ION GENERATING APPARATUS AND AIR PURIFYING APPARATUS
    12.
    发明申请
    ION GENERATING APPARATUS AND AIR PURIFYING APPARATUS 有权
    离子发生装置和空气净化装置

    公开(公告)号:US20110150710A1

    公开(公告)日:2011-06-23

    申请号:US13061099

    申请日:2009-03-17

    Abstract: A housing having a suction port and a discharge port, an impeller 21 and a casing 22 that houses the impeller 21, an air blower 2 housed in the housing, a filter that lets through the air suctioned from the suction port by the air blower 2, and two ion generating sections that generate positive and negative ions are provided. The ion generating section is arranged on a circular-arc guide wall 2a in the casing 22. The positive and negative ions generated by the ion generating section are efficiently included in the air passing through as laminar flow along the circular-arc guide wall 22a.

    Abstract translation: 具有吸入口和排出口的壳体,容纳叶轮21的叶轮21和壳体22,容纳在壳体中的鼓风机2,通过鼓风机2吸入从吸入口吸入的空气的过滤器 并且提供了产生正离子和负离子的两个离子产生部分。 离子产生部分设置在壳体22中的圆弧引导壁2a上。由离子产生部产生的正离子和负离子被有效地包围在沿着圆弧引导壁22a作为层流通过的空气中。

    Method for storing carrier for polishing wafer
    13.
    发明授权
    Method for storing carrier for polishing wafer 失效
    存储用于抛光晶片的载体的方法

    公开(公告)号:US06379226B1

    公开(公告)日:2002-04-30

    申请号:US09869084

    申请日:2001-06-20

    CPC classification number: H01L21/67057 B24B37/34 H01L21/6732 H01L21/67326

    Abstract: To provide a method for storing a carrier (3) for polishing a silicon wafer, which can store the carrier (3) in a manner to reduce scratches on the silicon wafer. The method includes storing a carrier (3) for use in polishing a silicon wafer completely immersed in a liquid. At least a substantial portion of the liquid is deionized water.

    Abstract translation: 提供一种用于存储用于抛光硅晶片的载体(3)的方法,其可以以减少硅晶片上的划痕的方式存储载体(3)。 该方法包括存储用于抛光完全浸入液体中的硅晶片的载体(3)。 至少大部分液体是去离子水。

    High temperature furnace with thermal insulation
    18.
    发明授权
    High temperature furnace with thermal insulation 失效
    高温炉保温

    公开(公告)号:US5017209A

    公开(公告)日:1991-05-21

    申请号:US352951

    申请日:1989-05-17

    Inventor: Ichiro Yoshimura

    Abstract: A furnace comprising a cylindrical heater and a cylindrical insulation around the heater, wherein the insulation has anisotropy in heat transfer and a direction along which the thermal conductivity of the insulation is small corresponds to a direction along which temperature gradient within the insulation is steep. The insulation is formed of plural anisotropic parts arranged such that the direction along which thermal conductivity is low of one part blocks heat transfer from a direction along which the thermal conductivity of another part is high.

    Abstract translation: 一种包括圆柱形加热器和围绕加热器的圆柱形绝缘体的炉,其中所述绝缘体具有热传递的各向异性,并且所述绝缘体的热导率较小的方向对应于绝缘体内的温度梯度陡峭的方向。 绝缘体由多个各向异性部分形成,其中热传导率低的方向一方阻碍从另一部分的导热性高的方向的传热。

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