Method for producing liquid discharge head
    105.
    发明授权
    Method for producing liquid discharge head 失效
    液体排出头的制造方法

    公开(公告)号:US06942321B2

    公开(公告)日:2005-09-13

    申请号:US10615143

    申请日:2003-07-09

    摘要: The invention is to provide a liquid discharge head capable of achieving a higher liquid droplet discharge speed and a more stable discharge amount, thereby improving the discharge efficiency, and a producing method therefor. A liquid discharge head 1 includes a heater 20, an element substrate 11, a nozzle 27 including a discharge port portion 26 having a discharge port 26a for discharging a liquid droplet, a bubble generating chamber and a supply path for supplying the bubble generating chamber with the liquid, and an orifice substrate 12 including a supply chamber 28 for supplying the nozzle 27 with the liquid, wherein the bubble generating chamber is constituted of a first bubble generating chamber 31a and a second bubble generating chamber 31b provided thereon, the discharge port portion 26 is provided on and communicates with the second bubble generating chamber with a step difference thereto, the lateral wall of the second bubble generating chamber 32b is constricted toward the discharge port with an inclination of 10° to 45°, and the upper plane of the supply path is formed higher toward the supply chamber, in order to increase the liquid amount in the supply path and to improve the temperature dependence of the discharge amount.

    摘要翻译: 本发明提供一种能够实现更高的液滴喷射速度和更稳定的排出量,从而提高排出效率的液体排出头及其制造方法。 液体排出头1包括加热器20,元件基板11,包括具有用于排出液滴的排出口26a的排出口部分26的喷嘴27,气泡发生室和用于供应气泡产生室 以及包括用于向喷嘴27供应液体的供应室28的孔基板12,其中气泡发生室由设置在其上的第一气泡发生室31a和第二气泡发生室31b构成, 排出口部分26设置在第二气泡产生室上且与第二气泡发生室连通,第二气泡产生室32b的侧壁以10°至45°的倾斜朝排出口收缩, 供应路径的上平面朝向供应室形成得较高,以便增加供应路径中的液体量并改善温度 排放量的依赖性。

    Method for manufacturing microstructure, method for manufacturing liquid discharge head, and liquid discharge head
    106.
    发明申请
    Method for manufacturing microstructure, method for manufacturing liquid discharge head, and liquid discharge head 失效
    制造微结构的方法,液体排出头的制造方法和排液头

    公开(公告)号:US20050181309A1

    公开(公告)日:2005-08-18

    申请号:US11108700

    申请日:2005-04-19

    摘要: A method for manufacturing a microstructure comprises the steps of forming positive type resist layer (PMMA) on a base plate having heater formed thereon; forming positive type resist layer (PMIPK) on the aforesaid positive type resist layer; exposing the positive type resist layer on the upper layer to ionizing radiation of the wavelength region that gives decomposition reaction to the positive type resist layer (PMIPK) for the formation of a designated pattern by development; exposing the positive type resist layer on the lower layer to ionizing radiation of the wavelength region that givens decomposition reaction to the positive type resist layer (PMMA) for the formation of a designated pattern by development; and coating photosensitive resin film having adhesive property on the resist pattern formed by the positive type resist layer (PMMA) and positive type resist layer (PMIPK); and then, dissolving the resist pattern to be removed after the resin film having adhesive property is hardened.

    摘要翻译: 微结构的制造方法包括在其上形成有加热器的基板上形成正型抗蚀剂层(PMMA)的步骤; 在上述正型抗蚀剂层上形成正型抗蚀剂层(PMIPK); 将上层的正型抗蚀剂层暴露于通过显影而形成指定图案的正型抗蚀剂层(PMIPK)的分解反应的波长区域的电离辐射; 将下层的正型抗蚀剂层暴露于通过显影而形成指定图案的正型抗蚀剂层(PMMA)的分解反应的波长区域的电离辐射; 在由正型抗蚀剂层(PMMA)和正型抗蚀剂层(PMIPK)形成的抗蚀剂图案上涂布具有粘合性的感光性树脂膜。 然后在具有粘合性的树脂膜硬化后溶解待除去的抗蚀剂图案。

    Ink jet recording head, method for producing the same and recording apparatus equipped with the same
    108.
    发明授权
    Ink jet recording head, method for producing the same and recording apparatus equipped with the same 失效
    喷墨记录头,其制造方法和配备该喷墨记录头的记录装置

    公开(公告)号:US06609783B1

    公开(公告)日:2003-08-26

    申请号:US09191535

    申请日:1998-11-13

    IPC分类号: B41J205

    摘要: An ink jet recording head with a heat-generating resistance layer for generating thermal energy used for ink discharge, and a wiring electrode layer electrically connected to the heat-generating resistance layer to form an electro-thermal converting element, an insulating protective layer covering the electro-thermal converting element, and an external electrical connection portion electrically connected to the electro-thermal converting element and configured to connect to an external wiring for applying a voltage to the electro-thermal converting element. Further, the external electrical connection portion is formed by a layer grown by electroless plating from the wiring electrode layer through a through hole formed in the insulating protective layer. The external electrical connection portion projects beyond the insulating protective layer and has a flat surface at the most extended projection of the external electrical connection portion.

    摘要翻译: 具有用于产生用于排墨的热能的发热电阻层的喷墨记录头和与发热电阻层电连接以形成电热转换元件的布线电极层,覆盖该热电转换元件的绝缘保护层 电热转换元件和电连接到电热转换元件的外部电连接部分,并且被配置为连接到用于向电热转换元件施加电压的外部布线。 此外,外部电连接部分由通过在绝缘保护层中形成的通孔从布线电极层通过化学镀生长的层形成。 外部电连接部突出超过绝缘保护层,并且在外部电连接部分的最大延伸的突起处具有平坦表面。

    Micro-electromechanical device, liquid discharge head, and method of manufacture therefor
    109.
    发明授权
    Micro-electromechanical device, liquid discharge head, and method of manufacture therefor 失效
    微机电装置,排液头及其制造方法

    公开(公告)号:US06513911B1

    公开(公告)日:2003-02-04

    申请号:US09577979

    申请日:2000-05-25

    IPC分类号: B41J205

    摘要: A micro-electromechanical device comprises a movable member having a fixedly supporting portion and movable portion, and a substrate for having the movable member which is supported in a state having a specific gap with the substrate. For this device, a metallic layer which provides the gap for the movable portion is covered by the fixedly supporting portion of the movable member, and remains to be used as a wiring layer. The wiring layer is electrically connected with a plurality of wiring provided for the substrate. With the structure, thus arranged, the electric resistance is made significantly small. The electrical efficiency is enhanced accordingly. Also, the apparatus that adopts this device is made smaller, and the costs of manufacture thereof is made lower as well.

    摘要翻译: 微机电装置包括具有固定支撑部分和可移动部分的可移动部件,以及用于使可动部件以与基板具有特定间隙的状态支撑的基板。 对于该装置,为可动部提供间隙的金属层被可动构件的固定支撑部覆盖,并且保持用作布线层。 布线层与为基板设置的多个布线电连接。 通过这样布置的结构,使电阻显着小。 电效率相应提高。 此外,采用该装置的装置也变小,制造成本也降低。

    Liquid discharge head and liquid discharge apparatus
    110.
    发明授权
    Liquid discharge head and liquid discharge apparatus 失效
    排液头和排液装置

    公开(公告)号:US06491381B2

    公开(公告)日:2002-12-10

    申请号:US09452207

    申请日:1999-12-01

    IPC分类号: B41J205

    摘要: In a liquid discharge head having an element substrate on the surface of which are provided in parallel a plurality of discharge energy generating elements generating heat energy for creating a bubble in liquid, a fixed portion provided on the element substrate so as to face the plurality of discharge energy generating elements, and fixed to the element substrate, and a plurality of movable members comprising a movable portion extending from the end portion of the fixed portion and displaced by the bubble, a fulcrum about which the movable portion is displaced is located on the movable portion other than a corner portion formed at the boundary between the movable portion and the fixed portion.

    摘要翻译: 在具有其表面上的元件基板并排设置的多个排出能量产生元件的液体排出头中,产生用于在液体中产生气泡的热能的排出能量产生元件,设置在元件基板上以与多个 放电能量产生元件,并且固定到元件基板,以及多个可移动部件,包括从固定部分的端部延伸并被气泡移位的可移动部分,可移动部分位于其上的支点位于 除了形成在可动部和固定部之间的边界处的角部以外的可动部。