Guide plate for probe card and probe card having same

    公开(公告)号:US11193955B2

    公开(公告)日:2021-12-07

    申请号:US16794147

    申请日:2020-02-18

    Abstract: The present invention provides a guide plate for a probe card. The guide plate for the probe card according to the present invention includes: a first guide plate including a plurality of first pin insertion holes formed therein, and made of an anodic oxide film; and a second guide plate disposed to be spaced apart from the first guide plate by a predetermined distance, and including a plurality of second pin insertion holes through which probe pins passing through the first pin insertion holes pass, wherein a buffer part is provided at least partially on each of an upper portion and a lower portion of the first guide plate.

    Micro LED transfer head
    15.
    发明授权

    公开(公告)号:US11145788B2

    公开(公告)日:2021-10-12

    申请号:US16734175

    申请日:2020-01-03

    Abstract: The present invention relates generally to a micro LED transfer head transferring a micro light-emitting diode (micro LED) from a first substrate to a second substrate. More particularly, the present invention relates to a micro LED transfer head holding and transferring a micro LED in which holding portions and surrounding areas of the holding portions are configured of different materials.

    UV STERILIZER
    18.
    发明申请

    公开(公告)号:US20210244836A1

    公开(公告)日:2021-08-12

    申请号:US17167938

    申请日:2021-02-04

    Abstract: Proposed is a UV sterilizer. In a UV sterilizer according to an embodiment of the present disclosure, a light source module that emits ultraviolet (UV) light is provided between an upper body and a lower body where a fluid flows, thereby sterilizing a fluid by irradiating the flowing fluid with UV light.

    METAL PART FOR PROCESS CHAMBER AND METHOD FOR FORMING LAYER OF METAL PART FOR PROCESS CHAMBER

    公开(公告)号:US20210115584A1

    公开(公告)日:2021-04-22

    申请号:US17070057

    申请日:2020-10-14

    Inventor: Bum Mo AHN

    Abstract: Proposed are a metal part for a process chamber and a method of forming a thin film layer of the metal part for the process chamber. More particularly, proposed are a metal part for a process chamber and a method of forming a thin film layer of the metal part for the process chamber, wherein the metal part is installed in a process chamber used in a display or semiconductor manufacturing process or constitutes a part of the process chamber, and a large thickness of the thin film layer of the metal part for the process chamber is easily secured, thereby achieving an extended lifespan by preventing cracks of the metal part for the process chamber, while preventing outgassing due to pores.

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