公开(公告)号：US08254029B2

公开(公告)日：2012-08-28

申请号：US12031381

申请日：2008-02-14

申请人： James J. Cowan

发明人： James J. Cowan

IPC分类号： G02B5/18

CPC分类号： G03H1/26 ,  G02B5/1814 ,  G02B5/1861 ,  G02B5/32 ,  G03H1/0244 ,  G03H1/0248 ,  G03H1/04 ,  G03H1/0402 ,  G03H1/041 ,  G03H1/2205 ,  G03H1/2249 ,  G03H5/00 ,  G03H2001/0417 ,  G03H2001/0419 ,  G03H2001/0473 ,  G03H2001/2635 ,  G03H2210/63 ,  G03H2222/31 ,  G03H2223/18 ,  G03H2223/25

摘要： A surface relief structure includes a recording medium configured to be structurally modified when exposed to interfering and non-interfering portions of radiation beams, the structurally modified recording medium including, when viewed in a two-dimensional cross-section along one of the axes of the recording medium a plurality of equally spaced steps of fine-sized periodicity superimposed upon a plurality of deep depressions of substantially coarse-sized periodicity. The structurally modified recording medium is configured to produce in reflection single and multiple colors in a broad spectral range when illuminated by a source of light.

摘要翻译： 表面浮雕结构包括记录介质，其构造成当暴露于辐射束的干涉和非干扰部分时被结构地修饰，所述结构上改进的记录介质在沿着 记录介质，叠加在基本上粗大的周期性的多个深凹陷上的多个等间隔的精细尺寸周期的步骤。 结构上改进的记录介质被配置为当被光源照射时在广谱光谱范围内产生反射单色和多种颜色。

公开(公告)号：US4888260A

公开(公告)日：1989-12-19

申请号：US084568

申请日：1987-08-10

申请人： James J. Cowan

发明人： James J. Cowan

IPC分类号： G02B5/18 ,  G02B5/32 ,  G03C5/00 ,  G03F7/00 ,  G03F7/26 ,  G03H1/02 ,  G03H1/04 ,  G03H1/18 ,  G03H1/28 ,  G11B3/70 ,  G11B7/24

CPC分类号： G03H1/0248 ,  G02B5/1857 ,  G03H1/028 ,  G03H1/28 ,  G03H1/0244 ,  G03H1/0252 ,  G03H2001/0413 ,  G03H2001/0415 ,  G03H2001/2655 ,  G03H2210/63 ,  G03H2223/25 ,  G03H2260/63

摘要： A hologram is fabricated by opening a volume phase reflection hologram formed in a recording medium such as a positive photoresist. The opening occurs by forming a second hologram, such as an off-axis hologram, in the same recording medium. The opened hologram can be replicated in metal and the metal can be used to emboss the fringe pattern of the opened hologram into plastic. A full range of colors in the visible spectrum may be obtained by metallizing the embossed plastic structure and then by overcoating it with appropriate clear dielectric layers.

公开(公告)号：US07304775B2

公开(公告)日：2007-12-04

申请号：US09798746

申请日：2001-03-02

申请人： Douglas S. Hobbs ,  James J. Cowan

发明人： Douglas S. Hobbs ,  James J. Cowan

IPC分类号： G03H1/12 ,  G03H1/10 ,  G03H1/04

CPC分类号： G03F7/70408 ,  G03H1/00 ,  G03H2001/0094

摘要： An interference lithography system is described that is capable of exposing high resolution patterns in photosensitive media and employing yield increasing active stabilization techniques needed in production environments. The inventive device utilizes a division-of-wavefront interference lithography configuration which divides a single large field size optical beam using one or more mirrors, and is actively stabilized with a subsystem employing; a phase modulator operating on each divided wavefront section; a novel feedback apparatus for observing the relative phase shifts between interfering wavefront sections; and a control system for holding the relative phase shifts constant. The present invention also includes; a method for shaping the illumination beam's intensity distribution for more efficient power utilization and greater feature size uniformity; a horizontal substrate loading configuration compatible with robotic handling; an automated pattern pitch calibration for simple, flexible system reconfiguration; a compact clean-room compatible superstructure for increased passive stability in high vibration manufacturing environments; and a method for optimizing the polarization state of the interfering beam sections in a multiple mirror system.

摘要翻译： 描述了干涉光刻系统，其能够在感光介质中暴露高分辨率图案并且采用在生产环境中所需的成品率增加的主动稳定技术。 本发明的装置使用波前干涉光刻配置，其使用一个或多个镜分割单个大场尺寸光束，并且利用采用的子系统主动稳定; 在每个划分的波前部分上工作的相位调制器; 一种新颖的反馈装置，用于观察干涉波前部分之间的相对相移; 以及用于保持相对相移常数的控制系统。 本发明还包括： 一种用于整形照明光束的强度分布的方法，用于更有效的功率利用和更大的特征尺寸均匀性; 与机器人处理兼容的水平基板装载配置; 自动化图案间距校准，用于简单，灵活的系统重新配置; 紧凑的洁净室兼容上层结构，可增强高振动制造环境中的被动稳定性; 以及用于优化多镜系统中的干涉光束部分的偏振状态的方法。

公开(公告)号：US4999234A

公开(公告)日：1991-03-12

申请号：US205376

申请日：1988-06-10

申请人： James J. Cowan

发明人： James J. Cowan

IPC分类号： G02B5/18 ,  G03H1/02 ,  G03H1/04 ,  G03H1/28

CPC分类号： G03H1/0248 ,  G02B5/1857 ,  G03H1/028 ,  G03H1/28 ,  G03H1/0244 ,  G03H1/0252 ,  G03H2001/0413 ,  G03H2001/0415 ,  G03H2260/63 ,  Y10S428/913 ,  Y10T428/24479 ,  Y10T428/24521 ,  Y10T428/24545 ,  Y10T428/31

摘要： A hologram is fabricated by opening a volume phase reflection hologram formed in a recording medium such as a positive photoresist. The opening occurs by forming a second hologram, such as an off-axis hologram, in the same recording medium. The opened hologram can be replicated in metal and the metal can be used to emboss the fringe pattern of the opened hologram into plastic. A full range of colors in the visible spectrum may be obtained by metallizing the embossed plastic structure and then by overcoating it with appropriate clear dielectric layers.

摘要翻译： 通过打开形成在诸如正性光致抗蚀剂的记录介质中的体积相位反射全息图来制造全息图。 通过在相同的记录介质中形成诸如离轴全息图之类的第二全息图来进行开口。 打开的全息图可以用金属复制，金属可用于将打开的全息图的条纹图案压印成塑料。 可以通过对压花塑料结构进行金属化，然后通过用适当的透明电介质层进行涂覆来获得可见光谱中的全部颜色。

公开(公告)号：US4839250A

公开(公告)日：1989-06-13

申请号：US205204

申请日：1988-06-10

申请人： James J. Cowan

发明人： James J. Cowan

IPC分类号： G02B5/18 ,  G03H1/02 ,  G03H1/04 ,  G03H1/28

CPC分类号： G03H1/28 ,  G02B5/1857 ,  G03H1/0248 ,  G03H1/028 ,  G03H1/0244 ,  G03H1/0252 ,  G03H2001/0413 ,  G03H2001/0415 ,  G03H2260/14 ,  G03H2260/63

摘要： A hologram is fabricated by opening a volume phase reflection hologram formed in a recording medium such as a positive photoresist. The opening occurs by forming a second hologram, such as an off-axis hologram, in the same recording medium. The opened hologram can be replicated in metal and the metal can be used to emboss the fringe pattern of the opened hologram into plastic. A full range of colors in the visible spectrum may be obtained by metallizing the embossed plastic structure and then by overcoating it with appropriate clear dielectric layers.

摘要翻译： 通过打开形成在诸如正性光致抗蚀剂的记录介质中的体积相位反射全息图来制造全息图。 通过在相同的记录介质中形成诸如离轴全息图之类的第二全息图来进行开口。 打开的全息图可以用金属复制，金属可用于将打开的全息图的条纹图案压印成塑料。 可以通过对压花塑料结构进行金属化，然后通过用适当的透明电介质层进行涂覆来获得可见光谱中的全部颜色。

公开(公告)号：US4496216A

公开(公告)日：1985-01-29

申请号：US454728

申请日：1982-12-30

申请人： James J. Cowan

发明人： James J. Cowan

IPC分类号： G02B5/32 ,  G03F7/20 ,  G03H1/04 ,  G02B5/18

CPC分类号： G03F7/70408 ,  G02B5/32 ,  G03F7/2006

摘要： Exposure patterns are formed in photosensitive material by multiple beam laser interferometry by a method which involves exposing said photosensitive material simultaneously to at least three coherent beams of exposing radiation wherein the sources of said beams are arranged substantially symmetrically around an axis perpendicular to the plane of said photosensitive material. Preferably, surface relief patterns are formed by developing said exposed material. Apparatus for providing such multiple coherent beams is also disclosed.

摘要翻译： 曝光图案通过多光束激光干涉测量通过多光束激光干涉测量法形成在感光材料中，该方法包括将所述感光材料同时暴露于至少三个曝光辐射的相干光束，其中所述光束的光源基本上对称地围绕垂直于所述 感光材料。 优选地，通过显影所述暴露的材料形成表面浮雕图案。 还公开了用于提供这种多个相干光束的装置。