公开(公告)号：US20060047356A1

公开(公告)日：2006-03-02

申请号：US10927500

申请日：2004-08-27

Applicant: Merritt Funk ,  Wesley Natzle

Inventor： Merritt Funk ,  Wesley Natzle

IPC: G06F19/00

CPC classification number: G05B19/41865 ,  G05B2219/45031 ,  H01L22/20 ,  Y02P80/114 ,  Y02P90/20 ,  Y02P90/86

Abstract: The invention relates to controlling a semiconductor processing system. Among other things, the invention relates to a run-to-run controller to create virtual modules to control a multi-pass process performed by a multi-chamber tool during the processing of a semiconductor wafer.

Abstract translation: 本发明涉及控制半导体处理系统。 其中，本发明涉及一种运行到运行的控制器，用于创建虚拟模块以控制在半导体晶片的处理期间由多室工具执行的多遍处理。

公开(公告)号：US20060007453A1

公开(公告)日：2006-01-12

申请号：US10710447

申请日：2004-07-12

Applicant: David Horak ,  Wesley Natzle ,  Merritt Funk ,  Kevin Lally ,  Daniel Prager

Inventor： David Horak ,  Wesley Natzle ,  Merritt Funk ,  Kevin Lally ,  Daniel Prager

IPC: G06F19/00 ,  G01B11/14

CPC classification number: H01L22/20

Abstract: A system, method and program product for correcting a deviation of a dimension of a feature from a target in a semiconductor process, are disclosed. The invention determines an origin of a deviation in a feature dimension from a target dimension regardless of whether it is based on processing or metrology. Adjustments for wafer processing variation of previous process tools can be fed forward, and adjustments for the process and/or integrated metrology tools may be fed back automatically during the processing of semiconductor wafers. The invention implements process reference wafers to determine the origin in one mode, and measurement reference wafers to determine the origin of deviations in another mode.

Abstract translation: 公开了一种用于在半导体处理中校正特征尺寸与目标的偏差的系统，方法和程序产品。 本发明确定特征维度与目标维度的偏差的起源，而不管其是基于处理还是计量学。 可以向前馈送先前工艺工具的晶片处理变化的调整，并且可以在半导体晶片的处理期间自动地反馈过程和/或集成度量工具的调整。 本发明实施过程参考晶片以确定一种模式中的原点，以及测量参考晶片以确定另一种模式中偏差的起点。

公开(公告)号：US20050177269A1

公开(公告)日：2005-08-11

申请号：US11025227

申请日：2004-12-30

Applicant: Merritt Funk

Inventor： Merritt Funk

IPC: G06F3/048 ,  G05B19/418 ,  H01L21/02 ,  G06F19/00

CPC classification number: G05B19/4187 ,  G05B2219/31186 ,  G05B2219/32128 ,  G05B2219/35504 ,  G05B2219/36121 ,  G05B2219/45031 ,  Y02P90/20 ,  Y02P90/205 ,  Y02P90/86

Abstract: Graphical User Interfaces (GUIs) are presented for configuring and setting-up dynamic sensors for monitoring tool and process performance in a semiconductor processing system. The semiconductor processing system includes a number of processing tools, a number of processing modules (chambers), and a number of sensors. The graphical display is organized so that all significant parameters are clearly and logically displayed so that the user is able to perform the desired configuration and setup tasks with as little input as possible. The GUI is web-based and is viewable by a user using a web browser.

Abstract translation: 提供图形用户界面（GUI），用于配置和设置动态传感器，用于在半导体处理系统中监控工具和过程性能。 半导体处理系统包括多个处理工具，多个处理模块（室）和多个传感器。 图形显示被组织，使得所有重要参数都被清楚和逻辑地显示，使得用户能够尽可能少地输入所需的配置和设置任务。 GUI是基于Web的，并且可以由使用web浏览器的用户查看。

公开(公告)号：US20050047645A1

公开(公告)日：2005-03-03

申请号：US10951161

申请日：2004-09-28

Applicant: Merritt Funk ,  Wei Chen

Inventor： Merritt Funk ,  Wei Chen

IPC: G06F3/14 ,  G05B19/418 ,  G06F3/00 ,  G06F9/44 ,  G06K9/00 ,  H01L21/02

CPC classification number: G05B19/41865 ,  G05B2219/31334 ,  G05B2219/32128 ,  G05B2219/45031 ,  Y02P90/14 ,  Y02P90/16 ,  Y02P90/18 ,  Y02P90/185 ,  Y02P90/20 ,  Y02P90/26 ,  Y02P90/86

Abstract: A GUI is presented for managing a semiconductor processing system that is comprehensible and standardized in format. The graphical display is organized so that all significant parameters are clearly and logically displayed so that the user is able to perform the desired data collection, monitoring, modeling, and troubleshooting tasks with as little input as possible. The GUI is web-based and is viewable by a user using a web browser. The GUI allows a user to display real-time tool and process module statuses based upon process module events and alarm messages, historical data numerically and/or graphically, SPC charts, APC system logs, and Alarm logs. In addition, the GUI allows a user to print graphs and reports, to save data to files, to export data, to import data, and set up or modify the system.

Abstract translation: 提供了一种用于管理可理解和标准化的半导体处理系统的GUI。 图形显示被组织，使得所有重要的参数都被清楚和逻辑地显示，使得用户能够尽可能少的输入来执行期望的数据收集，监视，建模和故障排除任务。 GUI是基于Web的，并且可以由使用web浏览器的用户查看。 GUI允许用户基于过程模块事件和报警消息，数字和/或图形历史数据，SPC图表，APC系统日志和报警日志来显示实时工具和过程模块状态。 此外，GUI允许用户打印图形和报告，将数据保存到文件，导出数据，导入数据以及设置或修改系统。