ULTRA-THIN, ULTRA-LOW DENSITY FILMS FOR EUV LITHOGRAPHY

    公开(公告)号:US20230095318A1

    公开(公告)日:2023-03-30

    申请号:US18074082

    申请日:2022-12-02

    Abstract: A filtration formed nanostructure pellicle film is disclosed. The filtration formed nanostructure pellicle film includes a plurality of carbon nanofibers that are intersected randomly to form an interconnected network structure in a planar orientation. The interconnected structure allows for a high minimum EUV transmission rate of at least 92%, with a thickness ranging from a lower limit of 3 nm to an upper limit of 100 nm, to allow for effective EUV lithography processing.

    Nanofiber structure applicator
    113.
    发明授权

    公开(公告)号:US11479438B2

    公开(公告)日:2022-10-25

    申请号:US16849046

    申请日:2020-04-15

    Abstract: A nanofiber structure applicator is described that can remove two substrates from opposing major surfaces of a nanofiber structure. The two substrates can have differing adhesive strengths with the nanofiber forest. This difference in adhesive strength can be used to reorient nanofibers that form the nanofiber structure relative to the final surface on which they are applied. This reorienting of the individual nanofibers within a nanofiber structure can be used to tailor some of the properties of the nanofiber structure. Furthermore, the nanofiber structure applicator is configured can improve the convenience with which a nanofiber structure can be transported and applied to an application surface.

    Camera sweeper
    114.
    发明授权

    公开(公告)号:US11434881B2

    公开(公告)日:2022-09-06

    申请号:US16721179

    申请日:2019-12-19

    Abstract: An apparatus and method of manufacturing an apparatus that includes a rectangular frame, a first load bearing conductive support bisecting the rectangular frame lengthwise, and two artificial muscle actuators disposed on the same sides of the rectangular frame as the first load bearing conductive support on opposite sides of the first load bearing conductive support is disclosed. The apparatus includes a non-conductive platform, where the width of the frame is sufficiently wide to prevent the non-conductive platform from touching the sides of the frame when rotated about the axis of the load bearing support. The apparatus includes a device disposed in the center of the non-conductive platform. Individual actuation of the artificial muscle actuators rotates the non-conductive platform about the axis of the first load bearing conductive support.

    Heat-generating sheet for use in three-dimensional molding, and surface heat-generating article

    公开(公告)号:US11405985B2

    公开(公告)日:2022-08-02

    申请号:US16464132

    申请日:2017-11-28

    Abstract: The present disclosure provides a heat-generating sheet for use in three-dimensional molding including: a pseudo-sheet structure in which plural electrically conductive linear bodies extending unidirectionally are arranged spaced apart from each other, each of the electrically conductive linear bodies having a diameter of from 7 μm to 75 μm; and a resin protective layer provided at a side of one surface of the pseudo-sheet structure. In this heat-generating sheet for use in three-dimensional molding, the total thickness of layers provided at the side of the pseudo-sheet structure at which the resin protective layer is provided is from 1.5 times to 80 times the diameter of the electrically conductive linear bodies. The present disclosure also provides a surface heat-generating article in which the heat-generating sheet for use in three-dimensional molding is used.

    FILMS OF MULTIWALL, FEW WALL, AND SINGLE WALL CARBON NANOTUBE MIXTURES

    公开(公告)号:US20220144641A1

    公开(公告)日:2022-05-12

    申请号:US17605753

    申请日:2020-05-26

    Inventor: Marcio D. LIMA

    Abstract: Nanofiber membranes are described that include multiple layers of nanofiber structures, where each structure is a composite composition of multiwall carbon nanotubes and one or both of single wall and/or few walled carbon nanotubes. By selecting the relative proportions of multiwall and one or more of single/few wall carbon nanotubes in a nanofiber film, the membrane can be fabricated to withstand the heating that occurs during operation in an EUV lithography machine, while also having enough mechanical integrity to withstand pressure changes of between 1 atmosphere (atm) and 2 atm between operating cycles of an EUV lithography machine.

    Synchronized muscles
    117.
    发明授权

    公开(公告)号:US11311394B2

    公开(公告)日:2022-04-26

    申请号:US16677032

    申请日:2019-11-07

    Inventor: Marcio Dias Lima

    Abstract: An actuator device and method of manufacturing the same that includes at least two or more panels disposed in a frame is disclosed. Each of the two or more panels include a first rotationally-actuating artificial muscle fiber section between a first contact point of the frame and a tether point located on the panel and a second rotationally-actuating artificial muscle fiber section between the tether point and a second contact point on the frame. The tether point is approximately halfway across the length of the panel. A first and second muscle support is disposed on the panel between the tether point and the first contact point. The actuator device also includes a synchronization rod attached to the at least two or more panels.

    Hook and loop artificial muscles
    118.
    发明授权

    公开(公告)号:US11076660B2

    公开(公告)日:2021-08-03

    申请号:US16556863

    申请日:2019-08-30

    Inventor: Marcio Dias Lima

    Abstract: A method for manufacturing a separable artificial muscle fastener includes: securing one or more muscle loops of an artificial muscle fiber to a substrate such that at least a portion of the one or more muscle loops extends out from the substrate; annealing the artificial muscle fiber to retain the one or more muscle loops; and cutting and removing a portion of the one or more muscle loops to transform the one or more muscle loops into one or more muscle hooks. When the one or more muscle hooks are engaged with one or more holders, actuating the one or more muscle hooks disengages the one or more muscle hooks from the one or more holders.

    Embedded conductive wires in polymer artificial muscle actuating devices

    公开(公告)号:US11067063B2

    公开(公告)日:2021-07-20

    申请号:US16766100

    申请日:2018-11-21

    Abstract: An actuating device and a method for manufacturing an actuating device, where the method includes wrapping a conductive wire (204) around a polymer fiber (202) at a set tension, and heating the polymer fiber and wire to a temperature that exceeds the glass transition temperature of the polymer fiber for a predetermined amount of time to partially embed the conductive wire into the polymer fiber. The method also includes cooling the polymer fiber and wire to below the glass transition temperature resulting in a wired polymer fiber wherein at least part of the conductive wire is embedded in the polymer fiber.

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