Defect inspection method and device therefor
    8.
    发明授权
    Defect inspection method and device therefor 有权
    缺陷检查方法及其设备

    公开(公告)号:US08711347B2

    公开(公告)日:2014-04-29

    申请号:US13701030

    申请日:2011-05-25

    IPC分类号: G01N21/00

    摘要: Disclosed is a defect inspection method which makes it possible to scan the entire surface of a sample and detect minute defects without causing thermal damage to the sample. A defect inspection method in which a pulse laser emitted from a light source is subjected to pulse division and irradiated on the surface of a sample which moves in one direction while the divided-pulse pulse laser is rotated, reflection light from the sample irradiated by the divided-pulse pulse laser is detected, the signal of the detected reflection light is processed to detect defects on the sample, and information regarding a detected defect is output to a display screen, wherein the barycentric position of the light intensity of the divided-pulse pulse laser is monitored and adjusted.

    摘要翻译: 公开了一种缺陷检查方法,其可以扫描样品的整个表面并检测微小缺陷而不会对样品造成热损伤。 对从光源射出的脉冲激光进行脉冲分割并照射在分割脉冲激光器旋转时在一个方向上移动的样品的表面的缺陷检查方法中, 检测出分割脉冲脉冲激光,检测出反射光的信号,以检测样本上的缺陷,将与检测到的缺陷有关的信息输出到显示画面,其中分割脉冲的光强度的重心位置 脉冲激光被监测和调整。

    Scatterometer-interferometer and method for detecting and distinguishing characteristics of surface artifacts
    9.
    发明授权
    Scatterometer-interferometer and method for detecting and distinguishing characteristics of surface artifacts 失效
    散射计 - 干涉仪和用于检测和区分表面伪影特征的方法

    公开(公告)号:US07671978B2

    公开(公告)日:2010-03-02

    申请号:US11739210

    申请日:2007-04-24

    IPC分类号: G01N21/00 G01B11/02

    摘要: A scatterometer-interferometer and method for detecting and distinguishing characteristics of surface artifacts provides improved artifact detection and increased scanning speed in interferometric measurement systems. A scatterometer and interferometer are combined in a single measurement head and may have overlapping, concentric or separate measurement spots. Interferometric sampling of a surface under measurement may be initiated in response to detection of a surface artifact by the scatterometer, so that continuous scanning of the surface under measurement can be performed until further information about the size and/or height of the artifact is needed.

    摘要翻译: 用于检测和区分表面伪影特征的散射仪干涉仪和方法在干涉测量系统中提供改进的伪像检测和增加的扫描速度。 散射仪和干涉仪组合在单个测量头中,并且可以具有重叠的,同心的或分开的测量点。 可以响应于通过散射仪的表面伪影的检测而启动测量下的表面的干涉采样,从而可以执行测量下的表面的连续扫描,直到需要有关伪像大小和/或高度的更多信息。

    Method for detecting particles and defects and inspection equipment thereof
    10.
    发明授权
    Method for detecting particles and defects and inspection equipment thereof 失效
    检测颗粒和缺陷的方法及其检测设备

    公开(公告)号:US07456948B2

    公开(公告)日:2008-11-25

    申请号:US11822330

    申请日:2007-07-05

    IPC分类号: G01N21/88 G01N21/86

    摘要: A method and equipment which includes an illustrated-spot illumination-distribution data table for storing an illumination distribution within an illustrated spot and which calculates a coordinate position for a particle or a defect and the diameter of the particle on the basis of detection light intensity data about the particle or defect and the illustrated-spot illumination-distribution data table. Thus, even when the illumination distribution within the illustrated spot based on an actual illumination optical system is not a Gaussian distribution, the calculation of the particle diameter of the detected particle or defect and the calculation of a coordinate position on the surface of an object to be inspected can be attained with an increased accuracy.

    摘要翻译: 一种方法和设备,其包括用于存储所示斑点内的照明分布的示出点照度分布数据表,并且基于检测光强度数据计算颗粒或缺陷的坐标位置和颗粒的直径 关于颗粒或缺陷以及所示的点光照度分布数据表。 因此,即使在基于实际的照明光学系统的所示光点内的照明分布不是高斯分布的情况下,检测出的粒子或缺陷的粒径的计算以及物体表面上的坐标位置的计算 被检查可以提高准确度。