公开(公告)号：US4950956A

公开(公告)日：1990-08-21

申请号：US96862

申请日：1987-09-15

Applicant: Tatsuo Asamaki ,  Kiyoshi Hoshino ,  Katsumi Ukai ,  Yoichi Ino ,  Toshio Adachi ,  Tsutomu Tsukada

Inventor： Tatsuo Asamaki ,  Kiyoshi Hoshino ,  Katsumi Ukai ,  Yoichi Ino ,  Toshio Adachi ,  Tsutomu Tsukada

IPC: C23C8/36 ,  C23C14/35 ,  C23C14/36 ,  C23C16/50 ,  C23C16/511 ,  C23F4/00 ,  H01J37/32 ,  H01J37/34 ,  H05H1/24

CPC classification number: H01J37/32623 ,  H01J37/32082 ,  H01J37/3266 ,  H01J37/3402 ,  H01J2237/3321

Abstract: A plasma processing apparatus comprises a vacuum vessel, an anode and a cathode arranged in the vacuum vessel, and a discharge producing power source for intermittently producing main discharge between the anode and the cathode to process a substrate arranged in the proximity of the anode and the cathode. The discharge producing power source comprises a magnetic field setting device including magnetic coils arranged closely to the vacuum vessel and having pole pieces and alternate current power sources for the magnetic coils. The plasma processing apparatus is able to remarkably increase processing speeds and considerably reduce the temperature rise and damage therefrom of substrates to be processed. Moreover, the magnetic field setting device is arranged in a small size to make the plasma processing apparatus compact and small-sized.

Abstract translation: 等离子体处理装置包括设置在真空容器中的真空容器，阳极和阴极以及用于间歇地在阳极和阴极之间产生主放电的放电产生电源，以处理布置在阳极附近的衬底和 阴极。 放电产生电源包括磁场设定装置，其包括紧密配置在真空容器上的磁性线圈，并具有用于磁性线圈的极片和交流电源。 等离子体处理装置能够显着地增加处理速度，并显着地降低温度升高并损坏要处理的基板。 此外，磁场设定装置被布置成小尺寸以使等离子体处理装置小型化。

公开(公告)号：US4700069A

公开(公告)日：1987-10-13

申请号：US739984

申请日：1985-05-31

Applicant: Yoichi Ino ,  Isamu Morisako

Inventor： Yoichi Ino ,  Isamu Morisako

IPC: G01N27/62 ,  H01J49/42 ,  B01D59/44

CPC classification number: H01J49/4215 ,  H01J49/4255

Abstract: In a mass spectrometer, a quadrupole electrode comprises four electrodes arranged at a predetermined interval about a device axis along which the mass spectrometer successively comprises an ionized gas source, the quadrupole electrode, and a detector for detecting the gas particles separated in reference to mass-to-charge ratio. At least one of the electrodes comprises a plurality of electrode elements which are divided along the device axis. Each of the electrode elements has a longitudinal axis. The electrode elements are mechanically connected by a mechanically connecting member so that the longitudinal axis are coincident with one another and parallel to the device axis. The electrode elements are electrically connected by an electrically connecting member.

Abstract translation: 在质谱仪中，四极电极包括围绕器件轴线以预定间隔布置的四个电极，质子仪沿着该轴线依次包括电离气体源，四极电极和用于检测分离的气体颗粒的检测器， 充电比。 电极中的至少一个包括沿器件轴分割的多个电极元件。 每个电极元件具有纵向轴线。 电极元件通过机械连接构件机械连接，使得纵向轴线彼此重合并平行于装置轴线。 电极元件通过电连接构件电连接。

公开(公告)号：US4691160A

公开(公告)日：1987-09-01

申请号：US669603

申请日：1984-11-08

Applicant: Yoichi Ino

Inventor： Yoichi Ino

IPC: H01J43/22 ,  G01T1/28 ,  H01J43/04 ,  G01N27/00

CPC classification number: H01J43/04 ,  G01T1/28

Abstract: In an apparatus for counting ions, a double-collector electron multiplier comprises a first and a second collector for receiving secondary electrons from an exit end of a dynode member of the electron multiplier. The first and the second collectors have a first and a second electron receiving surface, respectively, wherein the second electron receiving surface has a narrower area than the first electron receiving surface. A first and a second amplifier are separately used in amplifying a first and a second electric current produced from the first and the second collectors, respectively. An ammeter is connected through a switch selectively to the first and the second amplifiers to provide a selected measuring range for the number of ions which enter the electron multiplier.

Abstract translation: 在用于计数离子的装置中，双集电极电子倍增器包括用于从电子倍增器的倍增电极部件的出口端接收二次电子的第一和第二集电极。 第一和第二集电体分别具有第一和第二电子接收表面，其中第二电子接收表面具有比第一电子接收表面更窄的面积。 第一和第二放大器分别用于放大从第一和第二集电器产生的第一和第二电流。 电流表通过开关选择性地连接到第一和第二放大器，以提供进入电子倍增器的离子数量的选定的测量范围。

公开(公告)号：US4652752A

公开(公告)日：1987-03-24

申请号：US801446

申请日：1985-11-25

Applicant: Yoichi Ino ,  Kazuo Kosuge

Inventor： Yoichi Ino ,  Kazuo Kosuge

IPC: G01N7/00 ,  G01L21/00 ,  G01L21/30 ,  B01D59/44

CPC classification number: G01L21/30

Abstract: A vacuum gauge includes a quadrupole mass spectrometer for measuring an ion current value of respective gas components, the Bayard-Alpart type ionization gauge for measuring an apparent total pressure value of the gas components, an arithmetic logic unit for calculating a predetermined equation so as to obtain concentration of the respective gas components and also measurement sensitivity of the respective gas components, whereby the apparent total pressure value is corrected, based upon the measurement sensitivity of the respective gas components, to derive a real total pressure value of the measured gas components.

Abstract translation: 真空计包括用于测量各个气体组分的离子电流值的四极质谱仪，用于测量气体组分的表观总压力值的Bayard-Alpart型电离计，用于计算预定方程式的算术逻辑单元，以便 获得各气体成分的浓度，以及各气体成分的测定灵敏度，根据各气体成分的测定灵敏度对表观总压力进行校正，求出测定气体成分的实际总压力值。