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    IONIZATION GAUGE FOR HIGH PRESSURE OPERATION
    101.
    发明申请
    IONIZATION GAUGE FOR HIGH PRESSURE OPERATION 有权
    用于高压运行的离子化仪

    公开(公告)号：US20150300904A1

    公开(公告)日：2015-10-22

    申请号：US14377449

    申请日：2013-02-07

    Applicant: MKS Instruments, Inc.

    Inventor： Gerardo A. Brucker

    IPC: G01L19/06 ,  H01J41/02 ,  H01J1/52 ,  G01L21/30

    CPC classification number: G01L21/32 ,  G01L19/0627 ,  G01L21/30 ,  H01J1/52 ,  H01J41/02 ,  H01J41/04

    Abstract: An ionization gauge to measure pressure, while controlling the location of deposits resulting from sputtering when operating at high pressure, includes at least one electron source that emits electrons, and an anode that defines an ionization volume. The ionization gauge also includes a collector electrode that collects ions formed by collisions between the electrons and gas molecules and atoms in the ionization volume, to provide a gas pressure output. The electron source can be positioned at an end of the ionization volume, such that the exposure of the electron source to atom flux sputtered off the collector electrode and envelope surface is minimized. Alternatively, the ionization gauge can include a first shade outside of the ionization volume, the first shade being located between the electron source and the collector electrode, and, optionally, a second shade between the envelope and the electron source, such that atoms sputtered off the envelope are inhibited from depositing on the electron source.

    Abstract translation: 用于测量压力的电离计，同时控制在高压下操作时由溅射产生的沉积物的位置，包括至少一个发射电子的电子源和限定电离体积的阳极。 电离计还包括收集电极，其收集由电子和气体分子之间的碰撞形成的离子和电离体积中的原子，以提供气体压力输出。 电子源可以位于电离体积的末端，使得电子源暴露于从集电极电极和包膜表面溅射的原子通量被最小化。 或者，电离计可以包括离子化体积外的第一阴影，第一阴影位于电子源和集电极之间，以及可选地，在封套和电子源之间的第二阴影，使得原子溅射 该封套被禁止沉积在电子源上。

    Ionization gauge
    103.
    发明申请
    Ionization gauge 有权
    电离计

    公开(公告)号：US20050184735A1

    公开(公告)日：2005-08-25

    申请号：US10799446

    申请日：2004-03-12

    Applicant: Paul Arnold ,  Paul Rutt

    Inventor： Paul Arnold ,  Paul Rutt

    IPC: G01L21/32 ,  H01J41/00 ,  H01J41/04 ,  G01N27/62

    CPC classification number: H01J41/04 ,  G01L21/32

    Abstract: An ionization gauge for isolating an electron source from gas molecules includes the electron source for generating electrons, a collector electrode for collecting ions formed by the impact between the electrons and gas molecules, and an electron window which isolates the electron source from the gas molecules. The ionization gauge can have an anode which defines an anode volume and retains the electrons in a region of the anode. The ionization gauge can have a plurality of electron sources and/or collector electrodes. The collector electrode(s) can be located within the anode volume or outside the anode volume. The ionization gauge can have a mass filter for separating the ions based on mass-to-charge ratio. The ionization gauge can be a Bayard-Alpert type that measures pressure or a residual gas analyzer that determines a gas type.

    Abstract translation: 用于从气体分子中分离电子源的电离计包括用于产生电子的电子源，用于收集由电子和气体分子之间的冲击形成的离子的集电极，以及将电子源与气体分子隔离的电子窗口。 电离计可以具有限定阳极体积并将电子保持在阳极区域中的阳极。 电离计可以具有多个电子源和/或集电极。 集电极可以位于阳极体积内或阳极体积外。 电离计可以具有用于基于质荷比分离离子的质量过滤器。 电离计可以是衡量压力的Bayard-Alpert型，也可以是确定气体类型的残留气体分析仪。

    Ionization gauge and method of using and calibrating same
    104.
    发明授权
    Ionization gauge and method of using and calibrating same 失效
    电离计及其使用及校准方法

    公开(公告)号：US5296817A

    公开(公告)日：1994-03-22

    申请号：US906665

    申请日：1992-06-30

    Applicant: Daniel G. Bills ,  Michael D. Borenstein ,  Paul C. Arnold

    Inventor： Daniel G. Bills ,  Michael D. Borenstein ,  Paul C. Arnold

    IPC: G01L21/30 ,  G01L21/32 ,  G01L27/00 ,  H01J41/04

    CPC classification number: H01J41/04 ,  G01L21/32

    Abstract: Ionization gauge and method of operating same where the gauge may be of the Bayard-Alpert type and include a shield which completely encloses the electron source, the anode, and the collector electrode so that potentials external to the shield do not disturb the electric charge distribution within the shielded volume to thus stabilize the sensitivity of the gauge. The ionization gauge is further characterized by the following features which may be present either alone or in combination including: (a) the anode is provided with end caps which extend radially inward at least 25% of the radius of the anode but not more than 75% of the radius; (b) the ion collector has a diameter of not less than 0.015 in. and not more than 0.080 in.; (c) the ion collector extends at its free end at least through one of the partial end caps of the anode; (d) the electron source is not substantially longer axially than the region within the anode volume in which the electric field is predominantly directed radially inward and where the electron source is located substantially only adjacent to the foregoing region; (e) the anode is provided with a substantially uniformly transparent grid structure in the regions where the electrons enter the anode volume and where they exit from the anode volume.

    Abstract translation: 电离计及其操作方法，其中量规可以是Bayard-Alpert型，并且包括完全包围电子源，阳极和集电极的屏蔽，使得屏蔽外部的电位不会扰乱电荷分布 在屏蔽体积内，从而稳定仪表的灵敏度。 电离计进一步的特征在于以下特征，其可以单独存在或组合存在，包括：（a）阳极设置有端盖，其径向向内延伸至阳极半径的至少25％但不大于75 半径的百分比; （b）离子收集器的直径不小于0.015英寸，不大于0.080英寸。 （c）离子收集器至少通过阳极的部分端盖之一在其自由端处延伸; （d）电子源基本上不比阳极体积内的区域基本上更长，其中电场主要指向径向向内并且电子源基本上仅与前述区域相邻; （e）阳极在其中电子进入阳极体积并且它们从阳极体积排出的区域中具有基本均匀的透明网格结构。

    Vacuum gauge
    105.
    发明授权
    Vacuum gauge 失效
    真空计

    公开(公告)号：US4307323A

    公开(公告)日：1981-12-22

    申请号：US137461

    申请日：1980-04-04

    Applicant: Daniel G. Bills ,  Paul C. Arnold

    Inventor： Daniel G. Bills ,  Paul C. Arnold

    IPC: H01J41/04 ,  H05B31/26

    CPC classification number: H01J41/04

    Abstract: A hot filament ionization gauge is provided with a very small diameter and/or very short collector to limit interception of X-ray flux. Suitable gauge sensitivity is achieved by additionally collecting ions at the collector support, which is shielded from the X-ray flux by a shield. Collection of ions by the shield is avoided by maintaining the shield at grid potential.

    Abstract translation: 热丝电离计具有非常小的直径和/或非常短的集电极以限制X射线通量的截取。 通过在收集器支撑件处另外收集离子来实现合适的测量灵敏度，其通过屏蔽物与X射线通量屏蔽。 通过将屏蔽保持在电网电位来避免屏蔽物收集离子。

    Monitoring of vapor density in vapor deposition furnance by emission spectroscopy
    106.
    发明授权
    Monitoring of vapor density in vapor deposition furnance by emission spectroscopy 失效
    通过排放光谱监测蒸气沉积物中的蒸气密度

    公开(公告)号：US3609378A

    公开(公告)日：1971-09-28

    申请号：US3609378D

    申请日：1966-10-31

    Applicant: AIR REDUCTION

    Inventor： SMITH HUGH ROSCOE JR

    IPC: C23C14/54 ,  H01J37/304 ,  H01J37/305 ,  H01J41/04 ,  G02F1/28

    CPC classification number: C23C14/544 ,  H01J37/304 ,  H01J37/3053 ,  H01J41/04

    Abstract: The rate of vapor deposition in a vacuum furnace heated by electron bombardment is monitored or controlled. The vapor is ionized, preferably by the same electron bombardment as produces it. The ionized vapor radiates light which is detected at one or more locations within the furnace, preferably by a photomultiplier optically coupled by a light pipe to the interior of the furnace. The light detector produces a signal indicative of the intensity of the light detected and, hence, of the vapor density. Optical filters may be used to pass light of frequency characteristic of particular elements, so that the relative intensity of the particular elements in the vapor may be selectively detected. The signals may be recorded or used to control the heating and, hence, vapor density, as by controlling the electron emission from an electron gun.

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