Mems sensor for sensing deformation by breaking contact between two electrodes

    公开(公告)号:US11946741B2

    公开(公告)日:2024-04-02

    申请号:US17605692

    申请日:2020-05-07

    Applicant: SILMACH

    CPC classification number: G01B7/18 B81B3/0086 B81B2201/02 B81B2203/04

    Abstract: The present invention relates to a MEMS deformation sensor for measuring a relative movement between two regions of a structure, the sensor comprising: —a first portion (2) and a second portion (3) that are movable with respect to one another along a direction of measurement (X); —a thrust element (4) mounted fixed with respect to the first portion; —a first electrode (A) and a second electrode (B) that are capable of being raised to different electrical potentials, each mounted fixed with respect to the second portion; —a connecting portion (I) forming an electrical link between the first electrode and the second electrode, the thrust element applying a load to the connecting portion when the first portion moves with respect to the second portion along the direction of measurement beyond a predetermined distance, the electrical link being broken under the effect of the load.

    Passive indexing of a movable element having teeth

    公开(公告)号:US09882510B2

    公开(公告)日:2018-01-30

    申请号:US14371726

    申请日:2013-01-11

    Applicant: SILMACH

    CPC classification number: H02N1/008 F16H31/007 G04C3/00 G06M1/04

    Abstract: The invention relates to a device including: a movable element (1) comprising teeth (11; 11i, i, 11i+1, 11i+2, 11i+3, 11i+4); a driving element (2) for engaging with the teeth (11; 11i, 11i+1, 11i+2, 11i+3, 11i+4) of the movable element (1) so as to set the movable element (1) in motion in a direction of movement; an actuator element (3) capable of generating an alternating movement so as to move the driving element (2) according to at least two phases, i.e. a driving phase, during which the driving element (2) is engaged with a tooth (11; 11i, 11i+1, 11i+2, 11i+3, 11i+4) of the movable element (1), and a return phase without driving, during which the driving element (2) is shifted with respect to the movable element (1); and a first indexing element (4), which includes a first indexing finger (41) to be positioned between two teeth (11; 11i, 11i+1, 11i+2, 11i+3, 11i+4) of the movable element (1), and which is connected to the actuator element (3) in order to move the driving element (2) and the first indexing finger (41) simultaneously.

    PASSIVE INDEXING OF A MOVABLE ELEMENT HAVING TEETH
    15.
    发明申请
    PASSIVE INDEXING OF A MOVABLE ELEMENT HAVING TEETH 有权
    具有移动元件的被动指示

    公开(公告)号:US20150022053A1

    公开(公告)日:2015-01-22

    申请号:US14371726

    申请日:2013-01-11

    Applicant: SILMACH

    CPC classification number: H02N1/008 F16H31/007 G04C3/00 G06M1/04

    Abstract: The invention relates to a device including: a movable element (1) comprising teeth (11; 11i, i, 11i+1, 11i+2, 11i+3, 11i+4); a driving element (2) for engaging with the teeth (11; 11i, 11i+1, 11i+2, 11i+3, 11i+4) of the movable element (1) so as to set the movable element (1) in motion in a direction of movement; an actuator element (3) capable of generating an alternating movement so as to move the driving element (2) according to at least two phases, i.e. a driving phase, during which the driving element (2) is engaged with a tooth (11; 11i, 11i+1, 11i+2, 11i+3, 11i+4) of the movable element (1), and a return phase without driving, during which the driving element (2) is shifted with respect to the movable element (1); and a first indexing element (4), which includes a first indexing finger (41) to be positioned between two teeth (11; 11i, 11i+1, 11i+2, 11i+3, 11i+4) of the movable element (1), and which is connected to the actuator element (3) in order to move the driving element (2) and the first indexing finger (41) simultaneously.

    Abstract translation: 本发明涉及一种装置,包括:包括齿(11; 11i,i,11i + 1,11i + 2,11i + 3,11i + 4)的可移动元件(1) 驱动元件(2),用于与可移动元件(1)的齿(11; 11i,11i + 1,11i + 2,11i + 3,11i + 4)接合,以将可移动元件(1) 运动方向运动; 致动器元件(3)能够产生交替运动,以便根据驱动相位至少两个相位驱动驱动元件(2),驱动元件(2)与齿(11; 11i,11i + 1,11i + 2,11i + 3,11i + 4)以及无驱动的返回相位,驱动元件(2)相对于可动元件 1); 和第一分度元件(4),其包括位于可动元件的两个齿(11; 11i,11i + 1,11i + 2,11i + 3,11i + 4)之间的第一分度指(41) 1),并且其连接到致动器元件(3),以便同时移动驱动元件(2)和第一分度指(41)。

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