Confocal surface topography measurement with fixed focal positions

    公开(公告)号:US10281266B2

    公开(公告)日:2019-05-07

    申请号:US15906616

    申请日:2018-02-27

    Abstract: An apparatus is described for measuring surface topography of a three-dimensional structure. In many embodiments, the apparatus is configured to focus each of a plurality of light beams to a respective fixed focal position relative to the apparatus. The apparatus measures a characteristic of each of a plurality of returned light beams that are generated by illuminating the three-dimensional structure with the light beams. The characteristic is measured for a plurality of different positions and/or orientations between the apparatus and the three-dimensional structure. Surface topography of the three-dimensional structure is determined based at least in part on the measured characteristic of the returned light beams for the plurality of different positions and/or orientations between the apparatus and the three-dimensional structure.

    THREE DIMENSIONAL IMAGING APPARATUS WITH COLOR SENSOR

    公开(公告)号:US20180367786A1

    公开(公告)日:2018-12-20

    申请号:US15953268

    申请日:2018-04-13

    Abstract: An imaging apparatus includes a first and second light source, focusing optics, a probe, a detector, an optical transmission medium and a color sensor. The first light source is to generate light beams that travel through the focusing optics along an optical path to the probe. The probe directs the light beams toward a three dimensional object to be imaged. The detector detects returning light beams that are reflected off of the three dimensional object and directed back through the probe and the focusing optics. The second light source is to generate multi-chromatic light. The optical transmission medium is outside of the optical path and is to receive a ray of the multi-chromatic light reflected off of a spot on the three dimensional object and through the probe. The color sensor is to receive the ray from the optical transmission medium and determine a color of the spot on the three dimensional object.

    VCSEL based low coherence emitter for confocal 3D scanner

    公开(公告)号:US10148066B2

    公开(公告)日:2018-12-04

    申请号:US15490531

    申请日:2017-04-18

    Abstract: Methods and apparatus for measuring objects comprise a plurality of light sources to generate a plurality of light beams directed toward a spot generator array comprising a plurality of spot generating lenses. The plurality of light sources is separated from the spot generator array with a separation distance sufficient to overlap the plurality of light beams at each of the spot generating lenses. The overlap of each of the beams at each of the spot generating lenses provides smoothing of the energy profile of the light energy incident on the spot generating lenses. The spot generator array generates focused spots comprising overlapping focused beams. The overlapping beams may comprise overlapping beams of a vertical cavity surface emitting laser (VCSEL) array, and the overlapping focused beams can decrease optical artifacts.

    VCSEL BASED LOW COHERENCE EMITTER FOR CONFOCAL 3D SCANNER
    117.
    发明申请
    VCSEL BASED LOW COHERENCE EMITTER FOR CONFOCAL 3D SCANNER 有权
    用于协同3D扫描仪的基于VCSEL的低相干发射器

    公开(公告)号:US20160064898A1

    公开(公告)日:2016-03-03

    申请号:US14470832

    申请日:2014-08-27

    Abstract: Methods and apparatus for measuring objects comprise a plurality of light sources to generate a plurality of light beams directed toward a spot generator array comprising a plurality of spot generating lenses. The plurality of light sources is separated from the spot generator array with a separation distance sufficient to overlap the plurality of light beams at each of the spot generating lenses. The overlap of each of the beams at each of the spot generating lenses provides smoothing of the energy profile of the light energy incident on the spot generating lenses. The spot generator array generates focused spots comprising overlapping focused beams. The overlapping beams may comprise overlapping beams of a vertical cavity surface emitting laser (VCSEL) array, and the overlapping focused beams can decrease optical artifacts.

    Abstract translation: 用于测量物体的方法和装置包括多个光源,以产生指向包括多个点产生透镜的点发生器阵列的多个光束。 多个光源与点发生器阵列分开,间隔距离足以与每个点产生透镜上的多个光束重叠。 每个光斑产生透镜中的每个光束的重叠提供了入射在光斑产生透镜上的光能的能量分布的平滑。 点发生器阵列产生聚焦点,其包括重叠的聚焦光束。 重叠光束可以包括垂直腔表面发射激光器(VCSEL)阵列的重叠光束,并且重叠的聚焦光束可以减少光学伪影。

    CONFOCAL IMAGING APPARATUS WITH CURVED FOCAL SURFACE
    118.
    发明申请
    CONFOCAL IMAGING APPARATUS WITH CURVED FOCAL SURFACE 有权
    具有弯曲焦点表面的共焦成像装置

    公开(公告)号:US20160045291A1

    公开(公告)日:2016-02-18

    申请号:US14825173

    申请日:2015-08-13

    Abstract: A confocal imaging apparatus includes an illumination module to generate an array of light beams. Focusing optics perform confocal focusing of an array of light beams onto a non-flat focal surface and direct the array of light beams toward a three dimensional object to be imaged. A translation mechanism adjusts a location of at least one lens to displace the non-flat focal surface along an imaging axis. A detector measures intensities of an array of returning light beams that are reflected off of the three dimensional object and directed back through the focusing optics. Intensities of the array of returning light beams are measured for locations of the at least one lens for determination of positions on the imaging axis of points of the three dimensional object. Detected positions of one or more points are adjusted to compensate for the non-flat focal surface.

    Abstract translation: 共焦成像装置包括用于产生光束阵列的照明模块。 聚焦光学器件将光束阵列的共聚焦聚焦执行到非平坦焦点表面上,并将光束阵列引向待成像的三维物体。 平移机构调节至少一个透镜的位置以沿成像轴移动非平坦焦点表面。 检测器测量从三维物体反射并返回通过聚焦光学器件的返回光束阵列的强度。 测量返回光束阵列的强度用于确定三维物体的点的成像轴上的位置的至少一个透镜的位置。 调整一个或多个点的检测位置以补偿非平坦焦点表面。

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