Method and arrangement for determining the layer-thickness and the
substrate temperature during coating
    11.
    发明授权
    Method and arrangement for determining the layer-thickness and the substrate temperature during coating 失效
    用于确定涂层期间层厚度和基材温度的方法和装置

    公开(公告)号:US5564830A

    公开(公告)日:1996-10-15

    申请号:US183176

    申请日:1994-01-18

    Abstract: The invention describes a procedure and an arrangement for measurement of temperature and thickness of layer during a deposition or coating process. As coating or depositing processes known technologies of semi-conductor manufacturing arrangements, plasma devices, ion devices, and other dry-etching arrangements may be used. The invention can also be applied to the manufacture of optical coatings. As a consequence of interference of the thermal radiation of the substrate at the growing layer, the emissivity .epsilon. changes continuously during coating or depositing, therefore, a pyrometric measurement of temperature may not be applied. This basic problem is solved by the invention, which uses a reflectometer, which determines the reflectivity R of the wafer. According to the law of conservation of energy .epsilon.=1-R so that with said reflectometer the actual emissivity of the whole (multi-layer) system may be determined. The measurement of temperature then is effected by means of a determination equation. Concurrently the thickness is determined by a comparison of the reflectometer-curve and a theoretical dependency of thickness of layer.

    Abstract translation: 本发明描述了在沉积或涂覆过程期间测量层的温度和厚度的过程和布置。 作为涂覆或沉积工艺,已知有半导体制造布置的技术,可以使用等离子体装置,离子装置和其它干蚀刻装置。 本发明也可以应用于光学涂层的制造。 由于衬底在生长层处的热辐射的干扰,发射率ε在涂覆或沉积期间连续变化,因此,可能不会进行温度测量。 本发明解决了这个基本问题,本发明使用了确定晶片的反射率R的反射计。 根据能量守恒定律ε= 1-R,因此与所述反射计相比,可以确定整个(多层)系统的实际发射率。 然后通过测定方程来测量温度。 同时,通过比较反射计曲线和层厚度的理论依赖性来确定厚度。

    Secure terminal, a routine and a method of protecting a secret key
    12.
    发明授权
    Secure terminal, a routine and a method of protecting a secret key 有权
    安全终端,保密密钥的例程和方法

    公开(公告)号:US08689338B2

    公开(公告)日:2014-04-01

    申请号:US11997214

    申请日:2006-08-01

    Abstract: The method of protecting a secret key from being read by a non-secure software application, comprises a step (94) of recording the secret key as a routine stored in an executable-only memory. The routine having: load instructions to load the secret key into a memory readable by a secure and a non-secure software application, if the routine is called by the secure software application, and control instructions to leave only dummy data instead of the secret key in the readable memory if the software application calling the executable-only routine is the non-secure software application.

    Abstract translation: 保护秘密密钥不被非安全软件应用程序读取的方法包括将秘密密钥记录为存储在可执行的存储器中的程序的步骤(94)。 该程序具有:加密指令以将秘密密钥加载到由安全和非安全软件应用程序读取的存储器中,如果该程序由安全软件应用程序调用,并且控制指令仅留下伪数据而不是秘密密钥 在可读存储器中,如果调用可执行程序例程的软件应用程序是非安全软件应用程序。

    Method and device for establishing a communication connection between a control center and a terminal
    13.
    发明授权
    Method and device for establishing a communication connection between a control center and a terminal 有权
    用于在控制中心和终端之间建立通信连接的方法和装置

    公开(公告)号:US08406750B2

    公开(公告)日:2013-03-26

    申请号:US10517740

    申请日:2003-05-20

    CPC classification number: H04W76/10 H04W68/00 H04W76/30

    Abstract: A method for establishing a communication connection between a control center and a terminal is described, the control center (preferably a server) transmitting a request to establish a connection to a terminal (preferably a client), and in the case of a correct request, the terminal automatically establishing a connection (client-server communication) to the control center.

    Abstract translation: 描述了在控制中心和终端之间建立通信连接的方法,控制中心(优选地是服务器)发送建立到终端(优选客户端)的连接的请求,并且在正确请求的情况下, 终端自动建立到控制中心的连接(客户机 - 服务器通信)。

    Method and system for remote programming of a program-controlled device using a legitimization code
    14.
    发明授权
    Method and system for remote programming of a program-controlled device using a legitimization code 有权
    使用合法化代码对程序控制设备进行远程编程的方法和系统

    公开(公告)号:US08060873B2

    公开(公告)日:2011-11-15

    申请号:US10564208

    申请日:2004-07-08

    CPC classification number: G06F8/60

    Abstract: A method for remote programming of a program-controlled device, and a system having an interface to receive program data and a legitimization, as well as a remotely programmable, program-controlled device, which includes a processor and a program memory, are provided. In the method, program data are remotely transmitted from a control station to the interface and buffer-stored there in a buffer store. Subsequently, a legitimization is transmitted from the control station to the interface, and from there to the program-controlled device. The device checks the legitimization and imports the program data from the buffer store if the legitimization check is positive.

    Abstract translation: 提供了一种用于程序控制设备的远程编程的方法,以及具有接收程序数据和合法性的接口的系统以及包括处理器和程序存储器的可远程编程的程序控制的设备。 在该方法中,将程序数据从控制站远程发送到接口,并缓冲存储在缓冲存储器中。 随后,将合法化从控制站发送到接口,并从那里传送到程序控制的设备。 如果合法化检查为正,设备将检查合法性并从缓冲存储区导入程序数据。

    Leading Sheave Mine Winding Engine With Improved Cooling Air Conduction
    15.
    发明申请
    Leading Sheave Mine Winding Engine With Improved Cooling Air Conduction 有权
    带有改进的冷却空气传导的导向滚轮式引导式发动机

    公开(公告)号:US20080006803A1

    公开(公告)日:2008-01-10

    申请号:US11660983

    申请日:2005-09-08

    CPC classification number: B66B15/08 B66B11/043

    Abstract: The invention relates to a Koepe winder or drum winder comprising an electric motor (5) for driving winding ropes (11). The rotor (6) of said motor is connected to the cylinder jacket (4) of the Koepe winder (2) and the stator frame (7) is fixed on a support structure that has a hollow shaft (3). The winder is characterised by an improved ventilation system. The motor (5) is located inside the cylinder jacket (4) in a cavity (12) between the plates (13) of the Koepe winder (2), said cavity being supplied with cooling air to ventilate the motor (5) from the exterior The hollow shaft (3) is formed by two half-shafts (18, 19), which together with at least one support disc (8) and the stator frame (7) form the support structure (10).

    Abstract translation: 本发明涉及一种包括用于驱动卷绕绳索(11)的电动马达(5)的柯佩卷绕机或滚筒卷取机。 所述电动机的转子(6)连接到Koepe络纱机(2)的气缸套(4),定子架(7)固定在具有中空轴(3)的支撑结构上。 卷绕机的特点是改进了通风系统。 电动机(5)位于气缸套(4)内部位于Koepe络纱机(2)的板(13)之间的空腔(12)中,所述空腔被供应冷却空气以使马达(5)从 外部空心轴(3)由两个半轴(18,19)形成,其与至少一个支撑盘(8)和定子框架(7)一起形成支撑结构(10)。

    Method and device for establishing a communication connection between an exchange and a terminal
    17.
    发明申请
    Method and device for establishing a communication connection between an exchange and a terminal 有权
    用于在交换机和终端之间建立通信连接的方法和设备

    公开(公告)号:US20060046725A1

    公开(公告)日:2006-03-02

    申请号:US10517740

    申请日:2003-05-20

    CPC classification number: H04W76/10 H04W68/00 H04W76/30

    Abstract: A method for establishing a communication connection between a control center and a terminal is described, the control center (preferably a server) transmitting a request to establish a connection to a terminal (preferably a client), and in the case of a correct request, the terminal automatically establishing a connection (client-server communication) to the control center.

    Abstract translation: 描述了在控制中心和终端之间建立通信连接的方法,控制中心(优选地是服务器)发送建立到终端(优选客户端)的连接的请求,并且在正确请求的情况下, 终端自动建立到控制中心的连接(客户机 - 服务器通信)。

    Fibre optic X-ray camera
    18.
    发明授权
    Fibre optic X-ray camera 失效
    光纤X光摄像机

    公开(公告)号:US06403962B1

    公开(公告)日:2002-06-11

    申请号:US09445953

    申请日:2000-03-29

    CPC classification number: G01T1/20 G01T7/00

    Abstract: A device for detecting X-radiation comprises a scintillator for converting X-radiation impinging thereon into light, a detecting device for detecting the light produced by the scintillator, and a fibre optic system for feeding the light produced by the scintillator to the detecting device. The device for detecting X-radiation is additionally provided with a heating means for heating at least one section of the fibre optic system to a predetermined temperature while the X-radiation is being detected.

    Abstract translation: 用于检测X射线的装置包括用于将其上入射到其上的X射线转换成光的闪烁体,用于检测由闪烁体产生的光的检测装置,以及用于将由闪烁体产生的光馈送到检测装置的光纤系统。 用于检测X射线的装置另外设置有加热装置,用于在检测X射线的同时将光纤系统的至少一部分加热到预定温度。

    Person identification based on movement information
    19.
    发明授权
    Person identification based on movement information 失效
    基于运动信息的人员识别

    公开(公告)号:US6101264A

    公开(公告)日:2000-08-08

    申请号:US716247

    申请日:1996-11-26

    CPC classification number: G06K9/00335 G06K9/00892 G07C9/00158

    Abstract: A method of identification of an individual is based on movement information. Movement information from an image sequence that results when a typical or predetermined movement is carried out by the individual to be identified is recorded and evaluated by means of optical flow in order to ensure high recognition dependability. Complementary audio and static image information may also be evaluated.

    Abstract translation: PCT No.PCT / DE95 / 00351 Sec。 371日期1996年11月26日 102(e)日期1996年11月26日PCT提交1995年3月14日PCT公布。 公开号WO95 / 25316 PCT 日期1995年9月21日个人识别方法是基于运动信息。 通过光流记录和评估由待识别的个体执行典型或预定移动时产生的图像序列的移动信息,以确保高识别可靠性。 还可以评估互补的音频和静态图像信息。

    Process for the measurement of the thickness and refractive index of a
thin film on a substrate, and an apparatus for carrying out the process
    20.
    发明授权
    Process for the measurement of the thickness and refractive index of a thin film on a substrate, and an apparatus for carrying out the process 失效
    用于测量衬底上的薄膜的厚度和折射率的方法以及用于实施该方法的装置

    公开(公告)号:US5387309A

    公开(公告)日:1995-02-07

    申请号:US952834

    申请日:1992-11-30

    CPC classification number: G01B11/0675 G01N2021/3531 G01N21/45

    Abstract: A process and apparatus for in situ measurement of the thickness of a thinilm on a substrate using interference effects in the thin film. Thermal radiation of the substrate is utilized as a source of interfering bundles of electromagnetic radiation which intensity thereof is measured with a charge-coupled-device camera, and signal-processing electronics is utilized for determining in accordance with the Airy formula the thickness of the thin film on the substrate in the planar direction of the thin film and the index of refraction thereof. The low time constant for the measurement and evaluation enables the process for the recording of measurements be used for the control of coating or removal procedures.

    Abstract translation: PCT No.PCT / DE91 / 00461 Sec。 371日期:1992年11月30日 102(e)日期1992年11月30日PCT 1991年5月29日PCT PCT。 第WO91 / 19025号公报 日期1991年12月12日。一种用于在薄膜上使用干涉效应原位测量衬底上的薄膜厚度的方法和装置。 衬底的热辐射被用作电磁辐射的干扰束的源,其强度用电荷耦合器件照相机测量,并且信号处理电子器件用于根据艾里派公式确定薄的厚度 薄膜在薄膜的平面方向上的基板上的折射率和折射率。 用于测量和评估的低时间常数使得用于记录测量的过程用于控制涂布或去除程序。

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