GAS BAFFLE AND DISTRIBUTOR FOR SEMICONDUCTOR PROCESSING CHAMBER
    12.
    发明申请
    GAS BAFFLE AND DISTRIBUTOR FOR SEMICONDUCTOR PROCESSING CHAMBER 失效
    用于半导体加工室的气体和分配器

    公开(公告)号:US20080121179A1

    公开(公告)日:2008-05-29

    申请号:US11564150

    申请日:2006-11-28

    IPC分类号: C23C16/52 C23C16/44

    摘要: Apparatus and methods for distributing gas in a semiconductor process chamber are provided. In an embodiment, a gas distributor for use in a gas processing chamber comprises a body. The body includes a baffle with a gas deflection surface to divert the flow of a gas from a first direction to a second direction. The gas deflection surface comprises a concave surface. The concave surface comprises at least about 75% of the surface area of the gas deflection surface. The concave surface substantially deflects the gas toward a chamber wall and provides decreased metal atom contamination from the baffle so that season times can be reduced.

    摘要翻译: 提供了用于在半导体处理室中分配气体的装置和方法。 在一个实施例中,用于气体处理室的气体分配器包括主体。 主体包括具有气体偏转表面的挡板以将气体的流动从第一方向转移到第二方向。 气体偏转表面包括凹面。 凹面包括至少约75%的气体偏转表面的表面积。 凹面大致使气体朝向室壁偏转,并且提供了来自挡板的减少的金属原子污染物,从而可以减少季节时间。

    METHOD AND SYSTEM FOR FLOW CONTROL BETWEEN A BASE STATION CONTROLLER AND A BASE TRANSCEIVER STATION
    13.
    发明申请
    METHOD AND SYSTEM FOR FLOW CONTROL BETWEEN A BASE STATION CONTROLLER AND A BASE TRANSCEIVER STATION 有权
    基站控制器与基站收发站之间的流量控制方法与系统

    公开(公告)号:US20070223383A1

    公开(公告)日:2007-09-27

    申请号:US11748412

    申请日:2007-05-14

    IPC分类号: H04L12/26

    摘要: According to a disclosed embodiment, a flow indication counter is incremented each time a data packet is transmitted from a buffer. When the number of data packets transmitted equals or exceeds a threshold number, a flow indication message comprising the buffer window size is generated and transmitted to the base station controller. Further, flow indication messages can be generated and transmitted every threshold time interval, independently of the number of data packets transmitted to ensure that flow indication messages are sent at least every preset time interval. Moreover, a system for flow control can be constructed comprising a flow indication counter module configured to provide an updated number of data packets transmitted. The system further comprises a window size monitoring module which determines the buffer window size and a message generating module which generates a flow indication message comprising the buffer window size.

    摘要翻译: 根据所公开的实施例,每当从缓冲器发送数据分组时,流量指示计数器递增。 当发送的数据包的数量等于或超过阈值数时,产生包括缓冲器窗口大小的流指示消息并将其发送到基站控制器。 此外,流量指示消息可以在每个阈值时间间隔生成和发送,而与发送的数据分组的数量无关,以确保至少每预设时间间隔发送流量指示消息。 此外,可以构造用于流控制的系统,其包括被配置为提供发送的更新数量的数据分组的流量指示计数器模块。 该系统还包括确定缓冲器窗口大小的窗口大小监视模块和产生包括缓冲窗口大小的流指示消息的消息生成模块。