Abstract:
The invention describes a procedure and an arrangement for measurement of temperature and thickness of layer during a deposition or coating process. As coating or depositing processes known technologies of semi-conductor manufacturing arrangements, plasma devices, ion devices, and other dry-etching arrangements may be used. The invention can also be applied to the manufacture of optical coatings. As a consequence of interference of the thermal radiation of the substrate at the growing layer, the emissivity .epsilon. changes continuously during coating or depositing, therefore, a pyrometric measurement of temperature may not be applied. This basic problem is solved by the invention, which uses a reflectometer, which determines the reflectivity R of the wafer. According to the law of conservation of energy .epsilon.=1-R so that with said reflectometer the actual emissivity of the whole (multi-layer) system may be determined. The measurement of temperature then is effected by means of a determination equation. Concurrently the thickness is determined by a comparison of the reflectometer-curve and a theoretical dependency of thickness of layer.
Abstract:
The method of protecting a secret key from being read by a non-secure software application, comprises a step (94) of recording the secret key as a routine stored in an executable-only memory. The routine having: load instructions to load the secret key into a memory readable by a secure and a non-secure software application, if the routine is called by the secure software application, and control instructions to leave only dummy data instead of the secret key in the readable memory if the software application calling the executable-only routine is the non-secure software application.
Abstract:
A method for establishing a communication connection between a control center and a terminal is described, the control center (preferably a server) transmitting a request to establish a connection to a terminal (preferably a client), and in the case of a correct request, the terminal automatically establishing a connection (client-server communication) to the control center.
Abstract:
A method for remote programming of a program-controlled device, and a system having an interface to receive program data and a legitimization, as well as a remotely programmable, program-controlled device, which includes a processor and a program memory, are provided. In the method, program data are remotely transmitted from a control station to the interface and buffer-stored there in a buffer store. Subsequently, a legitimization is transmitted from the control station to the interface, and from there to the program-controlled device. The device checks the legitimization and imports the program data from the buffer store if the legitimization check is positive.
Abstract:
The invention relates to a Koepe winder or drum winder comprising an electric motor (5) for driving winding ropes (11). The rotor (6) of said motor is connected to the cylinder jacket (4) of the Koepe winder (2) and the stator frame (7) is fixed on a support structure that has a hollow shaft (3). The winder is characterised by an improved ventilation system. The motor (5) is located inside the cylinder jacket (4) in a cavity (12) between the plates (13) of the Koepe winder (2), said cavity being supplied with cooling air to ventilate the motor (5) from the exterior The hollow shaft (3) is formed by two half-shafts (18, 19), which together with at least one support disc (8) and the stator frame (7) form the support structure (10).
Abstract:
A method and a device for a vehicle-related telematics service are provided in which the telematics service is divided into partial functionalities and these partial functionalities are subdivided between server and data terminal.
Abstract:
A method for establishing a communication connection between a control center and a terminal is described, the control center (preferably a server) transmitting a request to establish a connection to a terminal (preferably a client), and in the case of a correct request, the terminal automatically establishing a connection (client-server communication) to the control center.
Abstract:
A device for detecting X-radiation comprises a scintillator for converting X-radiation impinging thereon into light, a detecting device for detecting the light produced by the scintillator, and a fibre optic system for feeding the light produced by the scintillator to the detecting device. The device for detecting X-radiation is additionally provided with a heating means for heating at least one section of the fibre optic system to a predetermined temperature while the X-radiation is being detected.
Abstract:
A method of identification of an individual is based on movement information. Movement information from an image sequence that results when a typical or predetermined movement is carried out by the individual to be identified is recorded and evaluated by means of optical flow in order to ensure high recognition dependability. Complementary audio and static image information may also be evaluated.
Abstract:
A process and apparatus for in situ measurement of the thickness of a thinilm on a substrate using interference effects in the thin film. Thermal radiation of the substrate is utilized as a source of interfering bundles of electromagnetic radiation which intensity thereof is measured with a charge-coupled-device camera, and signal-processing electronics is utilized for determining in accordance with the Airy formula the thickness of the thin film on the substrate in the planar direction of the thin film and the index of refraction thereof. The low time constant for the measurement and evaluation enables the process for the recording of measurements be used for the control of coating or removal procedures.