公开(公告)号：US20050168795A1

公开(公告)日：2005-08-04

申请号：US11089692

申请日：2005-03-24

Applicant: Andrew Huibers

Inventor： Andrew Huibers

IPC: G02B26/08 ,  G03F9/00 ,  G02B26/00

CPC classification number: G02B26/0833 ,  G02B26/08 ,  G02B26/0841 ,  Y10S359/904

Abstract: A spatial light modulator includes an upper optically transmissive substrate held above a lower substrate containing addressing circuitry. One or more electrostatically deflectable elements are suspended by hinges from the upper substrate. In operation, individual mirrors are selectively deflected and serve to spatially modulate light that is incident to, and then reflected back through, the upper substrate. Motion stops may be attached to the reflective deflectable elements so that the mirror does not snap to the bottom substrate. Instead, the motion stop rests against the upper substrate thus limiting the deflection angle of the reflective deflectable elements.

公开(公告)号：US20050111074A1

公开(公告)日：2005-05-26

申请号：US11001807

申请日：2004-12-01

Applicant: Andrew Huibers

Inventor： Andrew Huibers

IPC: G02B26/08 ,  G02B26/00

CPC classification number: G02B26/0833 ,  G02B26/08 ,  G02B26/0841 ,  Y10S359/904

Abstract: A spatial light modulator includes an upper optically transmissive substrate held above a lower substrate containing addressing circuitry. One or more electrostatically deflectable elements are suspended by hinges from the upper substrate. In operation, individual mirrors are selectively deflected and serve to spatially modulate light that is incident to, and then reflected back through, the upper substrate. Motion stops may be attached to the reflective deflectable elements so that the mirror does not snap to the bottom substrate. Instead, the motion stop rests against the upper substrate thus limiting the deflection angle of the reflective deflectable elements.

Abstract translation: 空间光调制器包括保持在包含寻址电路的下基板上的上透光基板。 一个或多个静电可偏转元件通过铰链从上基板悬挂。 在操作中，单独的反射镜被选择性地偏转并且用于空间调制入射到上基板上并随后被上反射回的光。 运动止挡件可以附接到反射偏转元件，使得反射镜不卡扣到底部基板。 相反，运动停止件靠在上基板上，从而限制反射可偏转元件的偏转角。

公开(公告)号：US07636190B2

公开(公告)日：2009-12-22

申请号：US11418968

申请日：2006-05-05

Applicant: Andrew Huibers

Inventor： Andrew Huibers

IPC: G02B26/00

CPC classification number: H04N9/3188 ,  H04N5/7458 ,  H04N9/3114

Abstract: Disclosed herein is a method of projecting images using reflective light valves. Pixel patterns generated of the light valve pixels based on image data are projected at different locations at a time such that the perceived resolution of the projected images can be higher than the total number of pixels in the light valve.

Abstract translation: 这里公开了一种使用反射光阀投影图像的方法。 基于图像数据的光阀像素产生的像素图案被投影在不同的位置，使得投影图像的感知分辨率可以高于光阀中的像素总数。

公开(公告)号：US07407291B2

公开(公告)日：2008-08-05

申请号：US11145466

申请日：2005-06-03

Applicant: Regis Grasser ,  Andrew Huibers

Inventor： Regis Grasser ,  Andrew Huibers

IPC: G03B21/28 ,  G03B21/14

CPC classification number: H04N5/7458 ,  G03B21/2073

Abstract: The micromirror-based projection system of the present invention uses polarized illumination light in producing desired images on a display target. The display target has coated thereon a polarization film that absorbs most of the ambient light that would be incident onto the display target otherwise. Polarized illumination light is provided incident to the reflective surfaces of the spatial light modulator. The polarization direction of the illumination light can be associated with the rotation axes of the micromirrors and the polarization direction of the polarized film on the display target.

Abstract translation: 本发明的基于微镜的投影系统使用偏振照明光来产生显示目标上的所需图像。 显示目标涂覆有偏振膜，该偏振膜吸收将会入射到显示目标上的大部分环境光，否则。 偏振照明光入射到空间光调制器的反射表面。 照明光的偏振方向可以与微镜的旋转轴和显示目标上的偏振膜的偏振方向相关联。

公开(公告)号：US20080096313A1

公开(公告)日：2008-04-24

申请号：US11954076

申请日：2007-12-11

Applicant: Satayadev Patel ,  Andrew Huibers ,  Steve Chiang ,  Robert Duboc ,  Thomas Grobelny ,  Hung Nan Chen ,  Dietrich Dehlinger ,  Peter Richards ,  Hongqin Shi ,  Anthony Sun

Inventor： Satayadev Patel ,  Andrew Huibers ,  Steve Chiang ,  Robert Duboc ,  Thomas Grobelny ,  Hung Nan Chen ,  Dietrich Dehlinger ,  Peter Richards ,  Hongqin Shi ,  Anthony Sun

IPC: H01L21/48

CPC classification number: B81B7/0077 ,  B81B2201/042 ,  B81C1/00269 ,  B81C1/00904 ,  B81C2203/0118 ,  B82Y30/00 ,  G02B26/0833 ,  G02B26/0841 ,  H01L24/97 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01018 ,  H01L2924/01019 ,  H01L2924/0102 ,  H01L2924/01023 ,  H01L2924/01027 ,  H01L2924/01033 ,  H01L2924/01039 ,  H01L2924/01049 ,  H01L2924/01054 ,  H01L2924/01072 ,  H01L2924/01074 ,  H01L2924/01076 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/01322 ,  H01L2924/04953 ,  H01L2924/10329 ,  H01L2924/12036 ,  H01L2924/12042 ,  H01L2924/12044 ,  H01L2924/1461 ,  H01L2924/19041 ,  H01L2924/19042 ,  H01L2924/3025 ,  H01L2924/00

Abstract: A projection system, a spatial light modulator, and a method for forming a MEMS device is disclosed. The spatial light modulator can have two substrates bonded together with one of the substrates comprising a micromirror array. The two substrates can be bonded at the wafer level after depositing a getter material and/or solid or liquid lubricant on one or both of the wafers. The wafers can be bonded together hermetically if desired, and the pressure between the two substrates can be below atmosphere.

Abstract translation: 公开了投影系统，空间光调制器和用于形成MEMS器件的方法。 空间光调制器可以具有与包括微镜阵列的基板中的一个结合在一起的两个基板。 在一个或两个晶片上沉积吸气剂材料和/或固体或液体润滑剂之后，两个基底可以在晶片级粘结。 如果需要，晶片可以密封在一起，并且两个基板之间的压力可以低于大气。

公开(公告)号：US20070257872A1

公开(公告)日：2007-11-08

申请号：US11744544

申请日：2007-05-04

Applicant: Andrew Huibers

Inventor： Andrew Huibers

IPC: G09G3/34

CPC classification number: G09G3/002 ,  G09G3/007 ,  G09G3/346 ,  G09G3/3611 ,  H04N9/3114

Abstract: Disclosed herein is a method of projecting images using light valves. Pixel patterns generated of the light valve pixels based on image data are projected at different locations at a time.

Abstract translation: 本文公开了一种使用光阀投影图像的方法。 基于图像数据生成的光阀像素的像素图案一次投影在不同的位置。

公开(公告)号：US20060250587A1

公开(公告)日：2006-11-09

申请号：US11300184

申请日：2005-12-14

Applicant: Regis Grasser ,  Andrew Huibers ,  Michel Combes

Inventor： Regis Grasser ,  Andrew Huibers ,  Michel Combes

IPC: G03B21/28

CPC classification number: G03B21/14 ,  G03B21/005

Abstract: Disclosed herein is a method of projecting images using reflective light valves. Pixel patterns generated of the light valve pixels based on image data are projected at different locations at a time.

Abstract translation: 这里公开了一种使用反射光阀投影图像的方法。 基于图像数据生成的光阀像素的像素图案一次投影在不同的位置。

公开(公告)号：US20060132892A1

公开(公告)日：2006-06-22

申请号：US11340319

申请日：2006-01-25

Applicant: Andrew Huibers

Inventor： Andrew Huibers

IPC: G02B26/00

CPC classification number: G02B26/0833 ,  G02B26/08 ,  G02B26/0841 ,  Y10S359/904

Abstract: A spatial light modulator includes an upper optically transmissive substrate held above a lower substrate containing addressing circuitry. One or more electrostatically deflectable elements are suspended by hinges from the upper substrate. In operation, individual mirrors are selectively deflected and serve to spatially modulate light that is incident to, and then reflected back through, the upper substrate. Motion stops may be attached to the reflective deflectable elements so that the mirror does not snap to the bottom substrate. Instead, the motion stop rests against the upper substrate thus limiting the deflection angle of the reflective deflectable elements.

公开(公告)号：US20060077525A1

公开(公告)日：2006-04-13

申请号：US11120814

申请日：2005-05-02

Applicant: Andrew Huibers

Inventor： Andrew Huibers

IPC: G02B26/00

CPC classification number: G02B26/0833 ,  G02B26/0841 ,  H04N9/3114

Abstract: Disclosed herein is a micromirror array device package having a light blocking area for reducing unexpected light scattering from the surfaces of the posts.

Abstract translation: 本文公开了一种具有遮光区域的微镜阵列器件封装，用于减少从柱的表面发出的意外的光散射。

公开(公告)号：US20050254017A1

公开(公告)日：2005-11-17

申请号：US11169545

申请日：2005-06-28

Applicant: Andrew Huibers

Inventor： Andrew Huibers

IPC: G02B7/00 ,  G02B27/00 ,  H04N9/31 ,  G03B21/14

CPC classification number: H04N9/315 ,  G02B26/008 ,  G03B11/00 ,  G03B21/14 ,  G03B33/08 ,  H04N9/3114

Abstract: A projection system is disclosed comprising a light source, a first reflector proximate the light source, a second reflector proximate the light source, a light pipe, a color sequencing device a spatial light modulator and a target. The color sequencing device preferably directs three or more colors onto the spatial light modulator at a time. Some light is reflected from the color sequencing device back through the light pipe and is again reflected at the reflector at the light source before returning to the light pipe and color sequencing device. The brightness of the projection system is thereby increased.

Abstract translation: 公开了一种投影系统，其包括光源，靠近光源的第一反射器，靠近光源的第二反射器，光管，颜色排序装置，空间光调制器和靶。 颜色排序装置优选一次将三种或更多种颜色引导到空间光调制器上。 一些光从彩色排序装置反射回通过光管，并且在返回到光管和颜色排序装置之前再次在光源处的反射器反射。 因此投影系统的亮度增加。