Abstract:
The disclosure relates to preparation of silicon on insulator structures with reduced unbonded regions and to methods for producing such wafers by minimizing the roll-off amount (ROA) of the handle and donor wafers. Methods for polishing wafers are also provided.
Abstract:
A housing having a suction port and a discharge port, an impeller 21 and a casing 22 that houses the impeller 21, an air blower 2 housed in the housing, a filter that lets through the air suctioned from the suction port by the air blower 2, and two ion generating sections that generate positive and negative ions are provided. The ion generating section is arranged on a circular-arc guide wall 2a in the casing 22. The positive and negative ions generated by the ion generating section are efficiently included in the air passing through as laminar flow along the circular-arc guide wall 22a.
Abstract:
To provide a method for storing a carrier (3) for polishing a silicon wafer, which can store the carrier (3) in a manner to reduce scratches on the silicon wafer. The method includes storing a carrier (3) for use in polishing a silicon wafer completely immersed in a liquid. At least a substantial portion of the liquid is deionized water.
Abstract:
An apparatus for manufacturing a hermetically coated optical fiber having a single reaction chamber into which a fare fiber and raw gas are to be introduced for applying a hermetic coating to the bare fiber while the bare fiber passes through the reaction chamber is characterized by that the reaction chamber has a plurality of inlet tubes to introduce the raw gas, and the plurality of inlet tubes open to the reaction chamber at different positions from each other in a direction of movement of the bare fiber passing through said reaction chamber.
Abstract:
A hermetic coated optical fiber is produced by preparing a bare optical fiber by melting and drawing an optical fiber preform in a fiber drawing furnace and introducing the bare optical fiber in a reactor in which a raw material gas is introduced and forming a hermetic coating film around a surface of the bare optical fiber by a chemical vapor deposition method or pyrolysis in the reactor, wherein a part of an inert gas for purging the fiber drawing furnace which has been heated by a heater equipped in the furnace is exhausted and a rest of the inert gas is introduced in the reactor for diluting the raw material gas.
Abstract:
A method, for screening an optical fiber, and an apparatus for carrying out the method, in which two sucking nozzles and a tape sticking device are provided to automatically perform processing of the end portions of the optical fiber; and an automatic fiber transporting/mounting device is provided to transport the succeeding portion of the optical fiber to the winding roll and mount, it on the winding roll; dancer rolls are provided in the longitudinal direction of an arm; and supporting rolls are movable between the path line of the optical fiber and a position removed from the path line.
Abstract:
There is provided a drawing process for producing an optical fiber which comprises drawing the optical fiber from a preform therefor under tension to form the optical fiber while heating and melting the preform, wherein an outer diameter of the optical fiber on which no coating has been provided is measured at a position at which shrinkage of the outer diameter of the optical fiber, while stretched, is not larger than 0.5% and drawing conditions are controlled based on the deviation of the measured diameter from a preselected outer diameter.
Abstract:
A furnace comprising a cylindrical heater and a cylindrical insulation around the heater, wherein the insulation has anisotropy in heat transfer and a direction along which the thermal conductivity of the insulation is small corresponds to a direction along which temperature gradient within the insulation is steep. The insulation is formed of plural anisotropic parts arranged such that the direction along which thermal conductivity is low of one part blocks heat transfer from a direction along which the thermal conductivity of another part is high.