公开(公告)号：US20240034629A1

公开(公告)日：2024-02-01

申请号：US18378531

申请日：2023-10-10

Applicant: LINTEC OF AMERICA, INC.

Inventor： Marcio D. LIMA

IPC: C01B32/158 ,  C01B32/159 ,  B32B7/022 ,  B32B5/12

CPC classification number: C01B32/158 ,  C01B32/159 ,  B32B7/022 ,  B32B5/12 ,  B32B2250/20 ,  B32B2262/106 ,  B32B2307/732 ,  C01B2202/02 ,  C01B2202/04 ,  C01B2202/06 ,  C01B2202/08 ,  C01B2202/34 ,  C01B2202/36 ,  C01P2004/03 ,  B82Y30/00

Abstract: Nanofiber membranes are described that include multiple layers of nanofiber structures, where each structure is a composite composition of multiwall carbon nanotubes and one or both of single wall and/or few walled carbon nanotubes. By selecting the relative proportions of multiwall and one or more of single/few wall carbon nanotubes in a nanofiber film, the membrane can be fabricated to withstand the heating that occurs during operation in an EUV lithography machine, while also having enough mechanical integrity to withstand pressure changes of between 1 atmosphere (atm) and 2 atm between operating cycles of an EUV lithography machine.

公开(公告)号：US20190282236A1

公开(公告)日：2019-09-19

申请号：US16354975

申请日：2019-03-15

Applicant: Lintec Of America, Inc.

Inventor： Akira KODAMA ,  Masakazu ISHIKAWA ,  Marcio D. LIMA

IPC: A61B17/11 ,  D02G1/02 ,  D02G3/02 ,  C01B32/158

Abstract: Nerve scaffolds are described that include a tubular outer housing fabricated from a biocompatible polymer, within which are disposed a plurality of carbon nanofiber yarns. The carbon nanofiber yarns, which can be separated by distances roughly corresponding to an average nerve fiber diameter, provide surfaces on which nerve fibers can regrow. Because the proximate carbon nanofiber yarns can support individual nerve fibers, a nerve can be regenerated with a reduced likelihood of undesirable outcomes, such as nerve pain or reduced nerve function.

公开(公告)号：US20240419062A1

公开(公告)日：2024-12-19

申请号：US18816681

申请日：2024-08-27

Applicant: LINTEC OF AMERICA, INC.

Inventor： Marcio D. LIMA ,  Takahiro UEDA

IPC: G03F1/22 ,  G03F1/64 ,  G03F7/00

Abstract: A filtration formed nanostructure pellicle film is disclosed. The filtration formed nanostructure pellicle film includes a plurality of carbon nanofibers that are intersected randomly to form an interconnected network structure in a planar orientation. The interconnected structure allows for a high minimum EUV transmission rate of at least 92%, with a thickness ranging from a lower limit of 3 nm to an upper limit of 100 nm, to allow for effective EUV lithography processing.

公开(公告)号：US20240337922A1

公开(公告)日：2024-10-10

申请号：US18618374

申请日：2024-03-27

Applicant: LINTEC OF AMERICA, INC.

Inventor： Marcio D. LIMA ,  Sergey LI ,  Hooman RAHMANI

IPC: G03F1/66 ,  B65D81/20 ,  B65D85/38 ,  G03F1/64

CPC classification number: G03F1/66 ,  B65D81/2007 ,  B65D81/2069 ,  B65D85/38 ,  G03F1/64

Abstract: A method of storing extreme ultraviolet (EUV) pellicles or pellicle film is disclosed. The method includes selecting a material, such as stainless steel or glass material, for the construction of the storage or transportation containers. Vacuum-sealed or inert-gas-filled containers are further preferred. The material maintains one or more properties of extreme ultraviolet (EUV) lithography pellicle, the one or more properties being selected from EUV transmission rate, EUV transmission variation, EUV scattering, EUV pellicle film deflection, EUV pellicle film tensile strength, or a combination thereof.

公开(公告)号：US20230341764A1

公开(公告)日：2023-10-26

申请号：US18026722

申请日：2021-09-16

Applicant: LINTEC OF AMERICA, INC.

Inventor： Marcio D. LIMA ,  Takahiro UEDA

IPC: G03F1/64

CPC classification number: G03F1/64

Abstract: An apparatus and method are described herein for providing tension to carbon nanotube films. An apparatus and method are described herein for transferring carbon nanotube films from a first frame to a second frame. An example method includes deforming a frame by one of a thermal method or a physical method, allowing the frame to return to an original shape, and providing tension to the carbon nanotube film.

公开(公告)号：US20220250009A1

公开(公告)日：2022-08-11

申请号：US17726819

申请日：2022-04-22

Applicant: LINTEC OF AMERICA, INC.

Inventor： Marcio D. LIMA

IPC: B01D67/00 ,  B01D69/12 ,  B01D71/02

Abstract: An array of discrete nanofiber films that are physically separated from one another are described. Techniques for forming the nanofiber film array are also described. Techniques for forming these structures include placing a suspension of nanofibers and/or nanoparticles on a patterned substrate. A pressure differential is applied, drawing the solvent of the suspension through holes in a mask. The nanofibers collect on an impermeable layer on the mask in a pattern corresponding to the negative features (grooves, holes, trenches) of the mask as the solvent is flowed through the holes.

公开(公告)号：US20230393456A1

公开(公告)日：2023-12-07

申请号：US18231000

申请日：2023-08-07

Applicant: LINTEC OF AMERICA, INC.

Inventor： Marcio D. LIMA ,  Takahiro UEDA

IPC: G03F1/22 ,  G03F1/64 ,  G03F7/00

CPC classification number: G03F1/22 ,  G03F1/64 ,  G03F7/70983

Abstract: A filtration formed nanostructure pellicle film is disclosed. The filtration formed nanostructure pellicle film includes a plurality of carbon nanofibers that are intersected randomly to form an interconnected network structure in a planar orientation. The interconnected structure allows for a high minimum EUV transmission rate of at least 92%, with a thickness ranging from a lower limit of 3 nm to an upper limit of 100 nm, to allow for effective EUV lithography processing.

公开(公告)号：US20220363543A1

公开(公告)日：2022-11-17

申请号：US17770812

申请日：2020-10-23

Applicant: LINTEC OF AMERICA, INC.

Inventor： Marcio D. LIMA

IPC: C01B32/168 ,  D01F9/127 ,  D04H1/4242 ,  D04H1/732 ,  B23K26/38 ,  G03F1/62

Abstract: An apparatus and method for transferring nanofiber structures (e.g., nanofiber films, nanofiber sheets, stacks of nanofiber grids, nanofiber films, nanofiber sheets, and combinations thereof) between various substrates are described. The techniques described use a soluble layer on a substrate that is subsequently dissolved, thus freeing the nanofiber structure from the substrate. This liquid phase techniques preserves the mechanical integrity and the purity of the nanofiber structures.

公开(公告)号：US20210380413A1

公开(公告)日：2021-12-09

申请号：US17403252

申请日：2021-08-16

Applicant: LINTEC OF AMERICA, INC.

Inventor： Julia BYKOVA ,  Marcio D. LIMA

IPC: C01B32/16 ,  B32B37/12

Abstract: A nanofiber yarn placement system includes a yarn dispenser assembly, and a placement assembly. The placement assembly includes a compliant flange, and a guide connected to the compliant flange. The guide defining a channel. The channel includes at least one internal surface and at least one corner defined by the at least one internal surface.

公开(公告)号：US20250004363A1

公开(公告)日：2025-01-02

申请号：US18695930

申请日：2022-09-27

Applicant: LINTEC OF AMERICA, INC.

Inventor： Marcio D. LIMA ,  Mary Viola GRAHAM ,  Takahiro UEDA

IPC: G03F1/64 ,  B82Y30/00

Abstract: A filtration formed nanostructure pellicle film with an ultra-thin zirconium coating is disclosed. The filtration formed nanostructure pellicle film includes a plurality of nanotubes that are intersected randomly to form an interconnected network structure in a planar orientation with enhanced properties, and a zirconium-coated layer. The coated interconnected structure with the zirconium-coated layer allows for a high minimum EUV transmission rate of at least 88%. The interconnected network structure has a thickness ranging from a lower limit of 3 nm to an upper limit of 100 nm, to allow for effective EUV lithography processing.