公开(公告)号：US20090135413A1

公开(公告)日：2009-05-28

申请号：US12349206

申请日：2009-01-06

Applicant: Shigeru Matsui

Inventor： Shigeru Matsui

IPC: G01N21/88

CPC classification number: G01N21/9501 ,  G01N21/47

Abstract: When detecting light scattered by an object to be inspected by using a pulse laser as a light source, noise increases unless a sampling repletion period of an A/D converter is determined so as to be related to a pulse oscillation repetition period of the light source. (1) The sampling repletion period of the A/D converter is set equal to the pulse oscillation repetition period of the light source or an integer times thereof, and the sampling is synchronized with oscillation of the light source. Or (2) the sampling repletion period of the A/D converter is set equal to a half-integer times the pulse oscillation repetition period of the light source. Even if a ripple component resulting from emission pulses of the light source remains in the scattered light signal supplied to the A/D converter remains, therefore, its influence can be eliminated or reduced.

Abstract translation: 当通过使用脉冲激光器作为光源检测被检查物体散射的光时，噪声增加，除非确定A / D转换器的采样恢复周期以与光源的脉冲振荡重复周期相关 。 （1）A / D转换器的采样补偿周期被设定为等于光源的脉冲振荡重复周期或其整数倍，采样与光源的振荡同步。 或者（2）将A / D转换器的采样恢复周期设定为等于光源的脉冲振荡重复周期的半个整数倍。 即使由于光源的发射脉冲而产生的纹波分量残留在供给A / D转换器的散射光信号中，因此可以消除或减小其影响。

公开(公告)号：US07487049B2

公开(公告)日：2009-02-03

申请号：US11826088

申请日：2007-07-12

Applicant: Shigeru Matsui

Inventor： Shigeru Matsui

IPC: G01N21/88

CPC classification number: G01N21/9501 ,  G01N21/47

Abstract: When detecting light scattered by an object to be inspected by using a pulse laser as a light source, noise increases unless a sampling repletion period of an A/D converter is determined so as to be related to a pulse oscillation repetition period of the light source. (1) The sampling repletion period of the A/D converter is set equal to the pulse oscillation repetition period of the light source or an integer times thereof, and the sampling is synchronized with oscillation of the light source. Or (2) the sampling repletion period of the A/D converter is set equal to a half-integer times the pulse oscillation repetition period of the light source. Even if a ripple component resulting from emission pulses of the light source remains in the scattered light signal supplied to the A/D converter remains, therefore, its influence can be eliminated or reduced.

Abstract translation: 当通过使用脉冲激光器作为光源检测被检查物体散射的光时，噪声增加，除非确定A / D转换器的采样恢复周期以与光源的脉冲振荡重复周期相关 。 （1）A / D转换器的采样补偿周期被设定为等于光源的脉冲振荡重复周期或其整数倍，采样与光源的振荡同步。 或者（2）将A / D转换器的采样恢复周期设定为等于光源的脉冲振荡重复周期的半个整数倍。 即使由于光源的发射脉冲而产生的纹波分量残留在供给A / D转换器的散射光信号中，因此可以消除或减小其影响。

公开(公告)号：US07457455B2

公开(公告)日：2008-11-25

申请号：US10995512

申请日：2004-11-24

Applicant: Shigeru Matsui ,  Katsuya Suzuki

Inventor： Shigeru Matsui ,  Katsuya Suzuki

IPC: G06K9/00

CPC classification number: G06T7/001 ,  G01N21/95607 ,  G03F7/7065 ,  G06T2207/30148

Abstract: The pattern defect inspection apparatus is operable to detect defects by comparing a detection image, which is obtained through scanning by an image sensor those patterns that have the identical shape and are continuously disposed on the object under tested at equal intervals in row and column directions, with a reference image obtained by scanning neighboring identical shape patterns in the row and column directions. This apparatus has a unit for generating an average reference image by statistical computation processing from the images of identical shape patterns lying next to the detection image including at least eight nearest chips on the up-and-down and right-and-left sides and at diagonal positions with the detection image being intermediately situated. The apparatus also includes a unit that detects a defect by comparing the detection image to the average reference image thus generated.

Abstract translation: 图案缺陷检查装置可以通过将通过图像传感器进行扫描而得到的检测图像进行比较来检测缺陷，所述检测图像具有相同形状且连续设置在被检测物体上的行和列方向上等间隔的那些图案， 具有通过扫描行和列方向上的相邻相同形状图案而获得的参考图像。 该装置具有用于通过统计计算处理从邻近检测图像的相同形状图案的图像生成平均参考图像的单元，该检测图像包括上下左右侧至少八个最近的码片，以及在 对角位置，检测图像位于中间位置。 该装置还包括通过将检测图像与由此生成的平均参考图像进行比较来检测缺陷的单元。

公开(公告)号：US07417720B2

公开(公告)日：2008-08-26

申请号：US11522399

申请日：2006-09-18

Applicant: Masami Iizuka ,  Shigeru Matsui ,  Tadashi Suzuki ,  Hiroshi Goto ,  Takayuki Ono

Inventor： Masami Iizuka ,  Shigeru Matsui ,  Tadashi Suzuki ,  Hiroshi Goto ,  Takayuki Ono

IPC: G01N21/00

CPC classification number: G01N21/8806 ,  G01N21/21 ,  G01N21/9501 ,  G01N2021/9513

Abstract: A lighting optical machine and defect inspection system having high reliability and safety when a laser beam is used as a light source. The lighting optical machine comprises: a housing, which accommodates a laser source, a beam deflection mechanism having first and second plane mirrors enabling a beam emitted from the laser source to be reflected so that the beam travels in the direction almost parallel to the beam emitted from the laser source, a beam expander for converting the beam to a parallel beam having a larger cross-sectional area, an objective lens, through which the parallel beam is reduced and applied to the surface of a sample; a first control mechanism for controlling the directions of the two plane mirrors of the beam deflection mechanism with an electric signal; and a second control mechanism for controlling the focus position of the beam expander with an electric signal.

Abstract translation: 当使用激光束作为光源时，具有高可靠性和安全性的照明光学机器和缺陷检查系统。 照明光学机器包括：容纳激光源的壳体，具有第一和第二平面镜的光束偏转机构，其使得能够反射从激光源发射的光束，使得光束在几乎平行于发射的光束的方向上行进 来自激光源的光束扩展器，用于将光束转换成具有较大截面面积的平行光束，物镜，平行光束通过该物镜被还原并施加到样品的表面; 用于以电信号控制所述光束偏转机构的两个平面镜的方向的第一控制机构; 以及用电信号控制光束扩展器的聚焦位置的第二控制机构。

公开(公告)号：US20080059083A1

公开(公告)日：2008-03-06

申请号：US11976015

申请日：2007-10-19

Applicant: Takanori Ninomiya ,  Seiji Isogai ,  Shigeru Matsui ,  Toshiei Kurosaki

Inventor： Takanori Ninomiya ,  Seiji Isogai ,  Shigeru Matsui ,  Toshiei Kurosaki

IPC: G01B11/30

CPC classification number: H01L21/67288 ,  G01N21/9501 ,  G01N23/22 ,  G01N2021/8861 ,  G06T7/0004 ,  G06T7/73 ,  G06T2207/30148 ,  H01J37/28 ,  H01J2237/24592

Abstract: Based on a plurality of defects' position-coordinates and attribute detected by an inspecting apparatus, defects that are easily detectable by an observing apparatus are selected. With these selected defects employed as the indicator, the observing apparatus detects and observes the defects. Moreover, creating a coordinate transformation formula for representing a correlated relationship in the defects' position-coordinates between both the apparatuses, the observing apparatus transforms the defects' position-coordinates so as to observe the defects.

Abstract translation: 基于检查装置检测到的多个缺陷的位置坐标和属性，选择由观察装置容易检测到的缺陷。 利用这些选择的缺陷作为指标，观察装置检测并观察缺陷。 此外，创建用于表示两个装置之间的缺陷位置坐标中的相关关系的坐标变换公式，观察装置转换缺陷位置坐标以观察缺陷。

公开(公告)号：US20080007725A1

公开(公告)日：2008-01-10

申请号：US11822330

申请日：2007-07-05

Applicant: Takahiro Togashi ,  Shigeru Matsui

Inventor： Takahiro Togashi ,  Shigeru Matsui

IPC: G01N21/88

CPC classification number: G01N21/9501 ,  G01N21/94 ,  G01N2021/8861 ,  G01N2021/8874 ,  G01N2021/95676

Abstract: A method and equipment which includes an illustrated-spot illumination-distribution data table for storing an illumination distribution within an illustrated spot and which calculates a coordinate position for a particle or a defect and the diameter of the particle on the basis of detection light intensity data about the particle or defect and the illustrated-spot illumination-distribution data table. Thus, even when the illumination distribution within the illustrated spot based on an actual illumination optical system is not a Gaussian distribution, the calculation of the particle diameter of the detected particle or defect and the calculation of a coordinate position on the surface of an object to be inspected can be attained with an increased accuracy.

公开(公告)号：US20070008521A1

公开(公告)日：2007-01-11

申请号：US11522399

申请日：2006-09-18

Applicant: Masami Iizuka ,  Shigeru Matsui ,  Tadashi Suzuki ,  Hiroshi Goto ,  Takayuki Ono

Inventor： Masami Iizuka ,  Shigeru Matsui ,  Tadashi Suzuki ,  Hiroshi Goto ,  Takayuki Ono

IPC: G01N21/88

CPC classification number: G01N21/8806 ,  G01N21/21 ,  G01N21/9501 ,  G01N2021/9513

Abstract: A lighting optical machine and defect inspection system having high reliability and safety when a laser beam is used as a light source. The lighting optical machine comprises: a housing, which accommodates a laser source, a beam polarization mechanism having first and second plane mirrors enabling a beam emitted from the laser source to be reflected so that the beam travels in the direction almost parallel to the beam emitted from the laser source, a beam expander for converting the beam to a parallel beam having a larger cross-sectional area, an objective lens, through which the parallel beam is reduced and applied to the surface of a sample; a first control mechanism for controlling the directions of the two plane mirrors of the beam polarization mechanism with an electric signal; and a second control mechanism for controlling the focus position of the beam expander with an electric signal.

Abstract translation: 当使用激光束作为光源时，具有高可靠性和安全性的照明光学机器和缺陷检查系统。 照明光学机器包括：容纳激光源的壳体，具有第一和第二平面镜的光束偏振机构，其使得能够反射从激光源发射的光束，使得光束在几乎平行于发射的光束的方向上行进 来自激光源的光束扩展器，用于将光束转换成具有较大截面面积的平行光束，物镜，平行光束通过该物镜被还原并施加到样品的表面; 用于以电信号控制所述光束偏振机构的两个平面镜的方向的第一控制机构; 以及用电信号控制光束扩展器的聚焦位置的第二控制机构。

公开(公告)号：US07133127B2

公开(公告)日：2006-11-07

申请号：US10612148

申请日：2003-07-03

Applicant: Masami Iizuka ,  Shigeru Matsui ,  Tadashi Suzuki ,  Hiroshi Goto ,  Takayuki Ono

Inventor： Masami Iizuka ,  Shigeru Matsui ,  Tadashi Suzuki ,  Hiroshi Goto ,  Takayuki Ono

IPC: G01N21/00

CPC classification number: G01N21/8806 ,  G01N21/21 ,  G01N21/9501 ,  G01N2021/9513

Abstract: A lighting optical machine and defect inspection system having high reliability and safety when a laser beam is used as a light source. The lighting optical machine comprises: a housing, which accommodates a laser source, a beam polarization mechanism having first and second plane mirrors enabling a beam emitted from the laser source to be reflected so that the beam travels in the direction almost parallel to the beam emitted from the laser source, a beam expander for converting the beam to a parallel beam having a larger cross-sectional area, an objective lens, through which the parallel beam is reduced and applied to the surface of a sample; a first control mechanism for controlling the directions of the two plane mirrors of the beam polarization mechanism with an electric signal; and a second control mechanism for controlling the focus position of the beam expander with an electric signal.

Abstract translation: 当使用激光束作为光源时，具有高可靠性和安全性的照明光学机器和缺陷检查系统。 照明光学机器包括：容纳激光源的壳体，具有第一和第二平面镜的光束偏振机构，其使得能够反射从激光源发射的光束，使得光束在几乎平行于发射的光束的方向上行进 来自激光源的光束扩展器，用于将光束转换成具有较大截面面积的平行光束，物镜，平行光束通过该物镜被还原并施加到样品的表面; 用于以电信号控制所述光束偏振机构的两个平面镜的方向的第一控制机构; 以及用电信号控制光束扩展器的聚焦位置的第二控制机构。

公开(公告)号：US07010447B2

公开(公告)日：2006-03-07

申请号：US10888021

申请日：2004-07-12

Applicant: Takanori Ninomiya ,  Seiji Isogai ,  Shigeru Matsui ,  Toshiei Kurosaki

Inventor： Takanori Ninomiya ,  Seiji Isogai ,  Shigeru Matsui ,  Toshiei Kurosaki

IPC: G01B5/28 ,  G01B5/30 ,  G06F19/00

CPC classification number: H01L21/67288 ,  G01N21/9501 ,  G01N23/22 ,  G01N2021/8861 ,  G06T7/0004 ,  G06T7/73 ,  G06T2207/30148 ,  H01J37/28 ,  H01J2237/24592

Abstract: Based on a plurality of defects' position-coordinates and attribute detected by an inspecting apparatus, defects that are easily detectable by an observing apparatus are selected. With these selected defects employed as the indicator, the observing apparatus detects and observes the defects. Moreover, creating a coordinate transformation formula for representing a correlated relationship in the defects' position-coordinates between both the apparatuses, the observing apparatus transforms the defects' position-coordinates so as to observe the defects.

公开(公告)号：US06331967B1

公开(公告)日：2001-12-18

申请号：US09522075

申请日：2000-03-09

Applicant: Shigeru Matsui ,  Noboru Yashima ,  Naoki Kizu ,  Kazuhiro Sugiyama ,  Yukari Hiratsuka

Inventor： Shigeru Matsui ,  Noboru Yashima ,  Naoki Kizu ,  Kazuhiro Sugiyama ,  Yukari Hiratsuka

IPC: G11B700

CPC classification number: G11B19/247

Abstract: In a device for controlling rotation of a disk, if a determination is made that a signal is not normally detected by a pre-pit-region detection circuit, an error signal is obtained from a pulse generator to control the rotation of the disk. If a determination is made that a signal is normally detected by the pre-pit-region detection circuit and if the synchronizing signals are not normally detected at predetermined intervals, an error signal is obtained from the wobble signal so that the rotations of the disk are controlled. If a determination is made that synchronizing signals are detected by the pre-pit-region detection circuit at predetermined intervals, an error signal is obtained from clocks synchronized with the reproduced signal generated by the PLL circuit so that rotations of the disk are controlled.

Abstract translation: 在用于控制盘的旋转的装置中，如果确定信号未被预凹坑区域检测电路正常检测到，则从脉冲发生器获得误差信号以控制盘的旋转。 如果通过预凹坑区域检测电路确定正常地检测到信号，并且如果以预定的间隔正常地检测到同步信号，则从摆动信号获得误差信号，使得盘的旋转为 受控。 如果确定预定间隔检测电路以预定间隔检测同步信号，则从与PLL电路产生的再现信号同步的时钟获得误差信号，从而控制盘的旋转。