the through-hole of the photomultiplier and irradiates an exciting light beam onto the fine particles staying in the through-hole. Light-induced fluorescence is thus detected by the photomultiplier which has a photocathode on an inner circumference of the through-hole.

公开(公告)号：US5189338A

公开(公告)日：1993-02-23

申请号：US818282

申请日：1992-01-09

Applicant: Keiichi Ohishi ,  Suenori Kimura

Inventor： Keiichi Ohishi ,  Suenori Kimura

IPC: H01J43/22 ,  H01J43/04 ,  H01J43/06 ,  H01J43/26

CPC classification number: H01J43/06 ,  H01J43/04

Abstract: A photomultiplier tube includes a tube, a focussing electrode unit formed with a photoelectron transmission hole whose center is positioned offset from a central axis of the tube and a dynode positioned in confrontation with the transmission hole. A center of the dynode is also offset from the central axis of the tube. A grid type electrodes array are positioned at the same axial position of the dynode and positioned beside the dynode in a radial direction of the tube. The focussing electrode provides desirable uniformity in distribution of photoelectronics over the dynode even by the deviating position of the photoelectron transmission hole and the dynode. By positioning the dynode away from the central axis in the radial direction of the tube, the grid type electrode array can be positioned beside the dynode. Thus, entire length of the tube can be reduced without any change in a diameter of the tube because of the fact that a length of the dynode in the axial direction of the tube only influences the axial length of the tube.

公开(公告)号：US5117149A

公开(公告)日：1992-05-26

申请号：US521017

申请日：1990-05-09

Applicant: John J. Fijol

Inventor： John J. Fijol

IPC: H01J43/04 ,  H01J43/24

CPC classification number: H01J43/24 ,  H01J43/04

Abstract: A parallel plate electron multiplier employing active dynode surfaces in confronting spaced relationship for effecting electron multiplication between the input and the output thereof in the active dynode area. Electron multiplication occurs in response to an accelerating biasing field extending between the input and the output. Electrostatic elements laterally of the dynode area establish lateral biasing fields in a direction transverse of the dynodes for containing electrons in the dynode area and for attracting positively charged species away from the dynode area in order to reduce spurious signals.

Abstract translation: 采用主动倍增电极表面的平行板电子倍增器，其面对间隔的关系，用于在主动倍增器区域中的输入和输出之间实现电子倍增。 响应于在输入和输出之间延伸的加速偏置场而发生电子倍增。 倍增极区域横向的静电元件在倍增极区的横向方向上建立横向偏置场，用于在倍增极区域中包含电子，并且为了吸引正电荷的物质远离倍增极区域以便减少杂散信号。

公开(公告)号：US4691160A

公开(公告)日：1987-09-01

申请号：US669603

申请日：1984-11-08

Applicant: Yoichi Ino

Inventor： Yoichi Ino

IPC: H01J43/22 ,  G01T1/28 ,  H01J43/04 ,  G01N27/00

CPC classification number: H01J43/04 ,  G01T1/28

Abstract: In an apparatus for counting ions, a double-collector electron multiplier comprises a first and a second collector for receiving secondary electrons from an exit end of a dynode member of the electron multiplier. The first and the second collectors have a first and a second electron receiving surface, respectively, wherein the second electron receiving surface has a narrower area than the first electron receiving surface. A first and a second amplifier are separately used in amplifying a first and a second electric current produced from the first and the second collectors, respectively. An ammeter is connected through a switch selectively to the first and the second amplifiers to provide a selected measuring range for the number of ions which enter the electron multiplier.

Abstract translation: 在用于计数离子的装置中，双集电极电子倍增器包括用于从电子倍增器的倍增电极部件的出口端接收二次电子的第一和第二集电极。 第一和第二集电体分别具有第一和第二电子接收表面，其中第二电子接收表面具有比第一电子接收表面更窄的面积。 第一和第二放大器分别用于放大从第一和第二集电器产生的第一和第二电流。 电流表通过开关选择性地连接到第一和第二放大器，以提供进入电子倍增器的离子数量的选定的测量范围。

公开(公告)号：US4659921A

公开(公告)日：1987-04-21

申请号：US585242

申请日：1984-03-01

Applicant: Robert R. Alfano

Inventor： Robert R. Alfano

IPC: H01J43/04 ,  H01J31/50

CPC classification number: H01J43/04

Abstract: A light detector which can be gated on and off over an ultrashort time window, such as in picoseconds or femtoseconds, is disclosed. The light detector includes, in one embodiment, an input slit for receiving a light signal, relay optics, a sweep generator and a tubular housing, the tubular housing having therein a photocathode, an accelerating mesh, a pair of sweeping electrodes, a microchannel plate, a variable aperture and a dynode chain. Light received at the input slit is imaged by the relay optics onto the photocathode. Electrons emitted by the photocathode are conducted by the accelerating mesh to the sweeping electrodes where they are swept transversely across the tubular housing at a rate defined by the sweep generator over an angular distance defined by the sweeping electrodes, in a similar manner as in a streak camera. Swept electrons strike the microchannel plate where electron multiplication is accomplished. Exiting electrons which pass through the variable aperture and which strike the first dynode (cathode) in the dynode chain are further multiplied and outputted from the last dynode anode in the dynode chain as an analog electrical signal, the analog electrical signal corresponding to the intensity of the light signal during the time window over which swept electrons are picked up by the first dynode. In another embodiment of the invention all of the dynodes in the chain except for the last dynode are replaced by a second microchannel plate.

Abstract translation: 公开了一种可以在超短时间窗口上进行门控的光检测器，例如皮秒或飞秒。 在一个实施例中，光检测器包括用于接收光信号的输入狭缝，中继光学器件，扫描发生器和管状壳体，其中具有光电阴极，加速网，一对扫掠电极，微通道板 ，可变孔径和倍增极链。 在输入狭缝处接收的光被中继光学器件成像到光电阴极上。 由光电阴极发射的电子通过加速网络进行到扫掠电极，在扫掠电极处，扫掠电极以扫描发生器在由扫掠电极限定的角距离上限定的速率横跨管状壳体扫掠，以与条纹相似的方式 相机。 扫描电子撞击实现电子倍增的微通道板。 通过可变孔径并且与倍增极链中的第一倍增极（阴极）相撞的电子被进一步乘法并作为模拟电信号从倍增极链中的最后的倍增极阳极输出，模拟电信号对应于 在第一倍增电极拾取扫描电子的时间窗内的光信号。 在本发明的另一个实施例中，链中除了最后一个倍增电极之外的所有倍增电极都被第二微通道板替代。

公开(公告)号：US4656392A

公开(公告)日：1987-04-07

申请号：US546478

申请日：1983-10-28

Applicant: Richard D. Faulkner ,  Robert E. McHose

Inventor： Richard D. Faulkner ,  Robert E. McHose

IPC: H01J40/02 ,  H01J1/34 ,  H01J9/12 ,  H01J40/06 ,  H01J43/04 ,  H01J43/08 ,  H01J43/18

CPC classification number: H01J43/04

Abstract: An electron discharge device, such as a photomultiplier tube, has an evacuated envelope with an alkali-antimonide photoemissive cathode therein. A thermionic emission-reduction coating is disposed within the envelope. The coating alloys with the constituents of the photoemissive cathode to reduce thermionic emission. The thermionic emission reduction coating is formed preferably of indium; however, indium oxide may also be used.

Abstract translation: 诸如光电倍增管的电子放电装置具有其中具有碱 - 锑化物光发射阴极的抽真空的外壳。 热电子发射减少涂层设置在封套内。 具有光发射阴极成分的涂层合金以减少热电子发射。 热离子减少涂层优选由铟形成; 然而，也可以使用氧化铟。

公开(公告)号：US3885178A

公开(公告)日：1975-05-20

申请号：US48770474

申请日：1974-07-11

Applicant: VARIAN ASSOCIATES

Inventor： GOEHNER RONALD H

IPC: H01J43/04 ,  H01J39/02 ,  H01J43/18 ,  H01J43/22

CPC classification number: H01J43/04

Abstract: A photomultiplier tube (PMT) converts a received light signal to an output electrical signal of substantially greater intensity by employing a photocathode to convert incident light to free electrons, a plural dynode accelerating structure for effectively multiplying said free electrons, and an impact ionization diode (IID) for further multiplying and collecting said free electrons to provide a corresponding electrical output signal. The PMT can be an electrostatic device, in which the photocathode and the dynodes are mounted in opposed staggered positions, or a static crossed field device, in which the photocathode and the dynodes all are mounted opposite an accelerating rail and a magnetic field is provided to urge the electrons laterally along the tube. The IID''s junction is reverse biased and the entire diode is maintained at a substantially higher potential than the last dynode. The PMT can be gain controlled or turned off without affecting dynode potentials by controlling the IID''s potential. Due to the gain provided by the IID, dynode current can be reduced greatly, thereby to increase substantially the tube''s life without affecting its overall gain.

Abstract translation: 光电倍增管（PMT）通过使用光电阴极将入射光转换成自由电子，将接收到的光信号转换成具有显着更大强度的输出电信号，用于有效地乘以所述自由电子的多倍增电极加速结构和冲击电离二极管 IID），用于进一步乘法和收集所述自由电子以提供对应的电输出信号。 PMT可以是其中光电阴极和倍增极安装在相对交错位置的静电装置，或静电交叉场设备，其中光电阴极和倍增电极都与加速轨相对安装，并且提供磁场 沿着管子侧向推动电子。 IID的结点是反向偏置的，并且整个二极管保持在比最后的倍增电极显着更高的电位。 通过控制IID的电位，PMT可以被增益控制或关断，而不影响倍增电压。 由于IID提供的增益，可以大大减小倍增极电流，从而大大提高管的寿命，而不影响其整体增益。