Silicon carbide piezoresistive pressure transducer and method of fabrication
    131.
    发明授权
    Silicon carbide piezoresistive pressure transducer and method of fabrication 有权
    碳化硅压阻式压力传感器及其制造方法

    公开(公告)号:US07819015B2

    公开(公告)日:2010-10-26

    申请号:US12380897

    申请日:2009-03-05

    Inventor: Anthony D. Kurtz

    CPC classification number: G01L9/0042

    Abstract: A high temperature pressure transducer is fabricated from silicon carbide. A wafer of silicon carbide has reduced or active areas which act as deflecting diaphragms. Positioned on the reduced or active area is a silicon carbide sensor. The sensor is secured to the silicon carbide wafer by a glass bond. The pressure transducer is fabricated by first epitaxially growing a layer of highly N-doped 3C silicon carbide on a first silicon wafer or substrate. A second wafer of silicon carbide is selected to be a carrier wafer. The carrier wafer is etched preferentially to produce the deflecting members or reduced areas which serve as diaphragms. The 3C material on the silicon slice is patterned appropriately to provide a series of individual piezoresistors which then may be interconnected to form a Wheatstone bridge. The two wafers are joined together using a high temperature glass frit, such as a pyroceram, with the various resistor elements appropriately placed over the deflecting members of the silicon carbide wafer. The silicon on the silicon wafer is removed and various metallic contacts and interconnects are formed on the 3C silicon carbide resistor network.

    Abstract translation: 高温压力传感器由碳化硅制成。 碳化硅晶片具有减小的或有效的区域,其作为偏转膜片。 位于还原或有源区域的是碳化硅传感器。 传感器通过玻璃粘合固定在碳化硅晶片上。 通过在第一硅晶片或衬底上首先外延生长高N掺杂的3C碳化硅的层来制造压力传感器。 碳化硅的第二晶片被选择为载体晶片。 优先蚀刻载体晶片以产生用作隔膜的偏转构件或缩小区域。 硅片上的3C材料被适当地图案化以提供一系列单独的压敏电阻器,然后其可以互连以形成惠斯通电桥。 使用高温玻璃料(例如热解油)将两个晶片连接在一起,其中各种电阻元件适当地放置在碳化硅晶片的偏转构件上。 去除硅晶片上的硅,并在3C碳化硅电阻网络上形成各种金属触点和互连。

    Internally switched multiple range transducer
    132.
    发明申请
    Internally switched multiple range transducer 有权
    内部切换多范围传感器

    公开(公告)号:US20100257936A1

    公开(公告)日:2010-10-14

    申请号:US12384821

    申请日:2009-04-09

    CPC classification number: G01L9/0054 G01L9/00 G01L9/06 G01L15/00

    Abstract: There is disclosed an internally switched multiple range transducer. The transducer employs a plurality of individual pressure sensors or Wheatstone bridges fabricated from semiconductor materials and utilizing piezoresistors. Each sensor is designed to accommodate accurately a given pressure range, therefore, each sensor is selected to provide an output when an applied pressure is within its accommodated range. As soon as the pressure exceeds the range, then another sensor is employed to produce an output. Each of the sensors, or each separate transducer, is coupled to a switch or other device to enable the selection of one of the plurality of sensors to operate within its given pressure range when the applied pressure is in that range. In this manner one obtains pressure measurements with a high degree of accuracy across a relatively large pressure range.

    Abstract translation: 公开了一种内部切换的多范围换能器。 传感器采用多个单独的压力传感器或由半导体材料制成的惠斯通电桥,并利用压敏电阻。 每个传感器被设计成准确地适应给定的压力范围,因此,当所施加的压力在其容纳范围内时,选择每个传感器以提供输出。 一旦压力超过该范围,则使用另一传感器来产生输出。 每个传感器或每个单独的换能器耦合到开关或其他装置,以使得当所施加的压力在该范围内时,多个传感器之一的选择能够在其给定的压力范围内操作。 以这种方式,在相对较大的压力范围内以高精度获得压力测量。

    SENSOR ARRAY FOR A HIGH TEMPERATURE PRESSURE TRANSDUCER EMPLOYING A METAL DIAPHRAGM
    133.
    发明申请
    SENSOR ARRAY FOR A HIGH TEMPERATURE PRESSURE TRANSDUCER EMPLOYING A METAL DIAPHRAGM 有权
    用于采用金属膜的高温压力传感器的传感器阵列

    公开(公告)号:US20100107771A1

    公开(公告)日:2010-05-06

    申请号:US12686241

    申请日:2010-01-12

    Inventor: Anthony D. Kurtz

    CPC classification number: G01L9/0055

    Abstract: A sensor array for a pressure transducer having a diaphragm with an active region, and capable of deflecting when a force is applied to the diaphragm. The sensor array disposed on a single substrate, the substrate secured to the diaphragm. The sensor array having a first outer sensor near an edge of the diaphragm at a first location and on the active region, a second outer sensor near an edge of the diaphragm at a second location and on the active region, and at least one center sensor substantially overlying a center of the diaphragm. The sensors connected in a bridge array to provide an output voltage proportional to the force applied to the diaphragm. The sensors dielectrically isolated from the substrate.

    Abstract translation: 一种用于压力传感器的传感器阵列,具有具有有源区域的光阑,并且当向隔膜施加力时能够偏转。 传感器阵列设置在单个基板上,该基板固定在隔膜上。 所述传感器阵列在第一位置处和所述有源区域上具有靠近所述隔膜的边缘的第一外部传感器,在第二位置处和所述有源区域处在所述隔膜的边缘附近的第二外部传感器,以及至少一个中心传感器 基本上覆盖隔膜的中心。 连接在桥阵列中的传感器提供与施加到隔膜的力成比例的输出电压。 传感器与基板介电隔离。

    GAS DENSITY TRANSDUCER WITH A MICROPROCESSOR EXECUTING AN ALGORITHM SOLVING VAN DER WAALS EQUATION
    134.
    发明申请
    GAS DENSITY TRANSDUCER WITH A MICROPROCESSOR EXECUTING AN ALGORITHM SOLVING VAN DER WAALS EQUATION 有权
    具有微处理器的气体密度传感器执行解决方案的算法解决方案

    公开(公告)号:US20100063749A1

    公开(公告)日:2010-03-11

    申请号:US12624150

    申请日:2009-11-23

    CPC classification number: G01N9/266

    Abstract: A gas density transducer including: a piezoresistive bridge sensor operative to provide an output indicative of an applied pressure, a computing processor having multiple inputs and at least one output, with the output of the bridge sensor coupled to an input of the processor; a temperature sensor coupled to an input of the processor for providing at an output a signal indicative of a temperature of the bridge sensor, the output of the temperature sensor coupled to an input of the processor; and, at least one memory accessible by the processor and having stored therein: compensation coefficients for compensating the output of the bridge sensor for temperature variation; an algorithm for solving Van der Waal's equation; and, code for providing at an output of the processor a signal indicative of a gas density when the bridge is subjected to a gas containing environment.

    Abstract translation: 一种气体密度传感器,包括:压阻电桥传感器,用于提供指示施加的压力的输出,具有多个输入和至少一个输出的计算处理器,所述桥接传感器的输出耦合到所述处理器的输入; 耦合到所述处理器的输入的温度传感器,用于在输出端提供指示所述桥式传感器的温度的信号,所述温度传感器的输出耦合到所述处理器的输入; 以及至少一个可由处理器访问并且存储在其中的存储器;用于补偿桥式传感器的温度变化的输出的补偿系数; 解决范德华方程的算法; 以及用于在处理气体包含环境时在处理器的输出处提供指示气体密度的信号的代码。

    Compact absolute and gage pressure transducer having a mounting apparatus for accurately positioning and aligning a leadless semiconductor chip on an associated header
    135.
    发明授权
    Compact absolute and gage pressure transducer having a mounting apparatus for accurately positioning and aligning a leadless semiconductor chip on an associated header 有权
    紧凑的绝对和量规压力传感器具有用于在相关的头部上精确地定位和对准无引线半导体芯片的安装装置

    公开(公告)号:US07673518B2

    公开(公告)日:2010-03-09

    申请号:US12214507

    申请日:2008-06-19

    Inventor: Anthony D. Kurtz

    CPC classification number: G01L13/025

    Abstract: A compact absolute and gage pressure transducer consists of two sensors made from the same silicon wafer and adjacent each other on the wafer. The transducer contains a common header with a first and a second input port for receiving a first and a second pressure, respectively. The second port is directed through a reference tube into the hollow of a housing to apply pressure from the reference tube to the common sensor arrangement. The first port is directed from another surface of the housing to direct pressure to both sensor devices. One sensor operates as a gage sensor producing an output proportional to the difference between input pressures and the other sensor produces an absolute output. The sensor chip is associated with a sensor header which includes an alignment pin extending therefrom, and a guide plate with an aperture for accommodating an alignment pin.

    Abstract translation: 紧凑的绝对和量规压力传感器由两个由相同硅晶片制成的传感器组成,并在晶片上彼此相邻。 传感器包含具有分别用于接收第一和第二压力的第一和第二输入端口的公共报头。 第二端口通过参考管引导到壳体的中空部中,以将参考管的压力施加到公共传感器装置。 第一端口从壳体的另一表面引导以将压力引导到两个传感器装置。 一个传感器作为量规传感器工作,产生与输入压力之差成比例的输出,另一个传感器产生绝对输出。 传感器芯片与包括从其延伸的对准销的传感器集管相关联,以及具有用于容纳对准销的孔的引导板。

    Combined temperature and pressure transducer incorporating connector keyway alignment and an alignment method
    136.
    发明授权
    Combined temperature and pressure transducer incorporating connector keyway alignment and an alignment method 失效
    组合温度和压力传感器,包括连接器键槽对准和对准方法

    公开(公告)号:US07669479B2

    公开(公告)日:2010-03-02

    申请号:US12291451

    申请日:2008-11-10

    CPC classification number: G01L19/0092 G01K7/023 G01K7/16 Y10T29/49007

    Abstract: A transducer sensor is positioned within a hollow of the body of a housing. The housing has an extending alignment pin, which pin coacts with a corresponding slot or aperture in the wall of a vessel whose pressure or temperature is to be monitored. The transducer body is associated with a connector where the alignment pin is placed and extends from the housing in a fixed relation to the connector. A suitable aperture or slot in the wall of the vessel to be monitored accommodates the extending pin whereby when the transducer is placed in the vessel aperture the connector associated with the transducer is always located in proper position. Positioned on the housing is a sliding nut which can move in a direction parallel to the central axis of the housing and either to the right or left. This sliding nut is rotatably positioned in the housing and coacts with threads formed in the aperture in the wall of the vessel to enable tightening of the transducer housing when placed in the wall and when the alignment pin is positioned within the corresponding slot or aperture. This assures a proper alignment so that an external connector which is not moveable or rotatable can be immediately connected to the transducer connector without further experimentation or adjustment.

    Abstract translation: 换能器传感器定位在壳体的主体的中空部内。 壳体具有延伸的对准销,该销与其压力或温度要监控的容器的壁中的相应的狭槽或孔共同作用。 换能器体与连接器相关联,其中定位销被放置并且与壳体以固定的关系从连接器延伸。 要监测的容器的壁中的合适的孔或狭槽容纳延伸销,由此当换能器放置在容器孔中时,与换能器相关联的连接器总是位于适当的位置。 位于壳体上的是一个滑动螺母,它能够沿平行于壳体的中心轴线的方向移动,也可以向右或向左移动。 该滑动螺母可旋转地定位在壳体中并且与形成在容器的壁中的孔中的螺纹共同作用,以便当放置在壁中时以及当对准销定位在相应的槽或孔内时能够紧固换能器壳体。 这确保了适当的对准,使得不可移动或可旋转的外部连接器可以立即连接到换能器连接器,而无需进一步的实验或调整。

    Mounting apparatus and method for accurately positioning and aligning a leadless semiconductor chip on an associated header
    137.
    发明申请
    Mounting apparatus and method for accurately positioning and aligning a leadless semiconductor chip on an associated header 有权
    用于在相关的头部上精确地定位和对准无引线半导体芯片的安装装置和方法

    公开(公告)号:US20090313797A1

    公开(公告)日:2009-12-24

    申请号:US12288363

    申请日:2008-10-20

    CPC classification number: G01L19/0084 Y10T29/41

    Abstract: There is disclosed a method and apparatus for mounting a leadless semiconductor chip on a header. The semiconductor chip has contacts on a surface and the chip is of a specified geometric shape. The header has a contact surface for receiving the chip with the contact surface of the header containing header contact pins, which pins have to contact the contacts on the semiconductor chip. The header has a guide pin extending from the contact surface and there is a guide plate which has an aperture adapted to be placed over the guide pin, the guide plate further has a chip accommodating aperture of the same geometric shape as the chip. The guide plate, when placed over the guide pin enables the chip to be placed in the chip accommodating aperture so that the contacts of the header pin are properly and accurately aligned with respect to the contacts on the semiconductor chip.

    Abstract translation: 公开了一种将无引线半导体芯片安装在集管上的方法和装置。 半导体芯片在表面上具有触点,并且芯片具有指定的几何形状。 集管具有用于接收芯片的接触表面,其中插头的接触表面包含插座接头引脚,该引脚必须与半导体芯片上的触点接触。 集管具有从接触表面延伸的引导销,并且存在具有适于放置在引导销上方的孔的引导板,引导板还具有与芯片相同的几何形状的芯片容纳孔。 引导板当放置在引导销上时,可以将芯片放置在芯片容纳孔中,使得插头引脚的触点相对于半导体芯片上的触点正确且精确地对准。

    High pressure transducer having an H shaped cross-section

    公开(公告)号:US07559248B2

    公开(公告)日:2009-07-14

    申请号:US12077637

    申请日:2008-03-19

    CPC classification number: G01L9/0051 G01L9/0055

    Abstract: A high pressure transducer has an H shaped cross-section with a center arm of the H having a top and bottom surface with the top surface of the H accommodating four strain gauges. Two strain gauges are located at the center of the top portion of the center arm of the H and are positive strain gauges, while two strain gauges are located near the periphery of the center arm of the gauge. The bottom surface of the center arm of the gauge has an active area of a smaller diameter than the circular diameter of the center arm portion of the transducer. The smaller active area is surrounded by a thicker stepped area which surrounds an active area on the pressure side of the H shaped member. The surrounding stepped area enables one to position the two negative strain gauges on the opposite surface of the center arm and near the periphery to thereby cause the negative gauges to respond to a negative stresses and therefore to enable one to provide a full Wheatstone bridge which includes the two positive strain gauges located at the center of the center arm of the H and the two negative peripheral gauges.

    Pressure transducer adapted to measure engine pressure parameters
    139.
    发明授权
    Pressure transducer adapted to measure engine pressure parameters 有权
    适用于测量发动机压力参数的压力传感器

    公开(公告)号:US07540196B2

    公开(公告)日:2009-06-02

    申请号:US11973507

    申请日:2007-10-09

    CPC classification number: G01L13/025 G01L19/143

    Abstract: A pressure header assembly has a closed front and back surface. The back surface has an aperture for accommodating a separate dual die pressure header. The dual die pressure header has an absolute and differential pressure sensor positioned thereon. A differential pressure port is located on a side surface of the pressure header assembly and is directed to a bore in the pressure header assembly. The bore contains an elongated tube which is positioned in the pressure header assembly and locked in place by means of a crush nut and locking nut assembly. One end of the tube is coupled to the differential pressure port, while the other end of the tube accommodates a differential pressure tube which is bent in an arcuate position and directed to the underside of the sensor of the differential sensor assembly mounted in the dual die pressure header. Suitable leads from the dual die pressure header assembly are directed to a terminal board which is mounted within a pressure transducer housing shell, which terminal board coacts with an outboard contact cap assembly forming the transducer. The pressure header assembly portion also contains extending tabs which have apertures for external mounting.

    Abstract translation: 压头组件具有封闭的前表面和后表面。 后表面具有用于容纳单独的双模压头的孔。 双模压头具有位于其上的绝对压差传感器和差压传感器。 差压端口位于压力总成组件的侧表面上并且被引导到压力头组件中的孔。 该孔包含一个细长管,该细长管位于压力总成组件中,并通过一个挤压螺母和锁定螺母组件锁定在适当位置。 管的一端连接到差压端口,而管的另一端容纳差压管,该压差管弯曲成弓形位置并且引导到安装在双模中的差动传感器组件的传感器的下侧 压力头。 来自双模压力集管组件的合适引线被引导到端子板,该端子板安装在压力传感器壳体壳体内,该端子板与形成换能器的外侧接触盖组件共同作用。 压头组件部分还包含具有用于外部安装的孔的延伸突片。

    Combined temperature and pressure transducer incorporating connector keyway alignment and an alignment method
    140.
    发明授权
    Combined temperature and pressure transducer incorporating connector keyway alignment and an alignment method 有权
    组合温度和压力传感器,包括连接器键槽对准和对准方法

    公开(公告)号:US07464600B2

    公开(公告)日:2008-12-16

    申请号:US11510153

    申请日:2006-08-25

    CPC classification number: G01L19/0092 G01K7/023 G01K7/16 Y10T29/49007

    Abstract: A transducer sensor is positioned within a hollow of the body of a housing. The housing has an extending alignment pin, which pin coacts with a corresponding slot or aperture in the wall of a vessel whose pressure or temperature is to be monitored. The transducer body is associated with a connector where the alignment pin is placed and extends from the housing in a fixed relation to the connector. A suitable aperture or slot in the wall of the vessel to be monitored accommodates the extending pin whereby when the transducer is placed in the vessel aperture the connector associated with the transducer is always located in proper position. Positioned on the housing is a sliding nut which can move in a direction parallel to the central axis of the housing and either to the right or left. This sliding nut is rotatably positioned in the housing and coacts with threads formed in the aperture in the wall of the vessel to enable tightening of the transducer housing when placed in the wall and when the alignment pin is positioned within the corresponding slot or aperture. This assures a proper alignment so that an external connector which is not moveable or rotatable can be immediately connected to the transducer connector without further experimentation or adjustment.

    Abstract translation: 换能器传感器定位在壳体的主体的中空部内。 壳体具有延伸的对准销,该销与其压力或温度要监控的容器的壁中的相应的狭槽或孔共同作用。 换能器体与连接器相关联,其中定位销被放置并且与壳体以固定的关系从连接器延伸。 要监测的容器的壁中的合适的孔或狭槽容纳延伸销,由此当换能器放置在容器孔中时,与换能器相关联的连接器总是位于适当的位置。 位于壳体上的是一个滑动螺母,它能够沿平行于壳体的中心轴线的方向移动,也可以向右或向左移动。 该滑动螺母可旋转地定位在壳体中并且与形成在容器的壁中的孔中的螺纹共同作用,以便当放置在壁中时以及当对准销定位在相应的槽或孔内时能够紧固换能器壳体。 这确保了适当的对准,使得不可移动或可旋转的外部连接器可以立即连接到换能器连接器,而无需进一步的实验或调整。

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