公开(公告)号：US06613687B2

公开(公告)日：2003-09-02

申请号：US09820045

申请日：2001-03-28

申请人： Brian Christopher Hart ,  James Michael Mrvos ,  Carl Edmond Sullivan ,  Gary Raymond Williams ,  Qing Ming Wang

发明人： Brian Christopher Hart ,  James Michael Mrvos ,  Carl Edmond Sullivan ,  Gary Raymond Williams ,  Qing Ming Wang

IPC分类号： H01L21302

CPC分类号： B41J2/1628 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1631 ,  B41J2/1642 ,  B41J2/1645 ,  B41J2/1646 ,  B41J2002/14411 ,  H01L21/31122

摘要： The invention provides a method for making thin film metal oxide actuator device. According to the method a first conductive layer is deposited on a silicon substrate. Next a thin film metal oxide layer is deposited on the first conductive layer. A negative photoresist material is applied to the metal oxide layer to provide a photoresist layer. The photoresist layer is patterned using light radiation energy and developed to provide one or more exposed portions of the metal oxide layer. The photoresist layer is etched with a reactive ion plasma sufficient to remove the photoresist layer and the metal oxide layer under the photoresist layer from the first conductive layer leaving the one or more exposed portions of metal oxide layer on the first conductive layer. A second conductive layer is attached to the metal oxide layer to provide a thin film metal oxide actuator device. The method may be practiced without the use of more dangerous or hazardous wet chemical etching techniques which may provide undesirable undercutting of the metal oxide layers or may leave contaminants on the patterned metal oxide layers.

公开(公告)号：US06310641B1

公开(公告)日：2001-10-30

申请号：US09330973

申请日：1999-06-11

申请人： James Michael Mrvos ,  Carl Edmond Sullivan ,  Ashok Murthy

发明人： James Michael Mrvos ,  Carl Edmond Sullivan ,  Ashok Murthy

IPC分类号： B41J214

CPC分类号： B41J2/1631 ,  B41J2/1433 ,  B41J2/162 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1645 ,  B41J2/1646

摘要： An integrated nozzle plate having a heater chip and nozzles, firing chambers and channels formed from several layers of resist material affixed to the heater chip. The nozzles, firing chambers and channels are formed in the resist material using a photolithographic method. The photolithographic method involves placing a negative resist layer directly on a silicon wafer heater chip. A protective layer is then placed on top of the negative resist layer to act as a mask. A positive resist layer is then placed on top of the protective layer. A first mask is placed on the positive resist layer. The integrated nozzle plate is then exposed to ultraviolet light and the positive resist layer is developed. The protective layer not covered by the positive resist layer is removed and a second negative resist layer is deposited thereon. A second mask is placed on the second negative resist layer. The first and second negative resist layers are exposed to ultraviolet light and the negative resist layers are developed. The resulting integrated nozzle plate is then mounted to a print head, connected to an ink reservoir and placed in an inkjet printer for use.

摘要翻译： 具有加热器芯片和喷嘴，燃烧室和由固定到加热器芯片上的几层抗蚀剂材料形成的通道的集成喷嘴板。 使用光刻法在抗蚀剂材料中形成喷嘴，燃烧室和通道。 光刻方法包括将负抗蚀剂层直接放置在硅晶片加热器芯片上。 然后将保护层放置在负抗蚀剂层的顶部上以用作掩模。 然后将正性抗蚀剂层放置在保护层的顶部。 将第一掩模放置在正抗蚀剂层上。 然后将集成喷嘴板暴露于紫外光，并且正性抗蚀剂层显影。 除去未被正性抗蚀剂层覆盖的保护层，并在其上沉积第二负性抗蚀剂层。 第二掩模被放置在第二负抗蚀剂层上。 第一和第二负抗蚀剂层暴露于紫外光，负的抗蚀剂层显影。 所得到的集成喷嘴板然后安装到打印头，连接到墨水储存器并放置在喷墨打印机中以供使用。

公开(公告)号：US5925692A

公开(公告)日：1999-07-20

申请号：US820379

申请日：1997-03-12

申请人： William David Kappele ,  James Michael Mrvos ,  Ajay Kanubhai Suthar

发明人： William David Kappele ,  James Michael Mrvos ,  Ajay Kanubhai Suthar

IPC分类号： C08K3/04 ,  C08L71/00 ,  C08L71/02 ,  C08L83/10 ,  C09B67/22 ,  C09B67/44 ,  C09D11/00 ,  C09D11/10 ,  C09D11/02

CPC分类号： C09D11/30 ,  C09B67/0041 ,  C09B67/0083 ,  C09D11/328 ,  C09D11/36 ,  C09D11/40

摘要： High performance ink compositions are described and the ink compositions comprise oxycarbons like glycols as well as bishydroxy terminated thioethers like 2,2'-thiodiethanol.

摘要翻译： 描述了高性能油墨组合物，并且油墨组合物包含二氧化碳如二醇以及双羟基封端的硫醚如2,2'-硫代二乙醇。