DRIVE SYSTEM FOR MICROMACHINED MAGNETIC FIELD SENSORS
    11.
    发明申请
    DRIVE SYSTEM FOR MICROMACHINED MAGNETIC FIELD SENSORS 审中-公开
    微型磁场传感器的驱动系统

    公开(公告)号:US20120235670A1

    公开(公告)日:2012-09-20

    申请号:US13421545

    申请日:2012-03-15

    CPC classification number: G01R33/028

    Abstract: Described herein are systems, devices, and methods that provide a stable magnetometer. The magnetometer includes a drive element that facilitates flow of a drive current through a node and a sense element operable to detect a magnetic field operating on the drive current. To reduce offset in the detection of the magnetic field, a voltage detector, electrically coupled to the drive element through the node, determines a variation between a node voltage and a target voltage. The voltage detector facilitates suppression of the variation and thereby minimizes the offset in the sense element.

    Abstract translation: 这里描述了提供稳定磁力计的系统,装置和方法。 磁力计包括驱动元件,其驱动驱动电流流过节点,感测元件可操作以检测在驱动电流上运行的磁场。 为了减少磁场检测中的偏移,通过节点电耦合到驱动元件的电压检测器确定节点电压和目标电压之间的变化。 电压检测器有助于抑制变化,从而使感测元件中的偏移最小化。

    MICROMACHINED RESONANT MAGNETIC FIELD SENSORS
    12.
    发明申请
    MICROMACHINED RESONANT MAGNETIC FIELD SENSORS 有权
    微型谐振磁场传感器

    公开(公告)号:US20120176129A1

    公开(公告)日:2012-07-12

    申请号:US13004383

    申请日:2011-01-11

    CPC classification number: G01R33/038 G01R33/0286

    Abstract: A micromachined magnetic field sensor is disclosed. The micromachined magnetic field sensor comprises a substrate; and a drive subsystem partially supported by the substrate with a plurality of beams, and at least one anchor; a mechanism for providing an electrical current through the drive subsystem along a first axis; and Lorentz force acting on the drive subsystem along a second axis in response to a magnetic field vector along a third axis. The micromachined magnetic field sensor also includes a position transducer to detect the motion of the drive subsystem and an electrostatic offset cancellation mechanism coupled to the drive subsystem.

    Abstract translation: 公开了一种微加工磁场传感器。 微加工磁场传感器包括基板; 以及驱动子系统,其由具有多个梁的所述衬底部分地支撑,以及至少一个锚; 用于沿着第一轴线提供穿过所述驱动子系统的电流的机构; 以及响应于沿着第三轴的磁场矢量沿第二轴作用在驱动子系统上的洛伦兹力。 微加工磁场传感器还包括位置传感器,用于检测驱动子系统的运动和耦合到驱动子系统的静电偏移消除机构。

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