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公开(公告)号：US11067751B2
公开(公告)日：2021-07-20
申请号：US16597323
申请日：2019-10-09
Applicant: GLOBALFOUNDRIES U.S. Inc.
Inventor： Colleen Meagher , Karen Nummy , Yusheng Bian , Ajey Poovannummoottil Jacob
Abstract: Structures including a waveguide core and methods of fabricating a structure that includes a waveguide core. A dielectric layer including a trench with a first sidewall and a second sidewall, and a waveguide core positioned inside the trench between the first and second sidewalls of the trench. The waveguide core has a first width, and the trench has a second width between the first and second sidewalls that is greater than the first width.
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公开(公告)号：US11067749B2
公开(公告)日：2021-07-20
申请号：US16690835
申请日：2019-11-21
Applicant: GLOBALFOUNDRIES U.S. Inc.
Inventor： Yusheng Bian , Ajey Poovannummoottil Jacob
Abstract: Structures for a waveguide and methods of fabricating a structure for a waveguide. A first layer and a second layer are positioned in a layer stack on a surface of a waveguide core. The first layer is positioned in the layer stack between the second layer and the surface of the waveguide core. The waveguide core is composed of a first material having a first refractive index, the first layer is composed of a second material having a second refractive index that is less than the first refractive index of the first material, and the second layer is composed of a third material having a third refractive index that is less than the second refractive index of the second material.
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183.发明申请公开(公告)号：US20210194201A1
公开(公告)日：2021-06-24
申请号：US16718329
申请日：2019-12-18
Applicant: GLOBALFOUNDRIES U.S. Inc.
Inventor： Yusheng Bian , Ajey Poovannummoottil Jacob
Abstract: Embodiments of the disclosure provide a waveguide-confining layer, a photonic integrated circuit (PIC) die with embodiments of a waveguide-confining layer, and methods to form the same. The waveguide-confining layer may include an oxide layer over a buried insulator layer, a silicon-based optical confinement structure embedded within or positioned on the oxide layer, and first and second blocking layers over the oxide layer and separated from each other by a horizontal slot. The first and second blocking layers include a metal or an oxide. A gain medium is positioned on the oxide layer and within the horizontal slot between the first and second blocking layers, and has a lower refractive index than each of the first and second blocking layers. The gain medium is vertically aligned with the silicon-based optical confinement structure, and a portion of the oxide layer separates the gain medium from the silicon-based optical confinement structure.
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公开(公告)号：US10989873B1
公开(公告)日：2021-04-27
申请号：US16663696
申请日：2019-10-25
Inventor： Ajey Poovannummoottil Jacob , Yusheng Bian , Sujith Chandran , Marcus Dahlem
Abstract: Structures for a waveguide crossing and methods of fabricating a structure for a waveguide crossing. A waveguide crossing includes a central section and an arm positioned between a waveguide core and the central section. The arm and the waveguide core are aligned along a longitudinal axis. The arm is coupled to the waveguide core at a first interface, and the arm is coupled to a portion of the central section at a second interface. The arm has a first width at the first interface, a second width at the second interface, and a third width between the first interface and the second interface. The third width is greater than either the first width or the second width.
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公开(公告)号：US12292596B2
公开(公告)日：2025-05-06
申请号：US17892584
申请日：2022-08-22
Applicant: GlobalFoundries U.S. Inc.
Inventor： Yusheng Bian
IPC: G02B6/122
Abstract: Structures for an optical coupler and methods of forming an optical coupler. The structure comprises a first waveguide core including a first tapered section, a second waveguide core including a second tapered section overlapped with the first tapered section, and an active layer including a third tapered section overlapped with the second tapered section. The first waveguide core comprises a first passive material, the second waveguide core comprises a second passive material, and the active layer comprises an active material.
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Patent Agency Ranking
公开(公告)号：US12272758B2
公开(公告)日：2025-04-08
申请号：US17241525
申请日：2021-04-27
Applicant: GLOBALFOUNDRIES U.S. Inc.
Inventor： Asif J. Chowdhury , Yusheng Bian , Abdelsalam Aboketaf , Andreas D. Stricker
IPC: H01L31/0232 , G02B6/24 , G02B6/12
Abstract: Structures for a photodetector or light absorber and methods of forming a structure for a photodetector or light absorber. The structure includes a pad, a waveguide core adjoined to the pad, and a light-absorbing layer on the pad. The waveguide core includes a first longitudinal axis, and the light-absorbing layer includes a second longitudinal axis and an end surface intersected by the second longitudinal axis. The end surface of the light-absorbing layer is positioned adjacent to the waveguide core. The first longitudinal axis of the first waveguide core is inclined relative to the second longitudinal axis of the light-absorbing layer and/or the end surface slanted relative to the second longitudinal axis.
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187.发明授权公开(公告)号：US12271030B2
公开(公告)日：2025-04-08
申请号：US17952969
申请日：2022-09-26
Applicant: GlobalFoundries U.S. Inc.
Inventor： Yusheng Bian , Won Suk Lee
Abstract: Structures for an optical coupler and methods of forming a structure for an optical coupler. The structure comprises a stacked waveguide core including a first waveguide core and a second waveguide core. The first waveguide core includes a first tapered section, and the second waveguide core includes a second tapered section positioned to overlap with the first tapered section. The structure further comprises a third waveguide core including a third tapered section positioned adjacent to the first tapered section of the first waveguide core and the second tapered section of the second waveguide core.
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公开(公告)号：US12265255B2
公开(公告)日：2025-04-01
申请号：US17944252
申请日：2022-09-14
Applicant: GlobalFoundries U.S. Inc.
Inventor： Yusheng Bian , Steven M. Shank , Judson Holt , Michal Rakowski , Bartlomiej Jan Pawlak
Abstract: Structures including an electro-absorption modulator and methods of forming such structures. The structure comprises a waveguide core including a first tapered section, a second tapered section, and a longitudinal axis. The first tapered section and the second tapered section are aligned along the longitudinal axis. The structure further comprises a first waveguide taper overlapping the first tapered section of the waveguide core, a second waveguide taper overlapping the second tapered section of the waveguide core, and a multiple-layer structure on the waveguide core between the first waveguide taper and the second waveguide taper.
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公开(公告)号：US20250035840A1
公开(公告)日：2025-01-30
申请号：US18225709
申请日：2023-07-25
Applicant: GlobalFoundries U.S. Inc.
Inventor： Yusheng Bian , Kenneth Giewont , Takako Hirokawa
Abstract: Structures for a photonics chip that include a photonic component and methods of forming such structures. The structure may comprise a photodetector on a substrate and a waveguide core. The photodetector includes a light-absorbing layer having a longitudinal axis, a first sidewall, and a second sidewall adjoined to the first sidewall at an interior angle. The first sidewall is slanted relative to the longitudinal axis, and the second sidewall is oriented transverse to the longitudinal axis. The waveguide core includes a tapered section adjacent to the first sidewall and the second sidewall of the light-absorbing layer.
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公开(公告)号：US12204146B2
公开(公告)日：2025-01-21
申请号：US17869065
申请日：2022-07-20
Applicant: GlobalFoundries U.S. Inc.
Inventor： Yusheng Bian
Abstract: Structures for a waveguide crossing and methods of forming such structures. The structure comprises a first waveguide core including a first section, a second section, and a first longitudinal axis. The first section and the second section are aligned along the first longitudinal axis, the first section is terminated by a first end, the second section is terminated by a second end, and the first end of the first section is longitudinally spaced from the second end of the second section by a gap. The structure further comprises a second waveguide core having a second longitudinal axis angled relative to the first longitudinal axis. The second longitudinal axis of the second waveguide core crosses the first longitudinal axis of the first waveguide core within the gap.
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